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[CS23,160
Machinery Industry Standard of the People's Republic of China
JB/T 9125—1999
Vertical Turbomolecular Pump
Vertical turbomolecular pump
1999-07-12 Issued
National Bureau of Machinery Industry
2000-01-01 Implementation
JB/T125-199
This standard is a revision of ZD6015.1-89 Types and Basic Parameters of Vertical Turbomolecular Pumps and ZBJ78015.2-89 Technical Conditions for Vertical Turbomolecular Pumps. The original standard is revised and revised. The main technical contents are changed: the standard replaces BJ7015.1-89 and BJ78015.2-89 from the date of implementation. This standard is proposed by the National Technical Committee for Standardization of Airborne Technology and is issued on the date of implementation. The drafting units of this standard are: Shenyang Vacuum Technology Research Institute, Nanguang Machinery Factory. The main drafters of this standard are: Li Zhuying, Li Shoubin, Feng Lansheng. This standard was first issued in 1989.
1 Scope
Machinery Industry Standard of the People's Republic of China
Vertical turbomolecular pump
Verticalturha molecalarpump
JB/T9125-1999
No. 2DJ78015.1-R
ZB J78015.29
This standard specifies the type, technical parameters, quotation requirements, test methods, inspection rules, marking, packaging, transportation and storage of vertical turbomolecular pumps.
This standard is applicable to vertical full-wheel compressors with fore-stage pumps and variable frequency power supplies (hereinafter referred to as referenced standards). 1.2 Referenced standards
The following standards contain the following articles, which are cited in this standard and constitute the provisions of this standard. When this standard is published, the versions shown are valid. All standards will be revised. All parties using this standard should explore the possibility of using the new version of the following standard products. GB19T—1990
GB/T4987—1985
GB/I6070—1995
GBT 6071... 1985
GBT 6587.1-1986
GR/T6587.2—1986
GR/T6587.3—1986
GB.T6587.41986
GB/T6587.5—1986
GB/T6587.61986
GBI'777 41987
GB.:133061991
JB.T 5278—[991
JB.TB106—1999
JB/TB[07—1999
3 Definitions
This standard adopts the following definitions.
3.1 Pumping rate
Packaging storage and transportation graphic signs
Clamping type vacuum quick release flange
Vacuum flange
Ultra-high vacuum flange
Electronic measuring instrument
Total period of the round-trip test
Electronic measuring instrument
Temperature test
Electronic measuring instrument
Humidity test
Electronic profit measuring instrument Vibration test
Impact test
Electronic measuring instrument
Electronic measuring instrument transportation test
Method for measuring performance of turbomolecular pump
Wire seal and vacuum flange
Volume vacuum pump medium acoustic test method
Volume point air sampling vibration intensity measurement method
When the pump is working under the normal working condition, the volume of the gas pumped per unit time passes through the test chamber and the intake of the test chamber! 1, that is, the quotient of the gas flow and the equilibrium pressure measured at the specified position of the test chamber. 3.2 Ultimate pressure
Guohao Machinery Industry 1999-07-12 approved 2000-01-01 Implementation
JBT9125-[999
Under the specified working conditions, the pump does not introduce gas into the test cover. After the shell and the test cover are baked, the equilibrium pressure measured at the fixed position of the test cover within 48 hours is less than the pressure of the pump.
3.3 Compression ratio
The air flow through the pump inlet is half, and the partial pressure of the pumped gas in the front stage area accounts for at least % of the total pressure. The ratio of the front stage pressure of the system to the intake pressure is the compression ratio of the molecular pump to the gas. 3.4 Starting time
The time required from the power supply to the system speed reaching 90% of the rated speed. 4 Model
4［Model indication method
4.2 Marking example
Aeration rate, 155
Inlet diameter, mm
Vertical turbomolecular pump, indicated by F
Vertical full-wheel molecular pump with an inlet diameter of 100mm and a pumping rate of 220Lts, marked as: F-100/2205 Basic parameters
The basic parameters of the engine are shown in Table 1
Pumping rate
Ultimate pressure
Compression ratio
Starting time
Weihu2
Intake valve diameter
F-100/110
F-100/230
F-160/450
F-250/14
3 × 0
F-32020010
F-400/35Kl
Outlet diameter
Power supply electrical method
Power supply power consumption
Power supply starting power test
F-E00/110
JB/T9125-1999
Table 1 [End]
F-100/ 220
F-160:450
P-250 door 4K
F-32U240U
220±10% (5WH=) or 380+10% (50H)220
Electric power consumption of the following types:
a) Electronic analog type dynamic frequency conversion power supply,
b) Micromachine controlled automatic frequency conversion power supply.
c) Motor inspection type power supply.
