Some standard content:
National Metrology Technical Specification of the People's Republic of China JJF1064—2004
Calibration Specification for Coordinate Measuring Machine
Calibratbion Specification for Coordinate Measuring Machlne2004-0604 Issued
2004-12-01 Implementation
Issued by the General Administration of Quality Supervision, Inspection and Quarantine JJF1064—2004
Calibration Specification for Coordinate Mensuring Machine
JJF 1064 —2004
Replaces JJF1064—200
This specification was approved by the State General Administration of Quality Supervision, Inspection and Quarantine on June 4, 2004, and will be implemented from December 1, 204.
Responsible unit:
Main drafting unit:
Participating drafting unit:
State Length Metrology Technical Committee China National Institute of Metrology
Shengdao Qianshaoyuan Metrology Technology Co., Ltd.
China Aviation Industry First Group Corporation Beijing Aviation Precision Machinery Research Institute
This specification shall be interpreted by the responsible unitwwW.bzxz.Net
Main drafters of this specification:
Pei Liheng
Su Yongchang
Participating drafters:
Ying Dongming
JJT 1064
(China Institute of Metrology)
(China Institute of Metrology)
(China Institute of Metrology)
【Qingdao Qianshao Measurement Technology Co., Ltd.
(China Aviation Industry Corporation
Beijing Institute of Aeronautical Precision Machinery
References
Abstract and definition·
Measuring characteristics
Also using principles
Measurement of the most scalable coordinate measuring press
JJFIOA
Applying the rotary table as the fourth oil coordinate measurement is similar to the coordinate measuring machine used in the scanning cat touch type coordinate measuring book worry about using a piece of multi-needle measuring system coordinate measuring machine "more accurate conditions...
Environmental conditions,
Detection system.
6.4 Standard data·
Calibration items and calibration procedures
Coordinate measuring machine with measuring scale
Coordinate measuring machine used in scanning mode with rotary table as the fourth measuring machine·7.4 Coordinate measuring machine using multi-depth probe system8
Recalibration certification:
Recalibration time interval
Appendix B Inspection (informative)
Appendix B Supplementary measurement of large coordinate measuring machine
Example of measurement uncertainty assessment
Conformity determination
—Scope
J.[F 104—2004
Calibration specification for coordinate measuring machines
This standard applies to the calibration of coordinate measuring machines using inoculation type measurement systems. When appropriate, other forms of reference may also be used. 2. References are dated reference documents. All subsequent amendments (excluding incorrect inserts) or revisions are not applicable to this standard. However, all parties to the agreement reached on this standard are encouraged to study whether the latest versions of these documents can be used. For example, for undated reference documents, the latest versions shall apply to this part. GB/T16857.1-2001 Product Technical Specification (CPS) Acceptance test and recheck test for coordinate measuring machines Part 1: Specification (O3601, IDI50 10360 - 2: 2001 Gcomu:trie:l Proxluet Spcx:ifieutiurz t CP5) Inspection and rechecking of coordinate measuring machines (CMl)—Farl 2;CMMy umed lur rueuuring size Product Technical Specification (CPS) Acceptance test and recheck test for coordinate measuring machines Part 2: Coordinate measuring machines for measuring bases
E0 l0360 - 3: 2000 German Mechanical Principle Spifieulius (CPS) Acceptance test and rechecking of coordinate measuring machines (CMM) Purl 3: CMs with the is uf rutuny lableathefourthaxis（Product geometry specification [Cs) Coordinate measuring machine acceptance test and recalibration Part 3: Coordinate measuring machines with turntable axis as fourth axis）GB/I16857.4-2003* Product geometry specification (CPS) Coordinate measuring machine acceptance test and recalibration Part 4: Coordinate measuring machines used in cat mode（IS0103G0-4, [DT）J50 10360 - 5: 2000 Geomctrical Planar Specimen (CPS) Auetplance nel reerificalinn lexls for coolinate measuring machines ( CMM) —Par 5: ChM: using ullliple - alylus pruhie (Product Geometry Technical Specification "GPS") Acceptance test and retest test of measuring machines Part 5: Standard test procedures for measuring multi-depth detection systems J146-2H3 Specifications
JJF101-1998 General measurement terms and definitions JF1059-1999 Evaluation and expression of uncertainty in measurement B/18779.1-2>02 Product Geometry Technical Specification (GPS) Electrical inspection of workpieces and measuring equipment Part 1: Acceptance test and retest test of measuring machines Part 1: Standard test and retest rules for qualified and unqualified units ([S142531:1998, IIRT) (H3154H1 General requirements for laboratory capabilities for testing 3 technical specifications and definitions
The following terms and definitions are adopted and updated JJFJLK, the terms and definitions in GB/T16857.1 (part of the terms and definitions are excerpted as follows): | |tt||JJF1064-2004
3.1 Measurement plan of semi-marking measuring machine When a semi-marking measuring machine is used to measure a workpiece in reverse, it is the sum of the installation position of the workpiece in the measuring space, the detection configuration of the coordinate measuring machine, the number and distribution of the detection points, the measurement method (such as point measurement, tracer measurement, centering measurement, etc.), environmental conditions, and evaluation methods. |tt||3.2 Calibration of coordinate measuring service: Calibration of the coordinate measuring machine based on the specified measurement service and the specified measurement plan under specified conditions.
