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Verification Regulation of Piezoresistive Vacuum Gauge

Basic Information

Standard ID: JJG 932-1998

Standard Name:Verification Regulation of Piezoresistive Vacuum Gauge

Chinese Name: 压阻真空计

Standard category:National Metrology Standard (JJ)

state:in force

Date of Implementation:1991-08-10

standard classification number

Standard Classification Number:General>>Metrology>>A53 Mechanical Metrology

associated standards

Publication information

publishing house:China Metrology Press

ISBN:155026-1454

Publication date:2004-04-22

other information

drafter:Zhao Xinhua

Drafting unit:Beijing Institute of Metrology

Focal point unit:National Pressure Measurement Technical Committee

Publishing department:State Administration of Quality and Technical Supervision

Introduction to standards:

JJG 932-1998 Piezoresistive Vacuum Gauge JJG932-1998 Standard download decompression password: www.bzxz.net
This regulation is applicable to the calibration of newly manufactured, in-use and repaired piezoresistive vacuum gauges.


Some standard content:

Verification Regulation or Piezoresistive Vacuum Gaugc of the People's Republic of China JJG932-1998 Issued on 1998-05-14 Implementation on 1998-10-01 Issued by the State Administration of Quality and Technical Supervision J.IG932-1998 Verification Regulation or Piezoresistive Vacuum Gaugc of the People's Republic of China Gauge
.IG932—1998
This inspection procedure was approved by the State Quality and Technical Supervision Commission on May 14, 1998, and was implemented on October 1, 1998.
Responsible unit: National Pressure Measurement Technical Committee Drafting unit: Beijing Metrology Science Research Institute The technical text of this procedure shall be interpreted by the unit. The main drafter of this regulation:
Zhao Xinhua
Participating drafters:
Du Xuechun
Pang Shixin
: 932—1998
[Beijing Institute of Metrology)
(Beijing Instrument Factory)
(Shenyang Instrument and Meter Technology Research Institute)
Technical requirements
III. Verification conditions
(I) Verification equipment
(II) Normal environmental conditions
Verification items and verification methods
(I) External insulation resistance
(II) Insulation resistance Calibration
(III) Calibration of pressure indication
V. Handling of calibration results
Appendix
Calibration record sheet for pressure and vacuum gauge
Appendix 2
Calibration certificate
Appendix 3 Notice of calibration results
JJG9321998
(2)
(2)
IIG 932—1998
Calibration procedure for piezoresistive vacuum gauge
This procedure is applicable to the calibration of piezoresistive vacuum gauges that are newly manufactured, used and after treatment. I. Overview
This is a non-vacuum gauge that is composed of a measuring display unit and an electronic device. The measuring display unit has two types: pointer type and digital type. It is a piezoresistive strain gauge. When working, the piezoresistive strain gauge deforms and outputs electrical signals, which are converted into corresponding pressure values ​​by the measuring display unit, and the values ​​are displayed digitally or by needle. The range of the positive vacuum gauge is 105.-10, and the range of the visual gauge is -101. Technical requirements
1 Appearance
1, 1 The measuring display unit of the positive resistance vacuum gauge should have the product name, model, number, manufacturing unit and factory date. The gauge should have the model and number. 1.2 The function keys of the measuring display unit should be able to work: the connecting cable should be illuminated, 13 The pointer type measuring display unit should not have zero point misalignment, stuck needle and uneven surface. 1.4 The digital display unit should not have missing characters, missing segments, and random number jumps. 1.5 The connector of the gauge should not be loose.
2 Insulation resistance
The insulated resistance of the piezoresistive point vacuum gauge to the machine light should not be less than 20. 3 Relative error of pressure indication
In the pressure measurement range of 10-103 P. (including 10°, 11 points), the relative error of indication should not exceed +20%:
3 Verification conditions
(I) Verification equipment
4 1 set of second-class standard vacuum device: pressure range is 10-1 Pa: 5 1 gas meter: 1, 2 levels.
6 1 thermometer: 1, 2.-50r:, graduation value 0.17, 1 meter: 3.0 level: bzxZ.net
8 1 high resistance meter: 5V.
(II) Calibration environment conditions
9 Ambient temperature: (23~5)
10 Relevant ambient humidity: greater than %RH:
11 Air pressure: 86~106kPa
I.IG:9321998
2 The calibration equipment shall mainly consider the heat source, electric field, external factors such as temperature, humidity and so on. IV. Verification Items and Verification Methods
—Appearance
1.1 1.2.3. 1.4 1.5 1.6 (I) Resistance test
1.2 When the power switch is in the open position, use a high resistance source with a rated current of 500V to measure the insulator resistance between the source and the housing, and measure to the corresponding value of 10. After reading the effect, the resistance value is in accordance with the standard. 2.3. The display value is
17 Under atmospheric pressure, the resistance meter is connected to the standard vacuum after the power is turned on, and the atmospheric pressure display is applied: that is, the vacuum is connected to the standard vacuum device, and the preheating is verified. 19 For full-scale and zero-point adjustment of the pressure gauge, the pressure and zero point should be adjusted respectively when the atmospheric pressure is not greater than 1Pa.
20 From low to high pressure, at 1×102, 3×10, 6×102, 1×10, 3×10, 6×103, 1×1013×10.6×10, 1×10° and other 10 points, the indication is checked. 21 According to the method of Article 20, repeat the flow measurement once. 22 The calculation formula of the relative temperature difference of the pressure gauge is: a-()/×100%
Where: pressure-normal vacuum gauge pressure indication, a: standard pressure value,
The relative temperature difference of the minimum indication of each calibration point should be in accordance with the requirements of Article 3. 5. Processing of calibration results and calibration cycle
Calibrating certificate for qualified users: Calibration settlement notice will be issued for unqualified users: The calibration period shall not exceed one year: 2.
Appendix 1
Inspection unit
Manufacturing unit
Ambient temperature code
Determined items:
2.Insulating electric seat
3. I, force to show the letter
Bi·Di
Dongguan two times
Conclusion:
Qualifier:
JJC932—1998
Piezoresistive vacuum gauge calibration record sheet
Vacuum gauge model
Dust gauge number
Leyuan wet man (flow RH)
Standard value/P.
Standard Bo/a
Pressure Chen
Vacuum reading value?
Verification period:
Auditor:
Relative error/(%)
Proposed error【】
Appendix 2
Appearance inspection
Insulation resistance
Relative error of pressure indication
Environmental environment during verification, change
Environmental humidity during verification
JJG 932—1998
Format on the back of the certificate
Verification results
Appendix 3
JJG 932199
Format on the back of the verification result notice
Verification results
Additional notes: This regulation has been approved by the National Pressure Measurement Technical Committee
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