GB/T 14601-1993 High-purity ammonia for use in the electronics industry

Basic Information

Standard ID: GB/T 14601-1993

Standard Name: High-purity ammonia for use in the electronics industry

Chinese Name: 电子工业用气体高纯氨

Standard category:National Standard (GB)

state:in force

Date of Release1993-08-26

Date of Implementation:1994-07-01

standard classification number

Standard ICS number:Chemical Technology>>Chemical Products>>71.100.20 Industrial Gases

Standard Classification Number:Chemicals>>Other Chemical Products>>G86 Industrial Gases and Chemical Gases

associated standards

Publication information

other information

Release date:1993-08-26

Review date:2004-10-14

Drafting unit:Southwest Research Institute of Chemical Industry, Ministry of Chemical Industry

Focal point unit:National Technical Committee for Standardization of Semiconductor Materials and Equipment

Publishing department:State Bureau of Technical Supervision

competent authority:National Standardization Administration

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Introduction to standards:

This standard specifies the technical requirements, test methods, inspection rules and product packaging, marking, transportation, storage and safety requirements of high-purity ammonia for electronic industry. This standard applies to bottled high-purity ammonia. This product is mainly used in the semiconductor industry, chemical vapor deposition of silicon nitride, and can also be used for nitridation of silicon or silicon oxide. GB/T 14601-1993 High-purity ammonia for electronic industry GB/T14601-1993 Standard download decompression password: www.bzxz.net