. Detection error (MFF): The radius range of the spherical ruler and the physical standard network is determined by the coordinate measuring machine. 3.4 Allowable detection error (MFF): The maximum value of the detection error allowed by the specifications and procedures of coordinate measuring machines: 3.5 The indication error (E) of some measuring scales is the indication error of the distance between two nominally parallel planes (orthogonal to a plane) of a small physical standard device approaching the operating point from two opposite directions using a measuring machine: 3.6 The maximum permissible indication error (PE) of a coordinate measuring machine dimensional measurement is the maximum permisgihleertor of
the indication error E of a coordinate measuring machine scale plate allowed by the specifications and procedures of the coordinate measuring machine.
3.7 Radial error (R) The radial error range of the coordinate measuring machine, which uses the axis of the rotary table as the fourth axis, is the error range of the indication of the center position of the detection ball in the workpiece coordinate system.
3.8 Tangential four-axis error [FT]
tangential four-axis error The radial range of the indicated error of the center position of the control ball measured in the workpiece calibration system using the rotating table line as the fourth axis of the coordinate measuring machine.
3.9 Axial four-axis error (14)
axial four-axis error The minimum range of the indicated error of the center position of the control ball measured in the workpiece calibration system using the rotating table line as the fourth axis of the coordinate measuring machine.
3 Maximum permissible radial four-axis error (MP)
niavimum permissible radial four-axis error FR The radial four-axis error FR allowed by the specifications and procedures of the coordinate measuring machine with the axis of the rotary table as the fourth axis.
3. The maximum allowable mean four-axis error (MPE) tmximum gernissiule tangential for=axie erm is obtained from the specification of the measuring machine for the first axis, and is the limit value of the tangential four-axis error set by the specification.
32 Maximum permissible axial four-axis error E The limit value of the axial four-axis error E allowed by the specifications, regulations, etc. of a coordinate measuring machine with the axis of the turntable as the fourth axis:
3.13 Indication of measuring point uclunedl menarel puinl2
JJF1064—2004
A specific point in the measuring system, indicating the calibration value of the point at the moment of effective detection. 3.4 Positive measuring point
Indication of the measured point on the workpiece surface. 3.15 Positive line comected acan linc The line described by the corrected measuring point obtained by scanning detection. 3.16 Scanning probing error (T) canningprobingerron The radius change of the contact ball determined by a coordinate measuring machine: 3.17 Maximum permissible scanning probing error (MFE) rnaumum pemiasible acanming probing error The maximum value of the normalized error T allowed by the specifications and procedures of the coordinate measuring machine: 3.i Scanning detection time (M1T) The maximum permissible time for scanning detection time (M1T) is the time from the first step of the scanning sequence to the end of the scanning sequence. teat The limit value of the scanning test time allowed by the specifications and procedures of the coordinate measuring machine. 3.20 Fixed probe probing system shape (MF) fixedmutiple-styluyprobinggyatcmform(rror coordinate measuring machine 1 uses a fixed probe to detect discrete points on the test ball and approximates each point with the least squares method to measure the range of variation of the diameter of the physical standard in the spherical scale. 3.2] Fixed multiple-probe probing system size error (Ms) fixedadmultiple-alylusprobingsystemsizeerror On the coordinate measuring machine, a fixed multiple probe is used to detect discrete points on the test ball and approximate each point with the least squares method to measure the indication error of the diameter of the physical standard in the spherical scale. 3.22 Fixed multiple-probe probing system position error (MI) tixed nmtriple-stylun prmhingkyatram
Use fixed multi-probes on the measuring machine to measure on the measuring ball in discrete point detection mode, use the least square method to approximate each point, and the range of variation of the center of the spherical ruler is: 3.2 Maximum allowable fixed multi-probe detection system shape error (MPEu) maintrunpermiseilileixedmultiple slylua μrobing yslen furrt errurThe limit value of the fixed multi-probe detection system shape error MF allowed by the specifications and regulations of the measuring machine,
