Method for determination of trace Hydrogen in electronic grade gases-Gas-sensitization chromatographic method
Basic Information
Standard ID:
SJ 2807-1987
Standard Name:Method for determination of trace Hydrogen in electronic grade gases-Gas-sensitization chromatographic method
Chinese Name:
电子级气体中痕量氢的测试方法 气敏色谱法
Standard category:Electronic Industry Standard (SJ)
state:in force
Date of Release1987-04-06
Date of Implementation:1988-01-01
Date of Expiration:2010-01-20
standard classification number
Standard Classification Number:General>>Standardization Management and General Provisions>>A01 Technical Management
associated standards
Procurement status:SEMI Standard NEQ
Publication information
publishing house:Electronic Industry Press
Publication date:1988-01-01
other information
Publishing department:Ministry of Electronics Industry of the People's Republic of China
Introduction to standards:
This method is applicable to the determination of trace hydrogen in electronic grade hydrogen, nitrogen, oxygen, argon, helium and ammonia, with a determination range of 0.05 to 37 ppm. SJ 2807-1987 Test method for trace hydrogen in electronic grade gases Gas-sensitive chromatography SJ2807-1987 standard download decompression password: www.bzxz.net
This method is applicable to the determination of trace hydrogen in electronic grade hydrogen, nitrogen, oxygen, argon, helium and ammonia, with a determination range of 0.05 to 37 ppm.
Some standard content:
The standard of the Ministry of Electronic Industry of the People's Republic of China. Determination of trace hydrogen in electronic grade gas. Gas-sensitive chromatography
512897-87
This method is applicable to the determination of trace amounts of hydrogen in electronic grade hydrogen, nitrogen, oxygen, argon and hydrogen, and the determination range is 0.05～37Ppm.
Method principle
Gas-sensitive semiconductor, also known as gas resistance, is a component composed of semiconductor materials that are particularly sensitive to gases. N-type semiconductor gas-sensitive elements are particularly sensitive to gases such as hydrogen. The adsorption of gases such as hydrogen on the surface of the semiconductor forms a certain bond, changes the distribution of electrons on its surface, and causes a change in conductivity. When the gas escapes, the conductivity returns to its original value. In this way, the conductivity change, that is, the resistance change, can be recorded through a simple circuit. 2Www.bzxZ.net
Device and materials
a. Gas chromatograph.
, the instrument can be 23P-KI gas colorimeter produced by Guangdong Fangyi Instrument Co., Ltd. b. Vortex controller.
C. Six-way sample escape valve, with quantitative tube.
d. Chromatographic column, stainless steel tube with inner diameter of 3-4mru and length of 1.0-1.5m. c. Recorder; 0-1mV, or 0-10mV. f. Carrier gas: air, dehydrated with silica gel and dehydrogenated with AgX molecular sieve to make its nitrogen content
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