This standard applies to electronic grade nitrogen used in the production process of semiconductor materials, discrete devices and integrated circuits. According to its use requirements, electronic grade nitrogen is divided into three levels, with the code: electronic grade I nitrogen code: DZN2-I; electronic grade II nitrogen code: DZN2-II; electronic grade III nitrogen code: DZN2-III. SJ 2795-1987 Electronic Grade Nitrogen SJ2795-1987 Standard download decompression password: www.bzxz.net
This standard applies to electronic grade nitrogen used in the production process of semiconductor materials, discrete devices and integrated circuits. According to its use requirements, electronic grade nitrogen is divided into three levels, with the code: electronic grade I nitrogen code: DZN2-I; electronic grade II nitrogen code: DZN2-II; electronic grade III nitrogen code: DZN2-III.

Standard of the Ministry of Electronic Industry of the People's Republic of China Electronic Grade Nitrogen
SJ279581
This standard applies to the electronic grade nitrogen used in the production process of discrete devices and integrated circuits of conductor materials. According to its use requirements, the electronic grade nitrogen is divided into blue grade and the code is: electronic grade I nitrogen code is: DZN-I:
electronic grade I nitrogen code is: DZN1,
electronic grade I nitrogen code is: D2NaI
1 Technical requirements 1.1 Electronic grade fluorine should meet the requirements in Table 1: Table 1 Technical indicators of electronic grade fluorine Index name Hydrogen content, PPm Rare content, ppms Carbon dioxide, ppn Composition of H2O2, ppm Ice content, ppm≤ Benzene content, 3(n,2 μm)i For example, for large-scale and routed fluorine, the gas content in Table 1 is volume ratio.
Issued by the Ministry of Industry on 1987-05-18
Manually use large-scale and small-scale power lines and filters
To ensure the accuracy of the requirements
For use in Europe,
for drying and other common errors
Implementation on 1988-10-01
SJ2795-87
The content of electronic grade nitrogen (C nitrogen) is calculated according to the following formula: 1.2
C=10%—C nitrogen: C nitrogen is the volume percentage of electronic grade nitrogen; C test method is the volume percentage content of quality.
2.1 The impurity content in electronic nitrogen should be tested according to the method specified in Table 2. 2. Test method for impurities in electronic grade ammonia
Impurity type
First grade magnetic
Third grade chemical
Test method number
GE 6 285 -85
SJ2807~78wwW.bzxz.Net
SI?a01-RT
SI2802-87
SI2793-82
GB5A32-1-36
S279R-2
Test method name
Determination of micro-protein in gas
Electrochemical warfarin method
Non-grade gas trace adjustment
Gas-sensitive syntax
Point-level and concentrated carbon bamboo
Biotherapy conversion blood method
Hypertension and middle class tt||Determination of the image of carbon dioxide
Determination of the maximum value of carbon dioxide in non-ionized gas
Visual steam point
Vapor production and distribution room
#Determination of the new seal in electronic waste gas
Reverse radiation method
: 0 The standard of the above method is to be approved
, and the standard of the following visual inspection method is to be approved. 3 Inspection rules
3.1 The quality inspection department of the electronic grade nitrogen gas user shall conduct regular inspections according to the technical indicators, which shall comply with the provisions of this standard. 3.2 The inspection (sampling) point of electronic grade nitrogen is in the pipe section from the purification device to the gas-using equipment. See the figure below: Inspection point
Gas source·
Location of inspection (sampling) point
Gas-using equipment
SJ2795-—87
3.3 When the gas source before the inspection point is changed, the various indicators from 2 to 3 in Table 1 must be inspected and shall comply with the provisions of this standard.
3.4 ​​The indicators 8 and 7 in the inspection after replacement and repair of the single pipes, pipe fittings and filter of the purification device shall comply with the provisions of this standard. 3.5 The metal pipes used for inspection shall be hard-connected to the inspection points. The pipes shall be as short as possible and shall not have any secondary contamination.
Additional notes:
This standard was proposed by the Clean Technology Society of the Chinese Institute of Electronics and sponsored by the Standardization Institute of the Ministry of Electronics Industry. This standard was drafted and revised by Chen Linxin and Tan Yihe of the Tenth Design Institute of the Ministry of Electronics Industry, Zhao Changsai of the Standardization Institute of the Ministry of Electronics Industry and Zhou Dinghua of the Beijing Semiconductor Device Test Center.
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