This standard specifies the test method for the resistivity of electronic grade water. This standard is applicable to test electronic grade water with a resistivity of (0.5～18)MΩ·cm (20℃). GB/T 11446.4-1997 Test method for resistivity of electronic grade water GB/T11446.4-1997 Standard download decompression password: www.bzxz.net

GB/T 11446.3-11446.10-1997 GB/T11446.3~11446.10-1997 are respectively GB11446.3-89 "General Rules for Testing Methods of Electronic Grade Water", GB11446.4-89 "Test Methods for Resistivity of Electronic Grade Water", GB11446.5-89 "Atomic Absorption Spectrophotometric Test Methods for Trace Metals in Electronic Grade Water", GB11446.6-89 "Spectrophotometric Test Methods for Trace Silica in Electronic Grade Water", GB11446.7-89 "Ion Chromatographic Test Methods for Trace Ions in Electronic Grade Water", GB11446.8-89 "Test Methods for Total Organic Carbon in Electronic Grade Water", GB11446.9: 89 Instrumental Test Method for Particles in Electronic Grade Water". GB11446.10-89 "Filter Culture Test Method for Total Bacteria in Electronic Grade Water" has been revised.
Since GB/T11446.1 has added technical indicators for the leaving factory of metal nickel, nitrate ions, phosphate ions, and sulfur rubber ions, this standard has added the test methods for the determination of metal nickel by atomic absorption spectrophotometry and the determination of nitrate, phosphate, and sulfate by ion chromatography. The test method for bacteria only uses the filter culture method, and the method for measuring total organic carbon has also been completely rewritten. The general principles of test methods, the method for measuring resistivity, and the method for determining total silicon have all been revised and rewritten. This standard is implemented from the date of implementation, and G13 11446.3~11446.1089.
This standard is proposed by the Ministry of Electronics Industry of the People's Republic of China. This standard is submitted by the Standardization Institute of the Ministry of Electronics Industry of the People's Republic of China. The drafting units of this standard are: Institute of Semiconductors, Chinese Academy of Sciences, and Standardization Institute of the Ministry of Electronics Industry. The main drafters of this standard are: Wen Ruimei, Li Xiaoying, Wang Zaizhong, Xu Xuemin, You Pan, Liu Renzhong, and Xu Xiuxin. ..com1 Scope
National Standard of the People's Republic of China
Test methods for resistivity of electronic grade wafer
Test methods for resistivity of electronic grade wafer This standard specifies the test method for resistivity of electronic grade wafer. This standard is applicable to test resistivity of electronic grade wafer with a resistivity of (0.5~18)Mn·cm(25℃). 2 Reference Standards
GB/T11446.41997bZxz.net
Replaces GE 11446.4—89
The clauses contained in the following standards constitute the clauses of this standard through reference in this standard. The versions shown are valid at the time of publication of this standard. All standards will be revised. Each party using this standard should explore the possibility of using the latest version of the following standards. GB/T11446.1—1997 Electronic Grade Water
GR/T11446.31997 General Rules for Testing Methods of Electronic Grade Water 3 Definitions
3.1 Resistivity
At a certain temperature, the resistance value between the opposite sides of a cube of water with a side length of lom is represented by the symbol β, and the unit is (n·cm). The theoretical resistivity of pure water is 18.3M·cm (25C). 3.2 Conductivity clcctrical conductivity Conductivity is the reciprocal of electrical conductivity, represented by the symbol K, and the unit is (S/cm). The theoretical conductivity of pure water is 0. 054 82 μS/cm (25C).
4 Principle
To measure the resistivity of water, a conductivity cell is required. When the space between the two electrodes of the parallel plate conductivity cell is filled with water, the effective distance between the two electrodes is L(cn), and the spatial cross-sectional area is A(cn). Then the conductivity cell constant J(ctu-\) is:
If the resistance of water between the two electrodes is measured to be R(Q) at a certain temperature, then the resistivity (n·tm) and the conductivity K(S/cm) of the water at that temperature are respectively:
(3)
The resistivity of water is affected by the purity of water, temperature and various factors in the measurement (such as measurement method, capacitance effect, polarization effect, etc.). The measurement of pure water resistivity is a dynamic measurement, and the temperature correction method is used to convert the measured value into the resistivity at 25°C so that it can be compared. The temperature correction curve of resistivity is shown in Appendix A (Appendix of the standard). Approved by the State Administration of Technical Supervision on September 1, 1997
Implemented on September 1, 1998
5 Reagents
GB/T 11446.4—1997
The water used should meet the standard of GB/T11446.1 electronic grade water, Grade 1 water. The water used to prepare the potassium chloride conductivity standard solution should also be exposed to the laboratory atmosphere to allow it to reach equilibrium. 5.2 Potassium chloride standard solution
The solid conductivity standard substance potassium chloride (standard substance BW040T) should be dried at 110℃ for 2h before use and used after cooling. When preparing the solution, the ambient temperature should be 20℃±2℃. The relationship between potassium chloride standard solution and conductivity is shown in Appendix B (Standard Appendix). 6 Instruments
6.1 Conductivity meter
The instrument used in this method must be an AC signal passing through the conductivity cell during measurement, and its frequency can be in the range of 25Hz~100Hz. 6.2 Conductivity cell
For grade 1~I water, a conductivity cell with a constant of 0,U1 cm-1~0.1 cm\ should be used. The selection of conductivity cell band numbers is shown in Appendix A. 6.3 Thermometer
The measurement range of the thermometer should be 0℃~35℃. The accuracy is 0.1℃. 6.4 Constant temperature water bath
25℃±0.1℃ constant temperature water bath.