6 Technical requirements
The main technical performance of the pump should meet the requirements of the design approved by the specified procedures. 5.1
6.2 The system should be able to work under the following environmental conditions: a) Ambient temperature is 3-40°C
b) Relative humidity is less than 85%
Cooling water inlet temperature is not higher than 25°C
F400:3500
. .1 The pump should avoid pumping dusty, corrosive and explosive gases. It should not be directly introduced into the atmosphere during normal operation. Strong vibration is not allowed.
6.4 For the purpose of degassing, the pump casing, test cover and vacuum gauge are baked. The baking temperature shall not exceed the following regulations: a) Pump body and pump casing flange: 120°C; 6) Test cover vacuum container: 300°C
) Vacuum gauge: 400°C.
Recommend the front stage system to meet the requirements of the 2nd edition
Suction layout required
Axial air connection rate
Reduction stage repulsion
JB/T9125-1999
6.6 The air inlet connection flange and seal of the pump shall comply with the provisions of GR/T071 and JB/T5278. 6.7 The air outlet connection flange and seal net of the pump shall comply with the provisions of GB/T4982 and GR/T6070. 6.B In order to prevent foreign matter from entering the pump, the air inlet of the pump shall be equipped with a corrosion-resistant metal filter net and fixed: 6.9 The pump shall be equipped with an indication sign of the half-machine running direction in a visible position. 6.10 The pump should be lubricated with special oil and paste, and its saturated vapor pressure should not exceed 3×10*Pa under overflow. 6.11 The cooling water flow rate should meet the design requirements and have protective devices. 6.12 The motor and baking device of the system should have insulation measures for the pump shell, and its insulation resistance should not be less than 2M2. 6.13 The output voltage of the power supply should not exceed the value specified in the design drawing and have protective measures. 6.14 The phase voltage of the power supply output should be symmetrical, and its asymmetry should not exceed ±0.5V. 6.15 The mean time between failures (MTBF) of the host and power supply under normal working conditions should meet the following requirements: host: 8000h
power supply: 22000h
test method
, ultimate pressure test
The test of the ultimate pressure should meet the provisions of GB 4. 7.2 Compression ratio test
7.2.1 The compression ratio test shall, in addition to complying with the provisions of GBT7774, set the mass spectrometer partial pressure with a mass number of 1 to 100 with sufficient resolution.
7,2.3 The gases used for the compression ratio test are nitrogen [N2] and set gas (H2O), and their purity should be above 99.9%. 7.2.3 The compression ratio test method shall comply with the provisions of GBT7774. When testing the compression ratio of nitrogen, the partial pressure selection shall also be used for monitoring.
7.3 Pumping rate test
The pumping rate test shall comply with the provisions of GB.T7774. 7.4 Start-up time test
The start-up time test shall comply with the provisions of GBT7774. 7.5 Power test
7.5.1 The pump shall be firmly fixed on the test channel, and the weight of the test plate shall be 4 times the weight of the test ticket. 7.5.2: The pump outlet 11 and the front pump should be connected by a gold corrugated or vacuum rubber hose. 7.5.3 After the pump runs normally for 1 hour, measure the pump speed according to the method specified in JB/T8107. The measuring positions are A, B, C, D, and F as shown in Figure 1.
7.6 Sound measurement
[9125—1999
2.6.1 The installation of the pump should comply with the requirements of 7.5.1 and 7.5.2.
7.6.2 After the pump runs normally for 1 hour, the front pump stops running and immediately connects the sound of the force measurement system specified in JB/TB106. 7.7 Speed test
7.7.1 The installation of the pump should comply with the requirements of 7.5.1 and 7.5.2. 7.7.2 After the pump stops running for 1 hour, test the pump speed. When measuring the speed, use a vibration meter to measure the amplitude of each measuring point on the radial circumference along the upper and lower differences, and express the pump speed value with the frequency of the maximum peak value. 7.8 Power supply test
7.1 When the power supply is tested with the earthwork, use a gauge instrument to check whether the output voltage meets the requirements of 6.14. 7.1 When the power supply is tested with the host, use a gauge instrument to check whether the power supply meets the requirements of the design drawings. 7.8.3 The environmental test of the power supply shall be carried out in accordance with the group 1 specified in GB/T6587.1-6587.6-1086. 7.9 Half-average light-discharge working time test
The average operating time of the host and power supply shall be assessed by the test report or user use report (continuous or cumulative operating time) within the past three years.
