GB/T 4061-1983 Chemical corrosion test method for interlayer of silicon polycrystalline cross section
Basic Information
Standard ID:
GB/T 4061-1983
Standard Name: Chemical corrosion test method for interlayer of silicon polycrystalline cross section
Chinese Name:
硅多晶断面夹层化学腐蚀检验方法
Standard category:National Standard (GB)
state:in force
Date of Release1983-01-02
Date of Implementation:1984-01-02
standard classification number
Standard ICS number:Metallurgy>>Metal Material Testing>>77.040.30 Chemical Analysis of Metal Materials
Standard Classification Number:Metallurgy>>Methods for testing physical and chemical properties of metals>>Methods for testing chemical properties of H25 metals
associated standards
Publication information
other information
Release date:1983-12-20
Review date:2004-10-14
Drafting unit:Emei Semiconductor Materials Factory
Focal point unit:National Technical Committee for Standardization of Semiconductor Materials and Equipment
Publishing department:National Bureau of Standards
competent authority:National Standardization Administration
Introduction to standards:
This standard applies to silicon polycrystalline rods grown by depositing silicon polycrystalline on thin silicon cores by hydrogen reduction of trichlorosilane and silicon tetrachloride. GB/T 4061-1983 Chemical corrosion test method for interlayer of silicon polycrystalline cross section GB/T4061-1983 standard download decompression password: www.bzxz.net
Some standard content:
National Standard of the People's Republic of China
Test Method for Chemical Corrosion of Silicon Polymer Section Polyaystalline sllcon-Exn miadtiahmethad assesement nf aridwirhex antrst-section by cheinical tomusiueDE
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CR 4061--23
Product::Quality original code name
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4 Light layer assessment
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Additional instructions:
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Eight standards leaked in the reading of the semi-conductor add materials: the drafting of the major standards ten must start the plan to remember the environment.
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