Method for determining impurities in gold wire for semiconductor lead bonding by ICP-AES
Some standard content:
Electronic Industry Standard of the People's Republic of China
S/T 10626-1995
Method for determining impurities in gold wire forsemiconductor lead bonding by ICP-AES1995-04-22Promulgated
1995-10.01Implementation
The Ministry of Electronics Industry of the People's Republic of China has issued the Electronic Industry Standard of the People's Republic of China
Method for determining impurities in gold wire forsemiconductor lead bonding by ICP-AES ICP-AEST Subject Content and Scope of Application 1.1 Main Content SJ/T10626-1995 This standard specifies the method for the determination of impurity elements in chain alloys using plasma irradiation. 1.2 Applicable Scope This standard applies to the determination of impurity elements in steel, lead, calcium, magnesium, ferrite, plastic and lead in alloy wires. The determination range: lead, chain hair 0.0008%~0.0500%, the rest are 0.00050.0500% 2. Principle and purpose of the method This method adopts aqua regia dissolution test, after decomposing the acid, add hydrogen peroxide, add combustion in water bath to precipitate, after centrifugal separation, the supernatant is loaded into plasma. According to the analysis specifications of each element listed in Table 1, the cumulative content of the base element is determined separately. 3. Reagents 3.1 Ethanol: high grade, 3.2 Internal adjustment: analytical grade, 3.3 Heat treatment: pure 3.4 Electrochemical grade, FV-technical grade.
328 07
324 75
279 55
19954.22 Approved by the Ministry of Electronics Industry of the People's Republic of China Yuan
257 61
320.35 263.41
223.06 or 305.3?
1995-10-01 Implementation
SJ/T 106261995
3.5 Nitrosugar (1 +1): Prepared with MOS pure nitrate. 3.6 Hydrochloric acid (111): Prepared with MOS pure hydrochloric acid. 3.7 Hydrochloric acid (1+1U): Prepared with MCS pure aldehyde: 3.8 Dilute aqua regia (nitric acid: acetic acid: water = 1:3:4: Prepared with MCS pure chlorine and acetone. 3.9 Detergent: Prepared in the ratio of ethanol: acetone = 1:4. 3.10 Standard wave:
3.10.1 Silver label chain storage
Weigh 1.0M00g pure silver powder (more than 99.95%). Add 25ml acetic acid (see 3.5). After heating to dissolve the gold, continue heating to remove chlorine oxides. Cool to room temperature, transfer to a 1000ml container, add water (see 3.4), and mix. This drop contains 1mg silver in 1ml.
3.10.2 Standard preparation solution
Weigh 1.2518g pre-light At 105-111°C, dry coal until it is oxidized to a certain degree (99.99% or more). Heat it in 30 ml of hydrochloric acid (see 3.6), add 20 ml of water (see 3.4), heat to dissolve, and cool to room temperature. Transfer it to a 1100 ml container and use [see 3.4] to adjust the concentration. 1 ml of the solution contains 1 mg of copper. 3.10.3 Calcium solution
Weigh 2.4972% of calcium carbonate (99.99% or more) previously decomposed at 105-110°C into a 300 ml beaker, add 20 ml of water (see 3.4), and then add 10 ml of hydrochloric acid (3.6) until the residual solution is completely dissolved. Remove the emulsion. Add 10 ml of hydrochloric acid (3.6). Cool, transfer it to a 1000 l bottle, and adjust it with water (see 3.4). Decomposition. 1 ml of this solution contains 1 mg of calcium. 3.10.4 Standard storage solution for iron
Weigh 1.00 g of magnesium (99.99% or more), dissolve it in 20 ml of water (see 3.4), then slowly add 20 ml of salt (see 3.6), after the solution is completely dissolved, transfer it into a 1000 ml volumetric flask and store it with water (see 3.4). 1 ml of this solution contains 1 mg of magnesium.
3.10.5 Standard storage solution
Weigh 1.5825 g of manganese monoxide that has been dried to constant weight at 105110℃ in a flask, add 5 ml of concentrated hydrochloric acid, add 4 drops of hydrogen peroxide, heat the solution, add 5 ml of hydrochloric acid (see 3.6), cool it to room temperature, transfer it into a 100 ml volumetric flask, and store it with this (see 3.4). 3.10.6 Standard storage liquid
Weigh 14298g of 1.5% tantalum trioxide (90.09%) at 105-110 °C, heat at low temperature in 20ml of dichloroethane (see 3.6), cool to room temperature, transfer into a 1000ml container, press water (see 3.4> to make up the volume, and add a spoon. This liquid contains 1ml of rog.
