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Engineering Construction Standard Full-text Information System
National Standard of the People's Republic of China
Design Specification for Cleanroom
1985 Beijing
Engineering Construction Standard Full-text Information System
W Engineering Construction Standard Full-text Information System
National Standard of the People's Republic of China
Design Specification for Cleanroom
GBJ73-84
Editing Department: Ministry of Electronics Industry of the People's Republic of ChinaApproving Department: State Planning Commission of the People's Republic of ChinaEffective Date: June 1, 1985
Engineering Construction Standard Full-text Information System
Engineering Construction Standard Full-text Information System
Notice on the Release of "Design Specification for Cleanroom" No. 2483 of the State Construction Commission [1984]
According to the requirements of the former State Construction Commission (78) Jianfashe No. 562, the "Design Specification for Cleanroom" compiled jointly by the Ministry of Electronics Industry and relevant departments has been reviewed by relevant departments. The "Cleanroom Design Code" GBJ73-84 is now approved as a national standard and will be implemented from June 1, 1985. This code is managed by the Ministry of Electronics Industry, and its specific interpretation and other work are the responsibility of the 10th Design Institute of the Ministry of Electronics Industry.
National Planning Commission
December 1, 1984
Engineering Construction Standard Full Text Information System
Engineering Construction Standard Full Text Information System
Preparation Instructions
This code is based on the requirements of the former National Capital Construction Commission (78) Jianfa Shexue No. 562, and is edited by our department. Specifically, it was jointly compiled by the Tenth Design Institute of our Ministry, the Eleventh Design Institute of the Ministry of Machinery Industry, the Fourth Planning and Design Institute of the Ministry of Aviation Industry, the Eleventh Design Institute of the Ministry of Electronics Industry, the Fifth Design Institute of the Ministry of Ordnance Industry, the Ninth Design Institute of China Shipbuilding Industry Corporation, the Seventh Design Institute of the Ministry of Aerospace Industry, the Sixth Design Institute of the Ministry of Chemical Industry, Beijing Nonferrous Metallurgy Design and Research Institute of China Nonferrous Metals Corporation, China Academy of Building Research and Harbin Institute of Architecture and Civil Engineering.
During the compilation process, the specification compilation team conducted extensive investigations and studies, carefully summarized the practical experience of clean workshop construction and use in my country, organized relevant units to carry out necessary scientific experimental research work, and widely solicited opinions from relevant units across the country. Finally, our Ministry reviewed and finalized the draft together with relevant departments. This specification is divided into eight chapters and seven appendices, and the main contents are: general principles, air cleanliness level, overall design, construction, air purification, water supply and drainage, industrial gas pipelines, electricity, etc.
Since this specification is compiled for the first time, during the implementation process, we hope that all units will combine engineering practice and scientific research and carefully summarize experience. If you find that there is a need for modification and enrichment, please send your opinions and relevant information to the Tenth Design and Research Institute of our department for reference in future revisions.
Ministry of Electronics Industry
August 27, 1984
Engineering Construction Standards Full Text Information System
W.bzsoso.coIEngineering Construction Standards Full Text Information System
Chapter 1
Chapter 2
Air Cleanliness Level
Chapter 3
Overall Design:
Section 1
Selection of Cleanroom Location and General Plane LayoutSection 2
Section 3
Section 4
Chapter 4
Comprehensive Coordination of Process Layout and Design
Noise Control.
