Some standard content:
GB/T 11446.1—1997
This standard is a revision of GB11446.1-89 "National Standard for Electronic Grade Water". The original standard (GB11446.1) was formulated with reference to the draft electronic grade water specification of the ASTM committee in 1983 and the D1193-77 (82) reagent water specification. With the rapid development of the electronics industry and the microelectronics industry, the quality requirements for electronic grade water have become more stringent. Since 1991, the United States has promulgated the new ASTMD5127-90 electronic grade water specification and has been used to this day. Compared with the 1995 ASTMD5127-90 electronic grade water specification, the original standard GB11446.1 in my country lacks technical indicators for metal nickel, nitrate ions, phosphate ions, sulfate ions, and bacterial endotoxins in the standard technical content. In addition, due to the limitations of my country's analytical stage at that time, the technical indicators of particles, bacteria, and total organic carbon were set relatively low. Therefore, there is a certain gap compared with the ASTMD5127-90 electronic grade water specification level, which can no longer meet the needs of the development of the electronics industry. For this reason, we non-equivalently adopted the 1995 ASTMD5127-90 electronic grade water specification of the United States. Electronic grade water specification. This standard changes the original electronic grade water level from 5 to 4, and adds indicators such as metal nickel, nitrate, phosphate, and sulfate to the technical content; deletes the technical indicators of metal aluminum, iron, and calcium that were not specified in the 1995 ASTMD5127-90 standard, and improves the indicator requirements for particulate bacteria; adds vocabulary related to water, and considering the actual situation in my country, this revision does not specify the indicators and detection methods for bacterial endotoxins.
This standard will replace GB11446.1-89 from the implementation of the second phase. This standard was proposed by the Ministry of Electronics Industry of the People's Republic of China. This standard was issued by the Standardization Institute of the Ministry of Electronics Industry. The drafting units of this standard are: Semiconductor Institute of the Chinese Academy of Sciences, Standardization Institute of the Ministry of Electronics Industry. The main drafters of this standard are: Wen Ruimei, Li Xiaoying, Shi Zaizhong, and Jian Guizhen. ..com1 Scope
National Standard of the People's Republic of China
Electronic Grade Water
Electronic Grade waterwwW.bzxz.Net
This standard specifies the grade, requirements, test methods and inspection specifications of electronic grade water. This standard is applicable to water used for the production and cleaning of electronic components. 2 Referenced standards
GB/T 11446. 1-1997
Replaces CEB 11416. 1--89
The provisions contained in the following standards constitute the provisions of this standard through reference in this standard. When this standard is published, the versions shown are valid. All standards will be revised. Parties using this standard should explore the possibility of using the latest versions of the following standards. CB/T11446.3—1997 General test method for electronic grade water GB11116.1—1997 Test method for resistivity of electronic grade water Atomic absorption spectrophotometric test method for trace metals in electronic grade water GB/T 11446.5--1997E
GB/T 11446. 6—1997
Spectrophotometric test method for silicon dioxide in electronic grade water Ion spectra of trace chloride ions, nitrate ions, phosphate ions and sulfate ions in electronic grade water GB/T 11446. 7—19971
Test method
GB/T 11446. 8—1997
Test method for total organic carbon in electronic grade water GB/T 11446. 9—1997
Instrumental test method for particles in electronic grade water GB/T11446.10—1997 Filter culture test method for total bacterial count in electronic grade water 3 Definitions
This standard adopts the following definitions.
3.1 Electronic grade water Electronic grade water High purity water used in the process of manufacturing electronic components. 3.2 Resistivity
The resistance value measured between two opposite surfaces of a 1 cm aqueous solution at a specified temperature. It is usually represented by the symbol p, with the unit of α·cm. The theoretical resistivity of pure water is 18.3 Mn·cm (25℃). 3.3 Total silicon total ailicon
The total amount of soluble silicon in water and silicon in the form of colloidal silica. 3.4 Soluble silicon soluble silicon
Soluble silicates in water in the form of single molecules. 3.5 Granular matter granular matter
Matter dispersed in water in a non-liquid state, except for gas, and forming a heterogeneous mixture. 3.6 Total organic carbon (TOC) total organic carbon The total amount of carbon in the form of various organic matter in water. Including organic matter that is easily oxidized by general strong oxidants and organic matter that needs to be oxidized by special methods State Administration of Technical Supervision 19970901 approved
implemented on September 1, 1998
3.7 Adsorption
GB/T 11446.1—1997
Some porous granular substances have the ability to adsorb certain substances due to their surface activity. 3.8 Coagulation
After adding a certain electrolyte to the source water, the charged colloidal particles in the water are mixed by the opposite charges in the electrolyte, causing them to aggregate into larger particles and settle.
3.9 Flocculation
The particles in the water collide with each other under certain conditions and aggregate into flocculent precipitation. Coagulation generally occurs slowly after coagulation, and can remove fine particles in the water.
3.10 Sand filter
A device used to hold sand particles of different diameters to remove floating bodies and muddy matter in the source water. 3.11 Activated carbon filter Filter with granular activated carbon, used to remove soluble organic matter and excess residual chlorine from water. 3.12 Ion exchange
An avoidable process in which an insoluble substance and a liquid exchange ions with each other, in which the substance has no substantial structural change. 3.13 Deionized water
High-purity water that has been treated with ion exchange to remove impurities in the form of ions. 3.14 Regeneration
Part of the operating cycle of the ion exchange process. In this part, a certain amount of chemical reagent is used to pass through the ion exchange resin to restore its exchange capacity.