3.10.7 Standard storage liquid
weigh 1.5985 in advance at 105-110 °C and transfer to 300ml of Hengyi transfer standard, add 30ml of salt (see 3.6) and 10ml of acid (see 3.5). After it is completely dissolved, transfer into a 1000ml electric bottle or bottle, make up the volume with water (see 3.4), and add 10ml of water. 1.Al contains 1mg in the solution.
3.10, weigh 1.1150g of aluminum in a beaker with 1-10% dry sodium hydroxide (99.9% or less), add 5mL of sodium hydroxide (see 3.5), and heat the solution until the solution is completely dissolved. After cooling to room temperature, transfer it to a 1000ml container (50ml of sodium hydroxide (see 3.5) is added to the stock solution in advance). Determine with water (3.4), and 1ml of this suspension contains 1mg of aluminum. 3.10.9 Silver series standard solution
Use silver to dry the suspension. The solution is divided into a wide range of standard treatment waves, the mother m filter contains silver: 2
0.05ug, 0.10μg, 0.50ug and 2.0μg. SJ/T10626-1995
3.19.10 Other elements series of mixed standard solutions are stored in the standard of each element and gradually diluted into different concentrations of radioactive substances. Each 1ml of the solution contains each element: 8, 0.1pg, 0.5g, 1.0 and 10.0g. Contains 5% hydrochloric acid. 3.10.11 Standard space
When matching the standard, match one of the remaining users.
4 Instruments and working elements
4.1 Receiver: 3587 type inductor with isotope emission light position or other equivalent teaching device. Working case, see Table 2.
Intelligent gas cleaning products
1.rl/mrir
Total time
Cooling air flow scene
Proton gas activity
Integration time
The total amount of the test sample is in the form of a long reverse path. The total amount of the cleaning agent is shown in 39) and the surface is cleaned. Clean the gold wire with dilute salt (see 3.7), and then rinse it with electronic grade water (see 3.4). First T. 6 Analysis steps
6.1 Weigh the sample
Weigh the sample (see 5) to 0.0001% purity. 6.2.
6.2.1 Place the sample (see 6.1) in 30 ml of plasticizer. 6.2.2 Add 3 ml of rare earth water (see 3.8). Heat at low temperature until the sample is completely dissolved. Continue to heat slowly to make the salt and nitric acid completely dissolved until the gold is out. Cool and transfer to 10 ml of sodium bicarbonate. Wash the three with 2 ml of sodium bicarbonate (see 3.4) and transfer the mixture to the colorimetric table. 6.2.3 Add 1 ml of peroxide (3.3). At this time, the volume is 6 ml, store in 90% hot water for 20 minutes, and cool. bzxz.net
6.2.4 Make up to 10 ml with water (see 3.4). Centrifuge to separate the gold and use an induction plasma. 6.3 Empty acid test
The company shall conduct the test in detail.
6.4 The above operation line preparation
6.4.1 The plasma is locked for 15min, and multiple channels are selected for determination. 6.4.2 From or concentration to high concentration, the standard drop is input in sequence, and then the computer automatically controls the work. 6.5 After the sample analysis
After the work is completed, the product is put into the test room. The computer automatically prints out the analysis results. Calculation of the analysis results
SJ/T10626-1995
The percentage of the test element (%) is calculated as follows: (C,-Co) × V × 10\6
Wherein: X-
-the percentage of the element being tested, %;
-the concentration of the element in the sample solution, g/ml; G
-the concentration of the element in the blank solution, m/ml; Co
-the total volume of the sample solution, rml
Mn-the mass of the sample, more,
8 Allowable Difference
The difference in the analysis results between laboratories should not be greater than the allowable limits listed in the table. Tolerance 3
0.001~.003
>0.000G·0.020
>0.0020.-0.0060
>0.0060.-c.C200
>0.0200-.0.0500
9 Note
[The interference of CP-AFS method mainly comes from the spectral line, which can be compensated by the following method. %
9.1 The interference before the element can be avoided by selecting the appropriate step. The interference of the elements listed in Table 1 has been carefully adjusted and there is no interference. 9.2 Background interference: It can be compensated by retrograde background correction. In the test of this standard, it is not necessary to be affected by the old number.
Additional Note:
Automobile standards are under the jurisdiction of the Standardization Research Institute of the Ministry of Electronics Industry. This standard is produced by the Research Institute of the Ministry of Industry. The main drafters of this standard are Xia Chunmei, Zhang Zhen, and Duan Nuoguang.
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