This standard specifies the requirements, test methods, inspection rules, etc. for chromium thin films used in hard surface photomasks. This standard applies to chromium thin films used in hard surface photomasks. GB/T 15870-1995 Chromium thin films used in hard surface photomasks GB/T15870-1995 Standard download decompression password: www.bzxz.net

GB/T 15870-1995
This standard is not equivalent to the SEMI standard Semip 2-86 "Chromium Film for Hard Surface Photomask". 4.6 in Chapter 4\Requirements of this standard is formulated according to Semip2--86 Chrome thin films for hard surface photomasks, and the rest are formulated according to my country's national conditions. This standard supplements the content of 3.2 in the national standard GB7237-87 "Chrome Edition". The important technical changes compared with 3.2 in GB7237 are: adding technical indicators related to chromium films made by magnetic sputtering method. This standard is proposed by the Ministry of Electronics Industry of the People's Republic of China. This standard is under the jurisdiction of the Standardization Institute of the Ministry of Electronics Industry. Drafting units of this standard: Changsha Shaoguang Microelectronics Corporation, Standardization Institute of the Ministry of Electronics Industry. Main drafters of this standard: Wu Baohua, Wang Yilin, Zhao Yusheng, Tan Renliang 1 Scope
National Standard of the People's Republic of China
Chrome thin films [or hard surface photomasks] This standard specifies the requirements, test methods, inspection rules, etc. of chrome thin films for hard surface photomasks. This standard applies to chrome thin films for hard surface photomasks (hereinafter referred to as chrome thin films). 2 Reference standards
GB/T 15870—1995
The provisions contained in the following standards constitute the provisions of this standard through reference in this standard. When this standard is published, the versions shown are valid. All standards will be revised. The parties using this standard should explore the possibility of using the latest versions of the following standards. GB191—90 Pictorial markings for packaging storage and transportation
GB2828-:87 Sampling procedures and sampling tables for batch inspection (applicable to inspection of continuous batches) GB2829-87 Sampling procedures and sampling tables for periodic inspection Sampling procedures and sampling tables (applicable to the inspection of the stability of the production process) GB7239-87 Chrome plate chrome film and adhesive film thickness test method GB7240-87 Chrome plate film surface reflectivity test method GB7241-87 Chrome plate optical density test method GB/F15871-1995 Hard surface photomask substrate SJ/T10584-94 Microelectronics photomasking technology Terminology 3 Definitions
This standard adopts the definitions of S1/T10584.
4 Requirements
4 .1 Optical density of chromium film
a) The optical density of chromium film is 2.50.3 (white light); b) Special requirements shall be agreed upon by both parties. 4.2 Thickness of chromium film
a) The thickness of low reflectivity (LRC) film formed by vacuum evaporation is 145nm±15nm; b) The thickness of low reflectivity (SLRC) chromium film formed by micro-controlled sputtering is 95mm±10nmc) Special requirements shall be agreed upon by both parties.
4.3 Reflectivity of chromium film
a) High reflection: R >40%
b) Medium reflection: 15%≤R≤40%:
c) Low reflection: R<15%.
4.4 Etching time of thin film
Approved by the State Administration of Technical Supervision on December 22, 1995 and implemented on August 1, 1996
GB/T15870—1995
a) Etching time of low reflectivity chromium film formed by vacuum evaporation is less than 50sb) Etching time of low reflectivity chromium film formed by magnetron sputtering is less than 70s. 4.5 Etching uniformity of chromium film
a) Evaporated chromium film: ±3s in the same plate, ±5s between different plates: b) Sputtered chromium film: ±5s in the same plate, ±10s between different plates. 4.6 Chromium film defects
The size of defects in the chromium film appearance quality zone and the number of defects allowed for each type are shown in Tables 1 and 2. The range of the circular quality zone is shown in Figure 4 of GB/T15871-19956 Hard surface photomask substrate. The range of the square quality zone is shown in Figure 5 of (FB/T15871-1995 Hard surface photomask substrate). Table 1 Defects in the circular quality zone
(6in）
100mrn
Ein'
A (main mold)
C (test)
A (main mask)
C (test)
A (upper mask)
C ( Table 2 Defects in the square quality area
1c or more
lo with t
5 Test methods
5.1 Chromium film optical density test
CB/T 15870--1995
The test method for chromium film optical density shall be in accordance with Chapter 3 of GB7241-87. 5.2 Chromium film thickness test
The test method for chromium trench film thickness shall be in accordance with Chapter 3 of GB7239-87. 5.3 Chromium film reflectivity test
The test method for chromium film reflectivity shall be in accordance with GB 7240-87 Chapter 3, Chapter 4. 5.4 Chromium film etching time test
Chromium film is etched in APT914 equipment and the following etching solution in a Class 100 clean bench or clean working environment, and the etching time of the chromium film is recorded.
