GB/T 15909-1995 Silane (SiH4) gas for use in the electronics industry

Basic Information

Standard ID: GB/T 15909-1995

Standard Name: Silane (SiH4) gas for use in the electronics industry

Chinese Name: 电子工业用气体硅烷(SiH4)

Standard category:National Standard (GB)

state:in force

Date of Release1995-01-02

Date of Implementation:1996-08-01

standard classification number

Standard ICS number:Chemical Technology>>Chemical Products>>71.100.20 Industrial Gases

Standard Classification Number:Chemicals>>Other Chemical Products>>G86 Industrial Gases and Chemical Gases

associated standards

Procurement status:=SEMI-93

Publication information

publishing house:China Standards Press

other information

Release date:1995-12-20

Review date:2004-10-14

Drafting unit:Southwest Research Institute of Chemical Industry, Ministry of Chemical Industry

Focal point unit:National Technical Committee for Standardization of Semiconductor Materials and Equipment

Publishing department:State Bureau of Technical Supervision

competent authority:National Standardization Administration

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Introduction to standards:

This standard specifies the technical requirements, inspection methods, inspection rules, packaging, marking, transportation, storage and safety requirements of silane gas for the electronics industry. This standard is mainly used for epitaxial deposition of polysilicon and single crystal silicon, low-temperature chemical vapor deposition of silicon dioxide, and amorphous silicon thin film deposition in the electronics industry. GB/T 15909-1995 Silane gas (SiH4) for the electronics industry GB/T15909-1995 Standard download decompression password: www.bzxz.net