Some standard content:
National Metrology Verification Regulations of the People's Republic of China JJG 955—2000
Spectral Analysls Mlcrodensltemeter2000-08-28Promulgated
Implementation on 2000-12-01
Promulgated by the State Administration of Quality and Technical Supervision
JJC955-2000
Verification Resnlation of SectralAnalysisMitrodensiLomeler
JJG955-
This regulation was promoted by the State Administration of Quality and Technical Supervision on August 28, 2000 and came into effect on December 1, 2000.
Responsible unit: National Optical Metrology Technical Committee Drafting unit: Shaanxi Metrology Testing Institute This regulation is entrusted to the National Optical Metrology Technical Committee to be responsible for the interpretation of this regulation. Main drafter:
Li Guohua
Additional drafter:
Chen Juntang
JIG 955—200
(Shanxi Provincial Institute of Metrology and Microelectronics)
(Shaanxi Provincial Institute of Measurement and Testing)
[Sichuan Electric Power Co., Ltd. (Group)] (Shanghai Optical Instruments)
(Shaanxi Provincial Health and Epidemic Prevention Station)
?Technical requirements
Appearance
Return depth error
3.3 Indication error:
3.4 Repeatability of indication
3.5 Stability of indication.
The influence of the change of the battery voltage on the indication
4 Verification conditions,
4.1. Verification equipment
4.2 Verification environment:|| tt||5 Verification items and verification methods
5.1 Appearance inspection.....
5.2 Adjustment of workbench flatness
5.3 Verification of seasonal error.....
5.4 Verification of indication
Verification of indication stability:
5. Verification of indication stability of core instruments
JJC955-2000
5.7 Verification of the influence of wide source voltage change on indication 6 Processing of stability results and verification cycle
Appendix A Verification record format
Verification certificate and verification result notification section (back) format
1 Scope
JJG: 955--200
Verification Procedure for Microdensitometers for Spectral Analysis This procedure is applicable to the verification of newly manufactured, in-use and repaired microdensitometers for smooth analysis. 2. Microdensitometers for spectral analysis (hereinafter referred to as microdensitometers) are instruments that provide quantitative measurements in spectral analysis. After placing a number of standard samples and the measured spectrum on a sensitive plate, the density of the characteristic spectrum is measured using a microdensitometer: the density of the analyzed elements in the standard sample and the logarithm of its content are plotted to determine the content of the corresponding sample in the test sample, thereby completing the quantitative analysis of the spectrum. Definition of density D: The reciprocal of transmittance T, with base 10: that is, D,-ig(irr?
Definition of transmittance T: The ratio of the photoelectric signal intensity output by the exposed part of the spectrum piece to the unexposed part 4 to 4, that is,
T = A/An
scale in microdensitometer has the following 4 forms. [a) Density, scale is divided by logarithm
(b) Transmittance 1, its center is judged from the mouth 1000 inch scale. (2)
(conversion density information of the fixed Veney transmittance, subtract the reciprocal of the logarithm of the base, that is, D. = Ig, I/T)1] = Ig[(A/A]- 1
() peripheral conversion density D, in the visible and ultraviolet spectrum part and D, and, have the following relationship: Dp=
and scale from to: α according to the effective scale
on the imaging instrument can read the transmittance T, density D, narrow conversion range), (or D) 3 readings, (3)
microcomputer instrument scale is determined by the density formula used by the nanometer rescue equipment: generally adopt, standard reading. According to the registration part, the photoelectric measurement system, the second working table and the measurement display system are composed of 4 parts. ① The plan is roughly divided into two parts, namely, the first part is the second part, and the second part is the third part. The population is required to be a single-degree inspection system for the United States. The value of the above part is times the value of the above part (this is the value of the above part, the system is more accurate, and the following quantities are available:
The value of the above part is times the value of the above part, and the system is more accurate. The following quantities are available: wwW.bzxz.Net
The value of the above part is times the value of the above part, and the system is more accurate. The system is more accurate. The system is more accurate. The system is more accurate. The system is more accurate. The system is more accurate. The system is more accurate. The system is more accurate. The system is more accurate. ,
3.1. The distance between the car and the workbench can be adjusted horizontally, vertically, and horizontally. 3.2 After the zero error is corrected, the instrument should be set to zero with a small transmission ratio. 3.3 The error factor should not exceed the specified error factor in Table 1. The error factor should not exceed the specified error factor in Table 1. The error factor should not exceed the specified error factor in Table 21. 3333
Cup standard information board number
Some D nominal time
Indicator error
- 0 017
JJG955—2000
3.3.3 If the actual value of the standard transmittance plate deviates from the nominal value specified in Table 1 (or Table 2), the indication error can be calculated based on 4 times the actual value of the standard transmittance plate. 3.4 Repeatability of indication
3.4.1 The experimental standard deviation of the transmittance indication shall not exceed 0.005. 3.4.2 The experimental standard deviation of the density indication shall not exceed 0.01. 3.5 Stability of indication
3.5.1 After the instrument is preheated for 30 minutes, the maximum change of the full-scale value of the transmittance within 5 minutes shall not exceed U.005. 3.5.2 After the instrument is preheated for 30 minutes, the maximum change of the density value within 5 minutes shall not exceed 0.01. 3.6 Influence of power supply voltage change on indication When the external AC power supply voltage changes from 220V to +10%, the maximum change of the instrument transmittance shall not exceed 0.005
4 Verification conditions
4.1 Verification equipment
4.1.1 Standard density plate (or standard transmittance plate) The standard density plate (or standard transmittance plate) used for indication verification must give both density value and corresponding transmittance value. The required density value of the exposed part should be <0.10 (transmittance should be 80%), and the numerical interval should be roughly the same. The uncertainty of the standard density value is 0.01 (D, ≤2). .1.2 Adjustment of the spectrum plate for the workbench
Any plate that is usually used can be selected, but the spectrum line of the plate is clear, the bottom plate is not yellow, and the voltage regulation range is more than (221±22)V. The instability is less than 1%, and its power is more than twice the power consumption of the density meter to be tested.
