This specification applies to the initial verification, subsequent verification and in-use inspection of double-beam interference microscopes. JJG 77-2006 Verification Procedure for Interference Microscopes JJG77-2006 Standard download decompression password: www.bzxz.net
This specification applies to the initial verification, subsequent verification and in-use inspection of double-beam interference microscopes.

National Metrology Verification Regulation of the People's Republic of China JJG77—2006
Interference Microscopes
Promulgated on 2006-05-23
Implementation on 2006-11-23
Promulgated by the General Administration of Quality Supervision, Inspection and Quarantine JJG77-—2006
Verification Regulation of
Interference Microscopes
JJG77—2006
Replaces JJG77—1983
This regulation was approved by the General Administration of Quality Supervision, Inspection and Quarantine on May 23, 2006, and came into effect on November 23, 2006.
Responsible unit: National Technical Committee for Metrology of Geometric Quantity and Engineering Parameters Drafting unit: China National Institute of Metrology This regulation entrusts the National Technical Committee for Metrology of Geometric Quantity and Engineering Parameters to be responsible for the interpretation of this regulation Main drafters:
Gao Sitian
Participating drafters:
Zhao YouxiangWww.bzxZ.net
Zhu Xiaoping
JJG77—2006
(China National Institute of Metrology)
(China National Institute of Metrology)| |tt||(China Institute of Metrology)
(China Institute of Metrology)
2 References·
3 Overview
4 Metrological performance requirements
4.1 Characteristics of interference filters·
JJG77—2006
4.2 Distance between the inner edge of the graduated cone surface of the micrometer drum and the graduated surface of the fixed sleeve 4.3 Correlation between the index line of the micrometer eyepiece crosshair scale plate and the millimeter scale plate 4.4 Conformity of the markings on the micrometer eyepiece’s micrometer drum with those on the millimeter scale plate 4.5 Indication error of the micrometer eyepiece
4.6 Imaging quality of the optical system ·….
4.7 Relative position of the workbench and the principal optical axis · Characteristics of the auxiliary imaging device ·
4.9 Indication error of the instrument
5 General technical requirements
6 Control of measuring instruments
6.1 Verification conditions
Verification items
6 .3 Calibration method
6.4 Processing of calibration results
6.5 Calibration cycle
Appendix A Uncertainty assessment of calibration results of indication error of interference microscope Appendix B Format of calibration certificate and calibration result notice (inside pages) (1)
1 Scope
JJG77—2006
Calibration procedure for interference microscope
This procedure applies to the initial calibration, subsequent calibration and in-service inspection of double-beam interference microscopes. References
This procedure refers to the following documents:
JIF1001--1998 General metrological terms and definitionsJJF1059--1999 Evaluation and expression of measurement uncertaintyJJF1094--2002 Technical specification for measuring instrument characteristics evaluationJJG8121993 Verification procedure for optical filters
When using this procedure, attention should be paid to using the current valid versions of the above references. 3 Overview
The interference microscope consists of an interference and microscopic system, and uses the principle of light wave interference to measure surface roughness parameters. It uses the wavelength of light waves in the range of (530-600) nm as a scale, compares the measured surface with a standard optical mirror, and then observes and measures the microscopic geometric characteristics of the measured surface after high magnification by the microscopic system. The double-beam interference microscope is mainly used for the measurement of surface roughness evaluation parameters R,. The instrument can be used to measure the surface of precision machined parts such as planes, cylindrical surfaces and other external surfaces, and can also be used to measure the depth of surface lines and coatings on parts. The appearance of the commonly used instruments is shown in Figures 1 and 2.
