GB/T 15861-1995 General technical requirements for ion beam etching machines

Basic Information

Standard ID: GB/T 15861-1995

Standard Name: General technical requirements for ion beam etching machines

Chinese Name: 离子束蚀刻机通用技术条件

Standard category:National Standard (GB)

state:in force

Date of Release1995-01-02

Date of Implementation:1996-08-01

standard classification number

Standard ICS number:Electronics>>31.200 Integrated Circuits, Microelectronics

Standard Classification Number:Electronic Components and Information Technology>>Electronic Industry Production Equipment>>L97 Processing Equipment

associated standards

Publication information

publishing house:China Standards Press

other information

Release date:1995-12-22

Review date:2004-10-14

Drafting unit:Changsha Semiconductor Process Equipment Institute of Electronics

Focal point unit:Ministry of Information Industry (Electronics)

Publishing department:State Bureau of Technical Supervision

competent authority:Ministry of Information Industry (Electronics)

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Introduction to standards:

This standard specifies the terminology, product classification, technical requirements, test methods, inspection rules, packaging, transportation, storage, etc. of ion beam etcher. This standard is applicable to general ion beam etcher with physical sputtering corrosion. GB/T 15861-1995 General Technical Requirements for Ion Beam Etchers GB/T15861-1995 Standard download decompression password: www.bzxz.net