Etching solution formula
Cerium ammonium nitrate: 200g
Glacial acetic acid, 99%, 35mL;
Deionized water: add to 1000ml;
Temperature: 22℃±1℃.
5.5 Chromium film etching uniformity inspection
The film is etched in the etching solution under the conditions specified in 5.4 of this standard. The etching time difference between each chromium film should meet the requirements of 4.5.
5.6 Inspection of chromium film defects
The number of chromium film defects is inspected with a 40x wide-field stereo microscope, and the defect size is measured with a 50x measuring microscope. 6 Inspection rules
Inspection is divided into delivery inspection and routine inspection. bZxz.net
6.1 Delivery inspection
6.1.1 Before the products are put into storage, delivery inspection shall be carried out batch by batch. When the products leave the factory, the delivery inspection results shall be reversed. 6.1.2 Delivery inspection shall be sampled according to the routine inspection plan in GB2828. The delivery inspection items and AQI. values ​​shall comply with the provisions of Table 3. Samples shall be taken from different boxes in a batch. Table 3 Acceptance inspection
Inspection items Month
Chromium film defects
Chromium film thickness
Chromium film etching time
Technical requirements
Test method
6.1.3 If one of the acceptance inspection items is unqualified, the acceptance inspection of the batch is unqualified, but it is allowed to be screened for 100 and then submitted for color inspection again: If it is still unqualified after the resubmission inspection, the acceptance test is unqualified. 6.2 Routine inspection
GB/T 15870 1995
6.2.1 Routine inspection should be carried out in any of the following situations: a) Product finalization;
b) When there are major changes in product structure, materials, and processes; c) Under normal production conditions, it should be carried out every year; d) When the product is discontinued for more than one year and production is resumed. 6.2.2 Routine inspection shall be carried out by random sampling from the qualified batches of delivery inspection. Routine inspection shall be carried out according to the one-time sampling plan of Gl2829: Routine inspection items and RQL. values ​​shall comply with the provisions of Table 1. Samples shall be taken from different boxes of the batch. Table 4 Routine inspection
Chromium film defects
Chromium film purity
Chromium film optical density
Chromium film reflectivity
Chromium film etching time
Chromium film etching uniformity
Technical requirements
Testing room method
6.2.3 If any item in the routine inspection items fails, the routine inspection of the batch of products shall be judged as unqualified. 7 Marking, packaging, transportation, storage
7.1 Packaging and marking
7.1.1 The inner packaging should be carried out in a Class 100 environment. The inner packaging box should be designed to prevent glass from contacting glass and to prevent the substrate from being contaminated during transportation. The substrate should be shipped with the coated side facing the same end of the box. This direction should be marked on each box, and the packaging box should be marked: "Warning; can only be opened and handled under clean room conditions". A certificate of conformity should be affixed to each box. The certificate of conformity should indicate:
a) Product name and batch number;
b) Product grade and chrome film thickness;
c) Quantity;
d) Film type and specifications and dimensions;
e) Inspection date and inspector's signature.
7. 1. 2 The inner packaging box is divided into four types of packaging: 10 pieces, 15 pieces, 20 pieces and 30 pieces. 7.1.3 The outer packaging shall be made of calcium plastic corrugated paper or cardboard. The packaging box shall be labeled with: a) product name,Model;
b) Product grade;
c) Production date,
d) Name and address of the manufacturer.
7.1.4 The outer wall of the packaging box should be marked in accordance with the provisions of GB191, marked with "Keep dry"\"up", *Caution fragile\ and other words and signs.
7.2 Transportation
GB/T 15870-1995
The product can be transported by any means of transportation, but it must not be mixed with corrosive substances. During transportation, it should be shockproof and damage-proof. During transportation,
7.3 Storage
No more than 60%, clean, and no harmful gas warehouse. The product should be stored at a temperature of 5℃~25℃, relatively from the factory
The product should be stored at a temperature of 5
, relatively from the storage period of one year.
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