1-focusing drum; 2-light shielding screen; 3-interference band width and direction adjustment screws; 4-reference mirror fine-tuning screws; 5, 6-micrometers for vertical and horizontal movement of the workbench; 7-workbench: 8-light source; 9-interchangeable filter; 10-aperture; 11-micrometer eyepiece: 12-micrometer drum wheel: 13-camera or monitor device Figure 1 Appearance of commonly used interference microscopes (-) 1
JJG77-2006
1-micrometer eyepiece; 2-visual, photographic conversion button; 3-camera or Monitor device; 4-light source; 5-interference band width adjustment knob; 6-interference band direction adjustment knob; 7-reference mirror fine-tuning screw: 8-workbench height movement (focusing) disk; 9-workbench rotation disk; 10-workbench translation disk; 11-workbench: 12-focusing hand wheel; 13-micrometer drum wheel: 14-eyepiece lens swivel; 15-filter moving handle; 16-film winding wrench; 17-shutter; 18-base Figure 2 Appearance of commonly used interference microscopes (II) The optical path system diagram of the instrument is shown in Figures 3 and 4 respectively. 1—light source; 2—condenser; 3—interference filter; 4—projection objective; 5—beam splitter; 6—compensation mirror; 7, 8, 10—objective lens; 9—reference mirror; 11, 14—reflector; 12—micrometer eyepiece; 13—photographic objective lens; 15—screen; 16—aperture optics; 17—field optics Figure 3 Optical system (I)
JJG77—2006
1—light source; 2—beam splitter; 3, 4—objective lens group; 5—eyepiece group; 6—photographic objective group; 7—reflector (visual, photographic conversion); 8—shield (interference, microscopic conversion); 9—reference mirror; 10—screen Figure 4 Optical path system (II)
4 Metrological performance requirements
4.1 Characteristics of interference filters
The central wavelength range of the interference filter is (530-600) nm, and the half-width of the wavelength does not exceed 10nm. The maximum change in one year does not exceed 3nm.
4.2 The distance between the inner edge of the micrometer drum differential cylinder scaled cone surface and the fixed sleeve scaled surface The distance between the inner edge of the micrometer drum differential cylinder scaled cone surface and the fixed sleeve scaled surface does not exceed 0.4mm. 4.3 Relative position of the index line of the micrometer eyepiece crosshair scale plate and the millimeter scale plate scale line The index line of the micrometer eyepiece crosshair scale plate (the index line is double scale line) should be parallel to the millimeter scale line; the parallelism between the movement direction of the crosshair scale plate and the axis of the millimeter scale should not exceed 1/10 of the length of the millimeter scale line. 4.4 Conformity of the scale line of the micrometer eyepiece micrometer drum wheel and the scale line of the millimeter scale plate 4.4.1 When the index line of the crosshair scale plate is aligned with the zero scale line of the millimeter scale, the zero scale line of the micrometer drum wheel should be aligned with the index line on the fixed sleeve, and the offset should not exceed 1/5 of the scale. 4.4.2 When the index line of the crosshair scale plate moves 1mm, the scale line of the micrometer drum wheel should rotate through 100 scales, and the offset should not exceed 1 scale.
4.5 Indication error of micrometer eyepiece
The maximum allowable error in any one circle (1mm): 0.005mm; the maximum allowable error in the whole range (8mm): 0.010mm.
4.6 Imaging quality of optical system
4.6.1 The interference fringes and the image of the measured surface in the field of view should be clear at the same time; for the instrument shown in Figure 2, the image of the measured surface and the image of the knife edge below the field of view of the instrument should be clear at the same time. When the instrument is illuminated with white light, 6 to 8 interference fringes should be visible in the middle of the field of view, among which the colored fringes are basically symmetrically arranged on both sides of the black fringes. When illuminated with monochromatic light, the interference fringes fill the entire field of view, and at least 50% of the interference fringes are clear. 4.6.2 The width and direction of the interference fringes should be adjustable at will. The width and direction of the interference fringes should not change during movement.
4.6.3 When observing with a micrometer eyepiece, the curvature of the interference fringes in the field of view in both horizontal and vertical positions shall not exceed 1/4 of the fringe spacing for an instrument in use; and not exceed 1/5 for a newly manufactured instrument. 4.7 Relative position of the workbench and the principal optical axis
4.7.1 When the workbench is rotated, the change in the interference fringe spacing shall not exceed 10%. 4.7.2 For the instrument shown in Figure 1, within the range of 10mm of the movable workbench, the object distance shall not change by more than 3.5 scales of the instrument focusing drum; for the instrument shown in Figure 2, when the workbench is moved to any position, the white light interference fringes in the center of the field of view shall be within the field of view.
4.8 Characteristics of auxiliary imaging device
4.8.1 Photographic device
The image on the photographic screen shall be as clear as the image in the eyepiece field of view, and the photographic center shall be coaxial with the center of the eyepiece field of view, with a maximum offset value of no more than 2mm; and no more than 3mm when the instrument is used inverted. 4.8.2 Monitor device
The image formed on the monitor by the transfer lens and camera should be as clear as the image in the eyepiece field of view, and the center of the camera and the center of the eyepiece field of view should be coaxial, and the maximum offset value should not exceed 2mm. 4.9 Instrument indication error
Measurement range and indication maximum allowable error are shown in Table 1. Table 1 Measurement range and indication maximum allowable error Measurement range/μm
0.40
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