This standard specifies the ball milling test method for the thickness of ion-plated hard films. This standard is applicable to various hard films made by PVD and CVD methods, and can also be used for the thickness of oxide films and electroplated layers. JB/T 7707-1995 Ion-plated hard film thickness test method ball milling method JB/T7707-1995 Standard download decompression password: www.bzxz.net
This standard specifies the ball milling test method for the thickness of ion-plated hard films. This standard is applicable to various hard films made by PVD and CVD methods, and can also be used for the thickness of oxide films and electroplated layers.

Mechanical Industry Standard of the People's Republic of ChinaWww.bzxZ.net
JB/T 7707-
Test Method for Thickness of Ion-plated Hard Film
Ball Milling Method
Published on 1995-06-20
Published by the Ministry of Machinery Industry of the People's Republic of China
Implemented on 1996-01-01
Mechanical Industry Standard of the People's Republic of China
Test Method for Thickness of Ion-plated Hard Film
Ball Milling Method
1 Subject Content and Scope of Application
This standard specifies the ball milling test method for the thickness of ion-plated hard films. JB/T7707-95
This standard is applicable to various hard films made by PVD and CVD methods, and can also be used to test the thickness of oxide films and electroplating layers. 2 Ball milling principle and film thickness calculation
Ball milling is a cross-sectional observation method. It uses a rotating steel ball with an appropriate amount of grinding paste to grind a spherical pit on the surface of the specimen for observation and measurement. The contact part between the steel ball and the film surface and the substrate is two concentric circles, as shown in Figure 1. Film
Substrate
Film
Substrate
Figure 1 Cross-sectional view of grinding pit
The thickness of the film is related to the radius of the steel ball and the size of the grinding pit, as shown in formula (1): T
Wherein: T—film thickness.μm;
—steel ball radius-um;
2a——edge diameter formed on the surface of the film after grinding, umApproved by the Ministry of Machinery Industry on June 20, 1995
.(1)
Implemented on January 1, 1996
JB/T7707-95
-edge diameter of the interface between the film and the substrate after grinding, um. 2a
=α+b
Note: () The grinding pit of the steel ball on the surface of the cylinder is an elliptical sphere, then 2α and 26 are the major axes of the ellipse. ②) After grinding, the composite film is obtained as a group of concentric rings (or elliptical rings), each group of rings represents the corresponding film layer, and the thickness of each film layer can be measured. 3 Test method
3.1 Ball milling device
The ball milling device is mainly composed of a magnetic fixture, a motor, a rotating shaft, a stage, a bottom plate and a power supply, as shown in Figure 2. During the test, the position of the rotating shaft and the inclination of the stage are adjusted to make the steel ball contact the test point and the rotating shaft of the specimen. When the motor rotates, the steel ball rotates under the action of the friction torque. Figure 2 Ball milling device
3.2 Test requirements
The surface roughness of the substrate of the specimen is R≤0.8um: the steel ball uses a ball bearing steel ball with a diameter of 10~30mm, generally 20mm; the particle size of the diamond abrasive paste is 3μm.
Test procedure
Clamp the specimen on the stage:
Put the steel ball on the test point of the specimen (the curved surface should be its vertex) and the rotating shaft, and the axis of the rotating shaft should be parallel to the film surface; apply an appropriate amount of grinding paste on the surface of the steel ball and dilute it with alcohol; start the motor to rotate the steel ball:
Stop grinding when the grinding depth reaches twice the thickness of the film layer, wipe the surface of the specimen clean; place the specimen on the stage of the real optical microscope. Measure the size of the grinding pit at 100 times magnification: Calculate the film thickness according to formula (1).
Additional instructions:
JB/T7707-95
This standard is proposed by the National Metal and Non-metal Covering Standardization Committee. This standard is under the jurisdiction of Wuhan Materials Protection Research Institute. This standard is drafted by Shanghai Tool Factory. This standard was mainly drafted by Jin Dayi
People's Republic of China
Mechanical Industry Standard
Test method for ion plating hard film thickness
Ball milling
JB/T 7707-95
Published and distributed by the Machinery Standardization Research Institute of the Ministry of Machinery Industry Printed by the Machinery Standardization Research Institute of the Ministry of Machinery Industry (P.O. Box 8144, Beijing
Postal Code 100081>
No reproduction is allowed
Copyright reserved
Format 880×12301/16
Number of words 6,000
6 sheets 1/2
First edition in January 1996 First printing in January 1996 Printing number 00,001-500 Price 5.00 yuan
No. 95-005
S6-1
L/ar
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