7 Test steps
7.1 Determination of conductivity cell constant
Wash the conductivity cell thoroughly with electronic grade water that has been exposed to the laboratory air and reached equilibrium with the carbon dioxide in the air, and then rinse it three times with the corresponding potassium chloride standard solution, then fill the conductivity cell with the standard solution and put it into a constant temperature bath, set the temperature to (25 ± 0.1) °C, and after stabilization, measure its conductivity Gx+. Measure the conductivity K of the water (weighed) used to prepare the standard solution in the same way. Calculate the conductivity cell constant according to the following formula: X,+K
Where: K,——the conductivity of the standard potassium fluoride solution at 25°C (found in Appendix B) jtS/cm; Kz—the conductivity of the water used to prepare the standard solution at 25°C +μS/cm; G. Measure the conductivity of the standard potassium chloride solution, s; The determination result of the conductivity cell constant should be accurate to 0.5%. 7.2 Dynamic measurement of resistivity
7.2.1 Connect the measuring device to the water system, let water flow through it, and remove the bubbles in the conductivity cell and adjust the water flow rate (generally not less than 0.3 m/s). Install a thermometer at the outlet of the conductivity cell. 7.2.2 Operate the conductivity meter according to the instrument manual (pre-heating, zeroing, calibration and measurement, etc.), and record the water temperature and resistivity value after the instrument readings stabilize.
7.2.3 Online measurement should use a conductivity meter with temperature compensation, which can directly read the resistance (conductivity) value at 25℃. For instruments without temperature compensation, the resistance P measured at 1℃ can be converted to the resistivity P at 25℃ according to the following formula (this formula is applicable to water temperatures of 10℃~35):
(K)+ 0.054 82
Wherein: Ps, resistivity of water at 25℃, Mn·cm; resistivity of water measured at 1℃, Ma·cm: (5)
GB/T 11446.4—1997
K.—theoretical conductivity of pure water at 1℃, μs/cm: correction factor for water at 1℃;
0.054 Theoretical conductivity of pure water at 82-25℃, S/cm8
Test report
The format of the test report shall comply with the provisions of Chapter 6 of GB/T11446.3-1997. Notes
After a certain period of use, the resistivity meter or conductivity meter used for measurement must be calibrated for the conductivity cell constant, intensity compensation, etc. 9.1
9.2 Before use, the new conductivity cell should be degreased with acetone and treated with about 1 year old dilute nitric acid or hydrochloric acid. Appendix A of the National Standard for Resistivity Temperature Correction Curve of Resistivity Pure Water Resistivity Variation with Humidity Actual Measurement: 3.4 Mn·cmu at 20°C Found: 3.0 MQcm at 25°C Temperature (°C) Potassium Chloride Standard Concentration Solution GB/T 11446.4—1997 Appendix B of the Standard for Resistivity Concentration and Conductivity of Potassium Fluoride Standard Conductivity Solution Conductivity 0.092 12 0.010 455 0.010 455001 141 4
0.000 113 5
When using the above standard solution, the following conditions should be observed: 18℃
. 197 80
0. 001 220 0
0. 000 126 7
a) The conductivity standard substance potassium chloride needs to be dried at 110 for 2 h. b) When preparing the standard solution, use a 0.1 ng nanometer. 20r
C. 011 644
0.001 2737
0. 000 132 2
0. 012 352
0.0014083
0.000 146 5
t）When preparing the standard solution, the ambient temperature is (20=2)The range of the standard solution's temperature change during calibration is (20=0.1)C: Conductivity cell constant and standard solution concentration used in different resistivity rangesResistivity range
Mn·cm
0. 3 ~-10. 0
0.03-1.00
0. 003~0. 100
Conductivity cell constant
a1 or 0, 10
0.1 or 1. 0
.0 (platinum)
0. 001 687 6
0. 000 176 5
Standard solution method
0. 01 or 0. 001
0.01 or 0. 001
0.01 or 0. 1
Tip: This standard content only shows part of the intercepted content of the complete standard. If you need the complete standard, please go to the top to download the complete standard document for free.