Micro-vibration Control
Section 1
Section 2
Section 3
Section 4 Section
Section V
General Provisions
Personnel Purification and Material Purification Facilities·
Fire Prevention and Evacuation··
Indoor Decoration
Assembled Clean Room·
Chapter V
Air Purification
Section I
Section II
Section III
Section IV
Section V
Section VI
General Provisions
Positive Pressure Control of Clean Room
Air Flow Organization and Air Supply Volume
Air Purification Treatment
Heating and Ventilation
Air Ducts and Accessories
Chapter VI Water Supply and Drainage
Section I
General Provisions
Section II||tt ||Water Supply·
Section 3 Drainage·
Section 4 Fire Fighting Facilities
Chapter 7 Industrial Gas Pipelines
Engineering Construction Standards Full Text Information System
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Section 1
Section 2
Section 3
Section 4
General Provisions
Pipeline Materials, Valves and Accessories
Pipeline Connection and Cleaning
Safety Technology
Chapter 8
Section 1
Section 2
Lighting·
Control, Communication and Protection
Section 3
Appendix 1
Appendix 2
Appendix 3||tt| |Appendix 4
Appendix 5
Appendix 6
Appendix 7
Terms explanation..
Testing of clean room air cleanliness
Examples of fire hazard classification of clean workshop production Requirements for construction of clean air conditioning system design Requirements for maintenance and management of clean air conditioning system design Thickness of air duct of clean air conditioning system
Terms used in this specification
Full text information system of engineering construction standards
Full text information system of engineering construction standards
Chapter 1 General Provisions
Article 1.0.1 The design of clean workshops must implement the relevant national policies and guidelines, and be technologically advanced, economically reasonable, safe and applicable, ensure quality, and meet the requirements of energy conservation and environmental protection.
Article 1.0.2 This specification applies to the design of newly built, rebuilt and expanded clean workshops, but does not apply to biological clean rooms where bacteria are controlled. The provisions of this code on fire prevention and evacuation, fire fighting facilities chapters are not applicable to the design of high-rise clean workshops and underground clean workshops with a building height of more than 24 meters. Article 1.0.3 When using the original building for clean technology transformation, the design of the clean workshop must be based on the production process requirements, adapted to local conditions, differentiated, and make full use of existing technical facilities.
Article 1.0.4 The design of the clean workshop should create the necessary conditions for construction and installation, maintenance management, overhaul and testing, and safe operation. Article 1.0.5 In addition to being implemented in accordance with this code, the design of the clean workshop should also comply with the relevant requirements of the current national standards and specifications. Engineering Construction Standard Full-text Information System
Engineering Construction Standard Full-text Information System
Chapter II Air Cleanliness Level
Article 2.0.1
Air cleanliness should be divided into four levels according to Table 2.0.1.
Air cleanliness level
Class 10000
Class 100000
Number of dust particles of 0.5 micron per cubic meter (per liter) of air
Z35×100(3.5)
Z35×1000(35)
Z35×10000（350)
35×100000(3500）
Number of dust particles of
>5 microns per cubic meter (per liter) of air
Z250(0.25)
≤2500(2.5)
225000（25)
Note: For the counting of dust particles of 5 microns or more in a clean room with air cleanliness level 100, multiple sampling should be carried out. Only when it appears multiple times can the test value be considered reliable. Article 2.0.2 The inspection of the clean room air cleanliness level shall be based on the number of dust particles tested under dynamic conditions. The test of clean room air cleanliness shall comply with the provisions of Appendix II.
Engineering Construction Standard Full Text Information System
Engineering Construction Standard Full Text Information System
Chapter 3 Overall Design
Section 1 Cleanroom Location Selection and General Plan Layout Article 3.1.1 The location of the cleanroom should be determined according to the following requirements and after comparison of technical and economic plans:
1. It should be located in an area with low atmospheric dust concentration and good natural environment; 2. It should be far away from railways, docks, airports, major traffic arteries, factories, storage warehouses, yards that emit a large amount of dust and harmful gases, and other areas with serious air pollution, vibration or noise disturbance. If it is impossible to stay away from serious air pollution sources, it should be located on the windward side of the maximum frequency wind direction, or on the leeward side of the minimum frequency wind direction throughout the year; 3. It should be arranged in a wide area with a clean environment and no or little flow of people and goods.