7.10 Continuous operation test
When the host and power supply are tested, a continuous operation test of 500h shall be carried out. 8 Inspection rules 8. Pumps (including main engine and motor) must be inspected and qualified by the inspection department of the manufacturer, and can only leave the factory with a quality certificate. 8.1 The inspection is divided into factory inspection and type inspection. 8.2.1 Factory inspection must be carried out for each unit. Factory inspection items include: a) appearance of the chip tray; b) connection size and output cover shield quality; c) reliability of safety protection device; d) limit pressure; e) data; f) power supply number; and ) completeness of the product.
JB/T:9125—1999
8.2.2. Any newly manufactured product or any major change in product structure, manufacturing process, materials used, etc. shall be subject to type inspection. Type inspection includes:
a) All items of “export inspection”:
b) Compression ratio;
) Pumping speed;
d) Starting time;
e) Noise;
f) Environmental test;
|) Operation test. |tt||8.2.3 Type inspection: 5% of each batch, but not less than 2 units. If unqualified, double sampling shall be carried out. If unqualified again, all products shall be inspected. 9. Marking, packaging, transportation and storageWww.bzxZ.net
2.1 Each product shall be equipped with a product label in a visible position. The type and size of the label shall comply with the provisions of GB/T13306. The product label shall at least indicate the following:
a) Product model and specification:
b) Manufacturer's name:
e) Product number and manufacturing date.
9.2 Before packaging, the accumulated water in the cooling water pipe of the main engine and the lubricating fluid in the oil cup shall be removed, and the air inlet and outlet of the pump shall be sealed with a plate.
9.3 When packing the card machine and power supply, first cover them with plastic film, then seal them with foaming material and put them into the packaging box: cover them with plastic film and then directly put them into the packaging box with soft spray material, and fix them. When the power supply is sealed with foaming material, a desiccant (such as silica gel) should be put in.
.4 There should be storage and transportation icons on the outside of the packaging box, and the logo should comply with the provisions of GB91. 9.5 The packaging box should be suitable for railway, highway, inland waterway and aviation transportation. During transportation and storage, violent shaking and inversion are not allowed. If there are special requirements for the packaging box, they should be handled in accordance with relevant regulations. 9.6 The host and power supply should be stored in a room with good ventilation. The storage period of the system is generally not more than 6 months. If it exceeds 6 months, it should be regularly checked.
9.7 Each machine should be accompanied by the following documents when it leaves the factory: a) Product manual; b) Product certificate; c) Packing list.2 Before packaging, remove the accumulated water in the cooling water pipe of the main engine and the lubricating fluid in the oil cup, and seal the air inlet and outlet of the pump with a plate.
9.3 When packaging the card machine and power supply, first cover them with plastic film, then seal them with foaming material and put them into the packaging box: Cover them with plastic film and then directly put them into the packaging box with soft spray material, and seal them firmly. When the power supply is sealed with a film cover, a desiccant (such as silica gel) should be placed. 4 There should be a storage and transportation icon mark on the outside of the packaging box, and the mark should comply with the provisions of GB91. 9.5 The packaging box should be suitable for railway, highway, inland waterway and aviation transportation. During transportation and storage, violent shaking and inversion are not allowed. If there are special requirements for the packaging box, follow the relevant regulations. 9.6 The host and power supply should be stored in a well-ventilated room. The storage period of the system is generally not more than 6 months. If it exceeds 6 months, it should be regularly checked in the box.
9.7 Each machine should be accompanied by the following documents when it leaves the factory: a) Product manual; b) Product certificate;
) Packing list.2 Before packaging, remove the accumulated water in the cooling water pipe of the main engine and the lubricating fluid in the oil cup, and seal the air inlet and outlet of the pump with a plate.
9.3 When packaging the card machine and power supply, first cover them with plastic film, then seal them with foaming material and put them into the packaging box: Cover them with plastic film and then directly put them into the packaging box with soft spray material, and seal them firmly. When the power supply is sealed with a film cover, a desiccant (such as silica gel) should be placed. 4 There should be a storage and transportation icon mark on the outside of the packaging box, and the mark should comply with the provisions of GB91. 9.5 The packaging box should be suitable for railway, highway, inland waterway and aviation transportation. During transportation and storage, violent shaking and inversion are not allowed. If there are special requirements for the packaging box, follow the relevant regulations. 9.6 The host and power supply should be stored in a well-ventilated room. The storage period of the system is generally not more than 6 months. If it exceeds 6 months, it should be regularly checked in the box.
9.7 Each machine should be accompanied by the following documents when it leaves the factory: a) Product manual; b) Product certificate;
) Packing list.
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