3. 15 Complex bed
Special cation exchange resin and anion exchange resin are respectively loaded into two ion exchange columns, and the two columns are connected in series, so that the water passes through the two columns in turn and is purified. The purity of water treated by the complex bed is not as high as that of the mixed bed, but the operation is simpler. 3. 16 Mixed bed
Cation exchange resin and anion exchange resin are mixed evenly and filled in the same ion exchange column. The purification effect is quite good. Many combined beds are used in combination. The water quality is good, but regeneration is more troublesome. 3.17 Electrodialysis
A method of separating ions in water. In the electrodialyzer, the anion and cation exchange membranes are arranged alternately to separate a series of small holes between the positive and negative electrodes. When water flows through the small holes, under the action of the DC electric field, the cations in the water move toward the cathode, but cannot pass through the cation membrane; the anions are the opposite. In this way, the liquid and fresh water chambers are formed and sent to the purified water chamber. 3.18 Reverse osmosis is also called reverse osmosis. It is a separation method using osmotic principle. The concentrated water and fresh water are separated by a semipermeable membrane, and a mechanical force stronger than the osmotic pressure is applied to the boiling water. Then part of the concentrated water passes through the semipermeable membrane while the impurities remain in it, achieving the purpose of separation and purification. 3.19 Reverse osmosis membrane is a synthetic membrane used to prepare pure water by reverse osmosis. Its pore size is generally 0.02um or less. It can be used to remove organic ions, organic matter, bacteria, etc. to purify water.
3.20 Microporous membrane filter---a membrane with a semi-average pore size (diameter) greater than 0.01um, which can intercept particles larger than the average pore size at or near it. 3.21 Ultrafiltration
A filtration method that removes fine particles, colloids and bacteria from water by passing water through a super-combustion membrane under a constant pressure. 3.22 Terminal
The outlet or use location of water after various purification processes in the production process of high-purity water. ..com4 Classification
GB/T 11446.1
4.1 Electronic grade water is divided into four levels: Level 1, Level I, Level I and Level N. 4.2 Marking
Level I electronic grade water is marked as: EW-I;
Level I electronic grade water is marked as: EW-Ⅱ;
Level II electronic grade water is marked as: EW-I;
Level N electronic grade water is marked as: EW-.
5 Requirements
The technical indicators of electronic grade water shall comply with the provisions of Table 1 Table 1 Technical indicators of electronic grade water
Electrical efficiency
MQ.cm(25r)
Full silicon, maximum value, #&/L
>l μm Particle count, maximum value, pieces/ml.
Bacterial count, maximum value, pieces/mL
Control, maximum value g/L
Zinc, maximum value pg/L
, maximum value, pg/L
Ca, maximum value·pg/L
Potassium, maximum value, g1
Chlorine, maximum value +ug/1,
Nitrate, maximum value·
Phosphate.Maximum value, ug/ L
Vegetable acid, maximum.μg/1
Total organic carbon, maximum value, B/
6 Test method
6-1 Resistivity
Ew-［
(9 time)
not less than
(93% time)
not less than 13
The resistivity of electronic grade water shall be determined according to the test method of GB/T11446.4-1997. 6.2 Total silicon content (calculated as silicon dioxide)
Total silicon content in electronic grade water (calculated as silicon dioxide) shall be determined according to the test method of GB/T11446.6-1997. 6.3 Number of particles
GB/T 11446.1-: 1997
The number of particles in electronic grade water shall be determined according to the test method of GB/T11446.9-1997. 6.4 Total bacteria count
The total bacteria count in electronic grade water shall be determined according to the test method of GB/T11446.10-1997: 6.5 Trace metal content
The content of trace metals in electronic grade water shall be determined according to the test method of GB/T 11446.5-1997 6.6 The content of chloride ion, nitrate ion, phosphate ion and sulfate ion in electronic grade water is determined according to the test method of GB/T11446.7-1997.
6.7 Total organic carbon content
The total organic carbon content in electronic grade water is determined according to the retrospective test method of GB/T11446.8-1997. 7 Inspection rules
7.1 Inspection department
The inspection of electronic grade water should be carried out in the water quality inspection department of the manufacturer. 7.2 Inspection classification
The inspection of electronic grade water is divided into delivery inspection and routine inspection. 7.3 Delivery inspection (sampling inspection items)
7.3.1 Among the technical indicators of electronic grade water, resistivity, sodium ion, and silicon (measured in silicon dioxide) are delivery inspection items. 7.3.2 If one of the inspection results after sampling test at the water use terminal is unqualified, sampling should be carried out again for inspection. If there is still one indicator that is unqualified, improvement measures should be proposed until the water quality is qualified. 7.4 Routine inspection (full inspection items)
Routine inspection is carried out once a year, and routine inspection should also be carried out when water production conditions change. 7.4.1 The inspection items are all technical indicator requirements specified in Table 1. 7.4.2 Routine inspection is carried out after sampling at the water use terminal. If more than one of the inspection results is unqualified, sampling should be carried out again for inspection. If more than one indicator is still unqualified, improvement measures should be proposed until the water quality is qualified. The water quality is qualified. 8 Sampling, storage, transportation and marking
8.1 The sampling, storage and transportation of electronic grade water shall comply with the provisions of GB/T11146.3-1997. 8.2 Marking: When sampling and testing at the water terminal, if the water quality is qualified, there should be a certificate of inspection. The certificate should indicate: a) Name and grade;
b) Various technical indicators;
r) Water production unit:
d) Water supply date;
e) Inspector's signature and inspection date:
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