Section 3.1.Article 2 For the location selection of clean workshops with micro-vibration control requirements, the vibration impact of existing vibration sources in the surrounding area should be actually measured, and the vibration values of the environment allowed by precision equipment and precision instruments should be analyzed and compared. Article 3.1.3 When there is a smoke window on the windward side of the maximum frequency wind direction of the clean workshop, the horizontal distance between the clean workshop and the smoke window should not be less than 12 times the height of the smoke window. Article 3.1.4 The distance between the clean workshop and the traffic artery should not be less than 50 meters.
Article 3.1.5 A circular fire truck lane should be set up around the clean workshop (traffic roads can be used). If there are difficulties, a fire truck lane can be set up along the two long sides of the workshop. Article 3.1.6 The road surface around the clean workshop should be made of materials with good integrity and less dust.
Article 3.1.7 The area around the clean workshop should be greened. Lawns can be laid, trees that do not have a harmful effect on the dust concentration in the atmosphere can be planted, and greening areas can be formed. However, firefighting operations shall not be hindered.
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Section 2 Process Layout and Design Comprehensive Coordination Article 3.2.1 The process layout shall meet the following requirements: 1. The process layout is reasonable and compact. Only necessary process equipment and processes and studios with air cleanliness grade requirements shall be arranged in the clean room or clean area; 2. Under the premise of meeting the production process requirements, the clean room or clean area with high air cleanliness should be close to the air conditioning room, and the processes and studios with the same air cleanliness grade should be arranged in a centralized manner. The studios with lower air cleanliness grade should be arranged near the entrance of the clean area;
3. The processes requiring high air cleanliness in the clean room should be arranged on the upwind side, and the process equipment that is prone to pollution should be arranged near the return air outlet; 4. The transportation route for the installation and maintenance of large equipment should be considered, and the equipment installation port and maintenance port should be reserved;
5. A separate material entrance should be set up, the material transfer route should be the shortest, and the material must be cleaned before entering the clean area. Article 3.2.2 It is advisable to have fewer compartments in clean workshops, but they can be separated in the following circumstances:
1. According to the fire hazard classification of production, between Class A and Class B and non-Class A and Class B adjacent production sections, or where there are fire separation requirements; 2. Strong noise is generated or more heat, dust particles and harmful gases are emitted during the production process, and local measures cannot be taken to control them; 3. Between two production sections with few production connections and often not used at the same time. Article 3.2.3 The plane and space design of clean workshops should be divided into clean areas, personnel purification, material purification and other auxiliary rooms. At the same time, the comprehensive coordination effect of various technical facilities such as production operations, process equipment installation and maintenance, airflow organization type, pipeline layout and purification air conditioning system should be considered. Article 3.2.4 The plane position and vertical elevation of various pipelines must be reasonably determined in the design of clean workshops.
Article 3.2.5 The layout of various fixed technical facilities in clean workshops (such as air supply outlets, lighting engineering construction standard full text information system
W.bzsosO.cO ... For variable noise, the equivalent continuous sound pressure level at the same position during a normal working day shall be taken. Article 3.3.2 The noise spectrum limit of the clean room shall adopt the octave sound pressure level; the sound pressure level value of each frequency band should not be greater than the provisions of Table 3.3.2. Noise spectrum limit value
Center frequency
(Hz)
Octave
Sound pressure level
(div)
Clean room classification
Article 33.3 The plane and profile layout of the clean workshop shall take into account the requirements of noise control. Its enclosure structure shall have good sound insulation performance, and the sound insulation of each part shall be close. Article 3.3.4 All equipment in the clean room shall use low-noise products. For equipment whose radiated noise exceeds the allowable value of the clean room, special sound insulation facilities (such as soundproof rooms, soundproof covers, etc.) shall be set up.
