GB/T 15870-1995 Chromium films for hard surface photomasks

Basic Information

Standard ID: GB/T 15870-1995

Standard Name: Chromium films for hard surface photomasks

Chinese Name: 硬面光掩模用铬薄膜

Standard category:National Standard (GB)

state:in force

Date of Release1995-01-02

Date of Implementation:1996-08-01

standard classification number

Standard ICS number:31.030

Standard Classification Number:Electronic Components and Information Technology>>Electronic Industry Production Equipment>>L97 Processing Equipment

associated standards

Procurement status:SEMI P2-1986, NEQ

Publication information

publishing house:China Standards Press

Publication date:1996-08-01

other information

Release date:1995-12-22

Review date:2004-10-14

Drafting unit:Changsha Shaoguang Microelectronics Corporation

Focal point unit:National Technical Committee for Standardization of Semiconductor Materials and Equipment

Publishing department:State Bureau of Technical Supervision

competent authority:National Standardization Administration

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Introduction to standards:

This standard specifies the requirements, test methods, inspection rules, etc. for chromium thin films used in hard surface photomasks. This standard applies to chromium thin films used in hard surface photomasks. GB/T 15870-1995 Chromium thin films used in hard surface photomasks GB/T15870-1995 Standard download decompression password: www.bzxz.net