This standard specifies the method of element identification using Auger electron spectroscopy obtained by ordinary electron spectrometer. This standard applies to the Auger spectrum produced by electron or X-ray irradiation of the sample surface. This standard does not apply to the Auger spectrum produced by ion excitation. JB/T 6976-1993 Auger Electron Spectroscopy Element Identification Method JB/T6976-1993 Standard Download Decompression Password: www.bzxz.net

Mechanical Industry Standard of the People's Republic of China
JB/T6976-93
Method for element identification by Auger electron spectroscopy
Published on July 27, 1993
Ministry of Machinery Industry of the People's Republic of China
Implementation on July 1, 1994
Method for element identification by Auger electron spectroscopy
1 Subject content and scope of application
JB/T6976-93
This standard specifies the method for element identification using the Auger electron spectrum (hereinafter referred to as Auger spectrum) obtained by ordinary electron spectrometer. This standard applies to the Auger spectrum (direct spectrum or differential spectrum) generated by electron or X-ray irradiation on the sample surface. This standard does not apply to the Auger spectrum generated by high-particle excitation. 2 Basic Principles
Auger Electron Spectroscopy is a technique that uses electrons or other excitation sources to form vacancies in the inner electron shells of sample atoms, cause Auger processes, and measure the energy distribution of Auger electrons. Since the energy of the Auger electrons to be characterized is related to the atomic number of the atom, the type of atom, that is, a certain element, can be identified based on the energy of the Auger electrons corresponding to the position of the Auger peak in the energy spectrum. 3 Instruments and Equipment
3.1 Ultra-high vacuum analysis chamber.
3.2 Electron Energy Analyzer
The electron energy analyzers that can be used include the retarding field analyzer (RFA), the cylindrical mirror analyzer (CMA) (single-pass or double-pass), and the hemispherical analyzer (HSA). 3.3 Electron gun or X-ray source.
3.4 ​​Electron detector.
3.5 Ion gun.
3.6 Data collection and processing system.
4 Technical conditions for measurement
4.1 Vacuum
The analysis chamber should have the ability to reach ultra-high vacuum to minimize the contamination of the sample by residual gas. The analysis is carried out in a vacuum chamber better than 10"Pa.
4.2 Electron beam excitation
4.2.1 Electron beam energy 1~10keV.
4.2.2 Electron beam current 10-\~10-A (for samples susceptible to radiation damage, a smaller beam current or beam current density can be used). 4.2.3 If the phase-locked detection method is used when recording the spectrum, the typical modulation signal is a frequency of 510kHz and an amplitude of 2~6eVpp. (peak-to-peak voltage value) sine wave or square wave.
4.3 X-ray excitation
4.3.1 X-ray source
Anode target voltage 5~20kV.
4.3.2 X-ray source anode target current 550mA.
4.4 Auger electron kinetic energybzxZ.net
Approved by the Ministry of Machinery Industry on July 27, 1993
Implemented on July 1, 1994
JB/T 6976-93
4.4.1 Measurement range: Auger electron energy is 202000eV or higher. Covers the main Auger electron energies of all elements except H and He (the energy range can be set as required when recording the spectrum to shorten the analysis time). 4.5 Standard samples and standard Auger spectra
Relevant standard samples and standard Auger spectra should be available. 5 Identification steps
5.1 Identify the peak with the largest signal intensity in the Auger electron spectrum and record the energy and peak shape characteristics of this peak. 5.2 If an Auger process produces If there are multiple peaks, further measure the energy and signal intensity of each Auger peak relative to the strongest peak. 5.3 If the energy and relative intensity of each Auger peak measured are consistent with the energy and relative intensity of each Auger peak in the Auger spectrum of a standard element sample within the measurement error range, it can be determined that the same element as in the standard sample exists in the unknown spectrum. 5.4 Set aside the Auger peaks caused by this element for further investigation. 5.5 Continue to investigate the next strongest peak and repeat the above steps. 5.6 As the signal intensity decreases, investigate each peak in turn until all the peaks are All Auger peaks are identified. 5.7 Since the intensity of the Auger signal is related to the concentration of the element being measured under certain operating conditions, only the strongest Auger peak of an element with a low content may be recorded. The identification of such weak peaks should be confirmed by repeated scanning of a single peak that optimizes the signal-to-noise ratio. Interference in determination
6.1 The above element identification steps are only effective when the characteristic shape of the Auger peak does not change (excluding changes in instrument parameters such as analyzer resolution).
6.1.1 When the Auger peak energies of two or more elements are within the energy width range of these peaks, the peaks will overlap, causing changes in the Auger peak shape.
Element identification requires separating the spectral lines of a possible component element from the combined data. Spectral line separation can be achieved by numerical calculation and comparing the separated spectral peaks with the reference spectrum of another possible element. Simpler methods can be performed by visual separation by experienced workers, 6.1.2 The Auger chemical effect can cause changes in the Auger peak energy, peak shape or relative signal intensity of each Auger peak. In such cases, a reference spectrum of a specific sample containing the element should be used. 6.2 Ionization loss peak (electron excitation), photoelectron peak (X-ray excitation), or charging effect 6.2.1 Ionization loss peaks caused by primary electrons may sometimes appear in the Auger spectrum, especially when the primary electron beam energy is relatively low. In such cases, the peak can be identified as an ionization loss peak by the characteristic that the energy of the ionization loss peak shifts by the same amount when the primary electron beam energy is changed. It is recommended that the energy of the primary electron beam should be at least 3 times the energy of the relevant Auger electron to minimize the interference of the ionization loss peak. 6.2.2 When excited by characteristic X-rays (such as MgK), a photoelectron peak will appear in the spectrum. Changing the characteristic X-ray (such as MgK to AIK) will cause the photoelectron peak to shift relative to the Auger peak in the kinetic energy coordinate, thus proving that the peak is a photoelectron peak. 6.2.3 If the entire harmonic diagram is shifted in energy, it indicates the presence of a charging effect. This is particularly common when analyzing the surface of insulators. This requires correction to eliminate this effect.
Additional Notes:
This standard was proposed and managed by the Wuhan Materials Protection Research Institute of the Ministry of Machinery Industry. The wood standard was drafted by the Wuhan Materials Protection Research Institute. The main drafters of this standard are Meng Ximing, Yang Yezhi, Wei Qimou, Lv Zhongzhou, and Fu Junwu. ·2
People's Republic of China
Mechanical Industry Standard
Auger Electron Spectroscopy Element Identification Method
JB/T6976-93
Published by the Machinery Standardization Research Institute of the Ministry of Machinery Industry Printed by the Machinery Standardization Research Institute of the Ministry of Machinery Industry (PO Box 8144, Beijing
Postal Code 100081)
Copyright reserved
No reproduction allowed
Format 880×1230
First edition in April 1994
Sheet 3/8
Number of words 4,000
First printing in April 1994
Print run 00,001-500
Price 3.00 Yuan
No. 1420
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