Article 3.3.5 When the noise of the purified air conditioning system exceeds the allowable value, control measures such as sound insulation, noise elimination, and vibration isolation should be adopted. In addition to the accident exhaust, the exhaust system in the clean room should be designed to reduce noise. Article 3.3.6 For the purified air conditioning system, according to the requirements of the indoor noise level, the wind speed in the air duct should be selected according to the following provisions:
1. The total air duct is 6 to 10 meters per second;
2. The branch air duct without supply and return air outlets is 6 to 8 meters per second; 3. The branch air duct with supply and return air outlets is 3 to 6 meters per second. Article 3.3.7 The noise control design of the clean workshop must take into account the air cleanliness requirements of the production environment, and the purification conditions of the clean room must not be affected by noise control. Section 4 Micro-vibration Control
Article 3.4.1 Active vibration isolation measures should be taken for equipment with strong vibrations (including water pumps, etc.) in clean workshops and surrounding auxiliary stations and their pipes leading to clean rooms. Article 3.4.2 The comprehensive vibration impact of various vibration sources inside and outside the clean workshop on the clean workshop should be measured. If conditions are limited, the comprehensive vibration impact can also be evaluated based on experience. And it should be compared with the allowable environmental vibration value of precision equipment and precision instruments to determine the necessary vibration isolation measures. Article 3.4.3 The vibration isolation measures for precision equipment and precision instruments should consider the requirements of reducing dust generation and maintaining reasonable airflow organization in the clean room. When using air spring vibration isolation pedestals, the air source should be treated to achieve the air cleanliness level of the clean room.
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W.Article 4 The plane position and vertical elevation of various pipelines must be reasonably determined in the design of clean workshops. Article 3.2.5 The layout of various fixed technical facilities in clean workshops (such as air supply outlets, lighting engineering construction standard full text information system
W.bzsosO.cO engineering construction standard full text information system
) should first consider the requirements of the clean air conditioning system. Section 3 Noise Control Article 3.3.1 The noise level in the clean room should meet the following requirements: 1. During dynamic testing, the noise level in the clean room should not exceed 70 dBA. 2. During empty testing, the noise level of the turbulent clean room should not be greater than 60 dBA; the noise level of the laminar clean room should not be greater than 65 dBA. Note: ① Due to technical and economic conditions, or when the noise is greater than 70 dBA and has no impact on production, the noise level can be appropriately relaxed, but it should not be greater than 75 dBA; ② The above noise level refers to the measured value at the human ear position (people leaving) at each working point in the room. For variable noise, the equivalent continuous sound pressure level at the same position during a normal working day is taken. Article 3.3.2 The noise spectrum limit of the clean room should adopt the octave sound pressure level; the sound pressure level value of each band should not be greater than the provisions of Table 3.3.2. Noise spectrum limit value
Center frequency
(Hz)
Octave
Sound pressure level
(div)
Clean room classification
Article 33.3 The plane and section layout of the clean workshop should take into account the requirements of noise control. Its enclosure structure should have good sound insulation performance, and the sound insulation of each part should be close. Article 3.3.4 All equipment in the clean room should use low-noise products. For equipment with radiated noise exceeding the allowable value of the clean room, special sound insulation facilities (such as soundproof rooms, soundproof enclosures, etc.) should be set up.
Article 3.3.5 When the noise of the purified air conditioning system exceeds the allowable value, control measures such as sound insulation, noise elimination, and vibration isolation should be taken. In addition to the accident exhaust, the exhaust system in the clean room should be designed to reduce noise. Article 3.3.6 For the purified air conditioning system, according to the requirements of the indoor noise level, the wind speed in the air duct should be selected according to the following provisions:
1. The total air duct is 6 to 10 meters per second;
2. The branch air duct without supply and return air outlets is 6 to 8 meters per second; 3. The branch air duct with supply and return air outlets is 3 to 6 meters per second. Article 3.3.7 The noise control design of clean workshops must take into account the air cleanliness requirements of the production environment, and the purification conditions of the clean room must not be affected by noise control. Section 4 Micro-vibration Control
Article 3.4.1 Equipment with strong vibrations (including water pumps, etc.) in clean workshops and surrounding auxiliary stations and their pipes leading to clean rooms should take active vibration isolation measures. Article 3.4.2 The comprehensive vibration impact on the clean workshop should be measured for various vibration sources inside and outside the clean workshop. If conditions are limited, the comprehensive vibration impact can also be evaluated based on experience. And it should be compared with the allowable environmental vibration value of precision equipment and precision instruments to determine the necessary vibration isolation measures. Article 3.4.3 The vibration isolation measures for precision equipment and precision instruments should consider the requirements of reducing dust generation and maintaining reasonable airflow organization in the clean room. When using air spring vibration isolation pedestals, the air source should be treated to achieve the air cleanliness level of the clean room.