maximumJk:rmiagillesfix(slmul-3.24 Maximum allowable fixed multi-probe detection system size error (MPFx) tiplc - strlus probiny hvetr:m Hia a:rrus also the limit value of the form error of the fixed multi-probe measuring system allowed by the specifications and procedures for coordinate measuring machines
3.25 Tiple-lylux prohing system error (PE) maximum permissible fixed multi-probe probing system position error The limit value of the form error of the fixed multi-probe probing system allowed by the specifications and procedures for coordinate measuring machines.
3.26 Articulated form error of universal measuring system JJF 1064:2004
Use a universal probing system on a coordinate measuring machine to carry out measurement on the test sphere in the form of remote point probing, and use the multiplication method to approximate each point to determine the range of variation of the radius of the physical standard of the spherical ruler. 3.27 Articulated pmbing error (As) Articulated pmbing error (A) Articulated pmbing error (B) Articulated pmbing error (C) Articulated pmbing error (D) Articulated pmbing error (A) Articulated pmbing error (B) Articulated pmbing error (A ... 3.30 Maximum permissible radial probing system dimensional error (MPEas) The maximum permissible radial probing system dimensional error 5 allowed by the coordinate measuring machine specifications, requirements, etc. 3.31 Maximum permissible radial probing system position error (MiE.) The maximum permissible radial probing system position error AL allowed by the coordinate measuring machine specifications, requirements, etc. 4. Coordinate measuring can be used to perform dynamic, mechanical or dynamic measurement of three-dimensional parts of various complex shapes. By adding small operations, such as a rotary table, multiple probes, etc., the measurement accuracy can be improved. Through human-computer interaction, all measurement data collection and data processing operations can be completed under computer control: The measurement objects of coordinate measuring machines are diverse, and the same measured object can have different measurement schemes: Due to the different measurement cases and different superposition methods, the uncertainty of the measurement results may be different. Therefore, the calibration of coordinate measuring machines should be carried out according to the most basic measurement tasks. The indication error or detection error under different configurations and different usage conditions should be measured, including:
A coordinate measuring machine with a measuring disk size:
A coordinate measuring machine with a rotary table as the fourth axis: A coordinate measuring machine used in scanning mode: A semi-standard measuring machine using a multi-probe measurement system. The measurement results show the uncertainty of these measurement tasks and provide a basis for determining the estimated value of the uncertainty of other measurement tasks. This specification can be used as a guide for acceptance testing. For measurement tasks with special requirements, such as high traceability requirements, task-oriented testing should be adopted as much as possible. 5 Metrological characteristics 5.1 General principles The maximum allowable error is within JJF 1064.- 2004
1. Effective time, according to the data specified by the user and the procedures specified by the manufacturer;-- Acceptance test, according to the technical requirements of the contract and the procedures specified by the manufacturer, if there is no special provision: the maximum allowable error exceeds the position or orientation of the coordinate measuring machine with the standard installed in the coordinate measuring machine's measuring space, various allowable table configurations, the position and direction of the rotating table, etc. 5.2 Coordinate measuring machine for measuring dimensions
5.2.1 Probe probe error
The detection error shall not exceed the maximum allowable detection error M, in microns. 5.2.2 Dimension measurement error (E)
The indication error E of the dimension measurement machine shall not exceed the maximum allowable indication error MPE of the dimension measurement machine. , in microns,
5.3 Coordinate measuring machine with rotary table as fourth axis 5.3.1 Axis error
The radial, tangential and axial four-axis errors FR, FT, FA shall not exceed the corresponding maximum allowable four-axis errors PE, MPE, MPEm, in microns. 5.4 Coordinate measuring machine used in scanning mode 5.4.1 Scanning detection error