4.2 Verification environment
Relative humidity: <85%;
Temperature: 1-3
The instrument should be shielded from stray light during use, and should not affect the use of the instrument. 5 Items and verification methods
5.1 Appearance inspection
Use visual observation and actual operation to conduct an appearance inspection to determine whether it meets the technical requirements of 3.1.1-3.1.4. 5.2 Adjustment of the straightness of the workbench
5.2.1 Place the adjustment of the harmonic plate for the workbench on the instrument workbench frame with the coating facing upward. Close the slit, loosen the brake screw, use the lower end of the slit as the adjustment point, turn the horizontal hand wheel of the workbench, align the outermost scale line on the right side of the spectrum or the center of a spectrum on it with the lower end of the slit, and move the workbench until the outermost scale image on the left side of the spectrum appears on the projection screen. If the scale images on the spectrum are not at the same degree and tilt, rotate the pendulum or screw on the front corner of the workbench to align the left end image of the spectrum scale with the lower part of the slit. Then return to the right end to adjust the center of the scale image to the lower part of the chain, and then adjust the left end with a screw. Repeat the adjustment until the scale line image of the spectrum is kept at the same height when the second work is moved.
5.2.2. Move the front corner of the score board to the mirror, adjust the lens and the focusing lens to make the spectrum lines clear. Then move the left corner of the score board to the sun, adjust the micro-wire under the front corner of the score board, so that the lines at that place will appear on the projection screen. Then move the dial to the mirror, adjust the micro-wire at the right rear of the score board, so that the image at that place will appear on the projection screen. Repeat this cycle 1 to 2 times, and the whole score board will be at a level so that all the lines on the score board can be heard clearly under the same line. 5.2.3 Adjustment of the full scale of the instrument
Put the standard variable on, open the shutter, adjust the lower operating table to make the light pass through the standard temporarily without light, then open the shutter to .1mm, adjust the degree to 15um, adjust the dimmer (press the full scale adjustment key on the microcomputer model) to make the instrument density 0 (or the transmittance value 10%), then close the shutter, adjust the lower, mark "\" position, DD (-\ position. 53 back to the standard
After the full scale adjustment is completed, the shutter of the instrument is calibrated, and the indication position is calibrated. Open the shutter, check and record it. The maximum value should not exceed the provisions of 3.2. 5.4 Indication verification
|Repeat the measurement for 6 times with the standard transmission ratio plates (density values) of 0.02 (1.699), 0.05 (1.301), 0.10 (1.000), 0.30 (0.523), and 0.50 (0.301) in sequence, and record their measured values. The difference between the measured half-mean value T (cutoff D) and the standard value T (D) of the standard transmission ratio plate (or transmission ratio plate) should not exceed the standard value T (D) of the standard transmission ratio plate (or transmission ratio plate). The error of the correction value is T (tt||) = T. ||tt| ... 5.5 Repeatability test 5.4 Basis of test 1. Select the standard table with a transmittance ratio of 0.30 (or a density of 0.523) for 6 repeated measurements: the indicated value is repeatable, the calculation standard is based on the requirements of Article 3.4, r-Ta
S(D,) -/+(D, - D,
JJG 955—2000
Where: (D,)—6 measurements of the standard transmittance plate 0.30 (or density plate 0.523); (D)—6 measurements of the standard transmittance plate 0.30 (or density plate U.523). 5.6 Verification of the stability of the instrument indication
At the verification point where the transmittance is the adjustment value (the density is 4), continuously observe for 5ir and record the absolute value of the maximum deviation from the full scale value. It should not exceed the provisions of Articles 3 and 5. 5.7 Verification of the indication of power supply voltage change Adjust the reading scale to the transmittance ratio. Without using the laser, adjust the width of the narrow chain of the instrument so that the transmittance indication is the standard value. Adjust the voltage so that the power of the external working power supply is The pressure is adjusted to produce a change of ±10%, and the transmittance indication is tested. The absolute value of the maximum deviation is recorded, which should not exceed the provisions of Article 3.6. 6 Processing of calibration results and calibration cycle
6.1 For instruments that have been calibrated to meet the technical requirements of this regulation, a calibration certificate shall be issued; for instruments that do not meet the technical requirements of this regulation, a calibration result notice shall be issued, and the unqualified items shall be indicated: G.2 The calibration cycle is 2 years: Each instrument sent for inspection shall be accompanied by the last calibration certificate. Appendix A
Name
Measurement serial number
Repeatability (actual standard deviation)
Effect of voltage change
On indication
Indication stability
JJG 955—2000
Verification record format
Application or notification
Value error
Appendix B
JJC955-100n
Verification certificate and verification result report (back) format
Annual nature (experimental standard)
Indication range
Power supply voltage change
Two indications
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