SJ 3246-1989 Photoluminescence test method for aluminum components in aluminum gallium arsenide (ALxGa1-xAs) materials SJ3246-1989 Standard download decompression password: www.bzxz.net

Standard of the Ministry of Machinery and Electronics Industry of the People's Republic of China. Test Method for Photoluminescence of Aluminum Component in Al-Ga-xAs Materials. Subject Content and Scope of Application. SJ3246-89. This standard specifies the measurement principle, measurement steps, test results and accuracy of aluminum components in Al-Ga-xAs materials. This standard is applicable to determining the peak wavelength of photoluminescence of Al-Ga-xAs and the corresponding molar percentage of aluminum. The applicable range of aluminum content is 0~45%, corresponding to the peak wavelength of aluminum at room temperature (297K) λp1=871.6~613.2nm. 2 Principle. Record the photoluminescence spectrum of Al-Ga-xAs in the wavelength range of 550~880nm. The peak wavelength of the fluorescence peak λp1 is determined by the intersection of the straight lines tangent to the two sides of the spectrum peak. The total amount of lead λp1 is determined by the calibration relationship between the total amount of lead λp1 and the aluminum content. 3 Instruments and Equipment
3.1 Sample Preparation Device
Basic equipment of a general chemical laboratory, such as beakers and tweezers for acid, equipment for making and handling acids and their vapors, and ventilation facilities.
3.2 Sample Photofluorescence Measurement Device (see Figure 1)
Color Mirror
Sample Rack
Monochromator
Control Dew
Detector
Modified Pot
Figure 1 Schematic Diagram of Photofluorescence Device
Recorder
3.2.1 Light Source
Argon ion laser or other light source, with a wavelength less than 550nm. If a laser is used as a light source, care should be taken not to directly watch to prevent eye damage, and to prevent the light source from reflecting from the mirror surface and causing eye damage. 3.2.2 Sample support
Use a support to support the sample so that the position where the incident light shines on the sample is just aligned with the focusing system of the monochromator. The sample support cannot damage the sample and it is best not to touch the sample surface. The sample movement should be controlled in the plane direction of the sample so that the light fluorescence of the sample to be tested can be measured.
3.2.3 Focusing system
The focusing system consists of a color filter and a focusing lens. 3.2.4 MonochromatorbzxZ.net
The wavelength range of the monochromator is 500~900nm, and the wavelength accuracy and repeatability should be better than 0.5nm. 3.2.5 Detector
Use a photomultiplier tube whose spectral sensitivity remains unchanged or changes very little over the entire wavelength range. In the absence of calibration data for photomultiplier tubes, the sensitivity curve provided by the manufacturer can be used. Within the measured spectral range, the sensitivity change within any 10nm should not exceed 10%.
3.2.6 Electrical equipment for the detection system
High voltage power supply for photomultiplier tubes, phase-locked amplifier, x-y recorder. 4 Reagents
4.1 Purity of reagents
The chemical reagents used should be electronic grade,
4.2 Purity of water
The resistivity of water should be greater than 2MQ·cm at 25°C, 4.3 Corrosive solution
Add 8ml of phosphoric acid to 32ml of water, and add 1ml of hydrogen peroxide when the solution cools to near room temperature. 5 Measurement steps
5.1 At room temperature, etch the sample in the prepared etching solution for about 1 minute, rinse it in deionized water and dry it in air
5.2 Place the sample on a support, adjust the support so that the light is close to the geometric center of the sample, and the distance between the sample surface and the focusing system should be such that the illumination area is focused on the monochromator entrance slit. 5.3 The monochromator quickly scans within the wavelength range used, finds the peak wavelength, adjusts the sensitivity of the measurement system, and obtains a peak wavelength reading of 40%~90% of the full scale.
5.4 The monochromator performs a slow scan near the peak wavelength, records the fluorescence spectrum, and marks the wavelength position every 10nm (manually or automatically). The slow scan speed is determined as follows. When the scan rate is reduced by half and the apparent peak wavelength position changes by less than 0.5nm, the scan speed can be considered slow enough.
Note that the energy band spacing of lead and arsenic varies with temperature. When the incident light power density of the light source is large enough to cause local heating of the sample, the measurement of 7pL will be disturbed. Therefore, a neutral filter or other measures should be used in the measurement to ensure that the incident light power is not too large. When the incident light power is low enough, the PL remains unchanged. When the power is too large, the PL moves to the long-wave direction as the power increases. 6 Test results
6.1 Determination of fluorescence peak wavelength
6.1.1 Draw a tangent on each side of the peak of the fluorescence spectrum, and extend the two tangents until they intersect, as shown in Figure 2. 6.1.2 Vertically interpolate the wavelength coordinates from the intersection of the two tangents to obtain the wavelength reading of the intersection as the peak wavelength PL (nm). 6.2 Determination of the molar percentage of aluminum
SJ3246-89
Light fluorescence spectrum of aluminum gallium arsenide
Wavelength (am)
From the relationship between the content of the aluminum component and the peak wavelength (see the table below), calculate the molar percentage of aluminum corresponding to Pt. Table of the relationship between the content of the aluminum component in aluminum arsenic materials and the peak wavelength of light fluorescence Peak wavelength
7 Report
The report should include the following:
Component
Peak wavelength
Component of aluminum
(M%)
Sample name, source and number;
b, the location of the measuring point on the sample;
SJ3246--89
c, the value of the peak wavelength of light fluorescence P- and the corresponding aluminum component x; d. Test date and tester.
8 Accuracy
The input P accuracy of this standard measured in different laboratories, △ input PL/2pL<2% corresponds to the accuracy of aluminum content in the material, when x=0.11~0.45, △×/× (%) ≤20%, when x<0.1, △x/×>20% Additional remarks:
This standard was drafted by the 13th Research Institute of the Mechanical and Electronic Industry Department. The main drafter of this standard: Zhang Ronggui
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