工6建设标准全文信息系统
W.Article 4 The plane position and vertical elevation of various pipelines must be reasonably determined in the design of clean workshops. Article 3.2.5 The layout of various fixed technical facilities in clean workshops (such as air supply outlets, lighting engineering construction standard full text information system
W.bzsosO.cO engineering construction standard full text information system
) should first consider the requirements of the clean air conditioning system. Section 3 Noise Control Article 3.3.1 The noise level in the clean room should meet the following requirements: 1. During dynamic testing, the noise level in the clean room should not exceed 70 dBA. 2. During empty testing, the noise level of the turbulent clean room should not be greater than 60 dBA; the noise level of the laminar clean room should not be greater than 65 dBA. Note: ① Due to technical and economic conditions, or when the noise is greater than 70 dBA and has no impact on production, the noise level can be appropriately relaxed, but it should not be greater than 75 dBA; ② The above noise level refers to the measured value at the human ear position (people leaving) at each working point in the room. For variable noise, the equivalent continuous sound pressure level at the same position during a normal working day is taken. Article 3.3.2 The noise spectrum limit of the clean room should adopt the octave sound pressure level; the sound pressure level value of each band should not be greater than the provisions of Table 3.3.2. Noise spectrum limit value
Center frequency
(Hz)
Octave
Sound pressure level
(div)
Clean room classificationbZxz.net
Article 33.3 The plane and section layout of the clean workshop should take into account the requirements of noise control. Its enclosure structure should have good sound insulation performance, and the sound insulation of each part should be close. Article 3.3.4 All equipment in the clean room should use low-noise products. For equipment with radiated noise exceeding the allowable value of the clean room, special sound insulation facilities (such as soundproof rooms, soundproof enclosures, etc.) should be set up.
Article 3.3.5 When the noise of the purified air conditioning system exceeds the allowable value, control measures such as sound insulation, noise elimination, and vibration isolation should be taken. In addition to the accident exhaust, the exhaust system in the clean room should be designed to reduce noise. Article 3.3.6 For the purified air conditioning system, according to the requirements of the indoor noise level, the wind speed in the air duct should be selected according to the following provisions:
1. The total air duct is 6 to 10 meters per second;
2. The branch air duct without supply and return air outlets is 6 to 8 meters per second; 3. The branch air duct with supply and return air outlets is 3 to 6 meters per second. Article 3.3.7 The noise control design of clean workshops must take into account the air cleanliness requirements of the production environment, and the purification conditions of the clean room must not be affected by noise control. Section 4 Micro-vibration Control
Article 3.4.1 Equipment with strong vibrations (including water pumps, etc.) in clean workshops and surrounding auxiliary stations and their pipes leading to clean rooms should take active vibration isolation measures. Article 3.4.2 The comprehensive vibration impact on the clean workshop should be measured for various vibration sources inside and outside the clean workshop. If conditions are limited, the comprehensive vibration impact can also be evaluated based on experience. And it should be compared with the allowable environmental vibration value of precision equipment and precision instruments to determine the necessary vibration isolation measures. Article 3.4.3 The vibration isolation measures for precision equipment and precision instruments should consider the requirements of reducing dust generation and maintaining reasonable airflow organization in the clean room. When using air spring vibration isolation pedestals, the air source should be treated to achieve the air cleanliness level of the clean room.
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W.
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