Some standard content:
IE'S23.160
Machinery Industry Standard of the People's Republic of China
JB/T8945-1999
Vacuum sputtering coating plant1999-07-12 Issued
National Machinery Industry Bureau
2000-01-01 Implementation
JB/T 8y45-5999
This standard is proposed and approved by the National Vacuum Technical Committee. Drafting units of this standard:! Dongfang Vacuum Equipment Factory Co., Ltd., Shanghai Image Point Vacuum System Factory, Shenyang Vacuum Technology Research Institute. The main drafters of this standard: Li Dongfeng, Zhang Xuanqing, Ben Chunying, Li Kaying. Scope
Machinery Industry Standard of the People's Republic of China
Vacuum sputtering coating equipment
Vacum sputtering coating equipment JB/8945—1999
This standard specifies the model and basic parameters, technical requirements, test methods, inspection rules, marking, installation, operation and service life of vacuum sputtering equipment.
This standard is applicable to vacuum sputtering equipment with a pressure range of 1×10-5×10Pa. The following two referenced standards
The provisions contained in the following standards constitute the provisions of this standard through reference in this standard. When this standard is published, the versions shown are valid. All standards will be revised, and the parties using this standard shall consider the possibility of using the latest versions of the following standards. GB11 — 1590 | | tt | | GB/160701995 | | tt | | GB:T 111641999 | |tt||JB/T 7673—1995
3 Models and basic numbers
Packaging, storage and transportation diagrams
Vacuum flanges
General technical conditions for vacuum coating
1 Type 1 and skeleton type vacuum rubber seals
Type 2 and size 3 Type 3 and size 4 Type 4 vacuum rubber seals
Vacuum equipment pressure code compilation method
3.1 The model of the equipment shall comply with the provisions of JB 7673. 3.2 The basic parameters of the equipment shall comply with the provisions of Table 1 Basic steps
Number name
Limiting positive force
Restore vacuum when pumping
Rise rate
Condensation current cavitation
Approved by the National Bureau of Machinery Industry on July 12, 1999
: 5×10rl
From the atmospheric pressure will be 710
The atmospheric pressure will be 7 ×10 [a
± 5%
Implemented on January 1, 2000
4 Technical requirements
4.1 No equipment with working case
4.1.1 Temperature: 10-30℃:
4.1.2 Relative filtration: - less than 75%:
4.1.3 Cold water inlet temperature: not higher than 25℃, 8/8945℃-
4.1.4 Cold sweep water quality: city tap water or water of appropriate quality, 4.1.5 Power supply: 380V, three-phase four-wire system, 5UHz, voltage range: 361-399V, rated frequency range: 49-51H7.4.1.6 Environment: The indoor environment should be completely clean; the ground, ceiling and wall of the equipment should be very clean: the air should be clean, and there should be no dust or gas that may cause the internal combustion of the electric appliance and other hardware surfaces. 4.2 The overall requirements
4.2.! The structure and size of the static and dynamic seals of the equipment shall comply with the provisions of GD6070 and IB.T1090~1092. 4.2.1 A vacuum test tube shall be installed on the vacuum pipe and near the exhaust port of the coating chamber to respectively control the pressure of each part. 4.2.3 If the equipment uses a full-expansion pump or an oil-expansion injection pump as the main pump, an oil vapor collector shall be installed on the air inlet side. 4.2.4 The film chamber shall be equipped with an observation window and a device for generating radiation during the coating process, and a radiation-proof film shall be installed on the observation plate. 4.3 The quality requirements of the equipment to be manufactured shall be in accordance with 4.4 of GB.T11164-1999, and 4.4 Safety protection requirements. The safety protection requirements of the equipment shall be in accordance with 4.5 of GB.T11164-1999. 5 Test methods 5.1 Ultimate penetration 5.1.1 Test conditions 1) The plating room shall be empty (i.e. no plating items are changed or irradiation is carried out), and the sputtering source, component support and other parts that should be installed when the equipment is working normally shall not be removed; 2) The vacuum test shall be installed first. 11 position near the membrane chamber; 2) During the axial gas process, use the modified equipment itself to degas the key melting chamber with heat or impact device. 5.1.2 Test method
According to 2.2 of GB11164-1999
5.1 The membrane chamber is air-evacuated at the effective point.
5.2.1 Test conditions
According to 52.2 of GB11164-1999.
5.3 Pressure increase
5. 3.1 Test case
According to 5.1.1.
5.3.2 Test method
According to 5.3.2 of G/1641999
5.4 Rate of change of the emission current
JI/T 8945-1999
The equipment is in the film process and the cathode is working stably: the change value of the emission current within 3m tax week (if the film process is less than 3mn, then in the whole film process!), and the change is calculated according to the following formula; shift
Warning: Long
Follow the rate of change of the emission current:
Farnt - min
fon + fmin
Im Normal working condition for the measured maximum sputtering current position, A—normal working condition for the measured minimum sputtering current value: 5.5 Measuring equipment only
5.5.1 The vacuum gauge used to measure the over-limit pressure, the vacuum pumping time of the coating chamber to restore the vacuum, and the pressure rise rate should be the one equipped with the equipment itself and should be within the validity period
5.5.2 The ammeter used to measure the change rate of the sputtering current should be the one equipped with the equipment itself and should be within the validity period. 6. Inspection rules
6.! Each equipment shall be inspected by the inspection and maintenance department of the manufacturer according to this standard and relevant technical documents. The qualified equipment shall be accompanied by a product certificate signed by the inspection department and the inspection personnel before it can be shipped." 6.2 The inspection of equipment is divided into factory inspection and form inspection 6. 2. 1. ... When the equipment falls into one of the following situations, it shall be retrospectively type-tested: a) New products under trial production: b) When there are major changes in design, technology or materials: c) When evaluating and grading similar products;
: The equipment shall be inspected only once a year, and 15% of the batch (not less than 2 units) shall be sampled each time. If there is one item that does not meet the standards, the purchaser shall re-sample the same number of products for re-testing. If there are still unqualified products, re-testing shall be carried out. 6.3 The inspection method at that time shall be in accordance with the provisions of Chapter 5. 7 Marking, packaging, transportation and storage
7. 1 Marking
Each equipment should have a label installed in the position where it is displayed. The label should comply with the provisions of (B/13306. The content should include the manufacturer's trademark, address, equipment name, model, factory number and factory date, etc. 7.2 Packaging
7.2.1 Each package of the equipment should be protected from dew, moisture and dust to ensure that the equipment will not be damaged, corroded or have its accuracy reduced during loading and unloading, transportation, maintenance, etc.
JB/T8945-1 999
7.1.2 The equipment packaging should have a waterproof and non-detachable shipping mark. The equipment packaging and transportation operation mark should comply with the provisions of G Health 19!
7.2.3 Before packaging the equipment, remove the residual water or waste net in the equipment to ensure that the sealing surface is not damaged. Anti-rust measures must be taken for rust-prone metals.
7.2.4 The machine documents, including the packing list, certificate of conformity, instruction manual, etc., should be packed in an impermeable plastic bag: 7.3 Transportation bzxz.net
The equipment must be transported in a way that ensures that the equipment and its packaging are not damaged. Measures must be taken to prevent parts and components that may become loose during transportation. During transportation, it should be protected from exposure to sunlight, rain and violent vibrations. 7,4 0 Storage
The equipment should be stored in a well-ventilated place with a relative humidity not exceeding 90%. The place must be free of acids, vapors and gases that may cause diseases.
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