The scanning detection error T shall not exceed the maximum allowable inductive detection error MP, in microns. The scanning parameters are:
HI—scanning on the predetermined path to collect high point density; IP—scanning on the predetermined path to collect low point density; IIN—scanning on the non-predetermined path to collect high point density; LN—scanning on the non-predetermined path to collect low point density. Scanning detection time
The scanning detection time shall not exceed the maximum allowable scanning detection time MPE, in seconds. See 5.4.1 for the selection. 5.5 Coordinate measuring machine using multi-depth probe system 5.5.1 Fixed depth probe detection system error. The shape, size and position errors MF, MS, ML of the fixed multi-depth probe detection system shall not exceed the corresponding maximum allowable errors (MIEw., MIE, MIE, respectively), and the unit is micron. 5.5.2 Universal depth probe system error. The shape, size and position errors MF, MS, ML of the universal probe detection system shall not exceed the corresponding maximum allowable error (PE, MPE, MPE, respectively), and the unit is micron. 6 Calibration conditions. 6.1 Environmental conditions. 6.1.1 Environmental conditions. Environmental conditions. JJF10642804. Environmental conditions that should be considered, such as the temperature conditions, humidity conditions and vibration conditions that affect the measurement, shall be specified by the user during calibration. During the acceptance test, the user can freely choose the environmental conditions within the permissible limits. 6.1.2 Measurement of ambient temperature
The test environment temperature must be recorded.
During the test, the temperature change and temperature gradient of the environment should be measured and recorded. The measurement points should be no less than 4 points, distributed in different directions and heights.
6.2 Probe system
The detection system matching limit corresponding to the specified maximum permissible error can be considered (probe, probe extension rod, needle lifting space, depth gauge system reorders, etc. These limits are set by the manufacturer in the acceptance test and by the user in the calibration.
The variable probe lengths used in the inspection shall be carried out with a nominal head diameter light ball-end probe. The probes used in the multi-probe inspection are standard, i.e. they shall have the same material, the same probe holder diameter and nominal length: the same probe tip quality. However, the probe lengths may not be exactly the same in the inspection, but variations of 1 mm or % of the nominal length, or even greater, are permitted. ,
Acceptance test or calibration seal, the user can freely choose the configuration of the probe system within the limited range. 6.3 Operating conditions
The coordinate measuring machine should run smoothly, without noise caused by components, and the operating range should meet the requirements. When retrograde calibration and acceptance test, the following procedures should be used as specified in the manufacturer's operating instructions:) Coordinate measuring machine start-up warm-up cycle;
b) Configuration and equipment of the deep probe system:
) Cleaning procedure of the probe needle and the swimming ball:) Calibration of the deep measuring system.
: Before the detection system is calibrated, a new calibration ball with a clear needle is required, which can meet the requirements of the photography or detection of the results -
6.4 Standards
6.4.1 Dimensional physical standards (mother block or step gauge): The shortest length is more than 30mm, the maximum length is 1000mm, and there are five different-sized physical standards with a diagonal of 6% of the small space. The other lengths make the measured lengths uniform: The lengths of the dimensional physical standards should be effectively spread out: When the maximum length cannot reach 60% of the single-band space, you can consider using a supplementary support, 6.1.2 Detection ball
to meet the requirements, select according to needs.
Calibration items and calibration methods
7.1 Coordinate measuring rules of measuring ruler
7.1.1 Avoidance error
7.1.1 Principle
Scanning and measuring ball
Detection ball
Detection ball device
(1 ball)
g10mm~
+30mam
JJE 1864—2004
Requirements and applicable items for measuring balls
Steel: nominal diameter 2mm; use accuracy not less than
HVSM; surface twist exceeding H, not less than
m diameter and shape are calibrated
shape is issued by the company: Table 10 "+" indicates "appropriate", "_" indicates "not applicable". The principle of the calibration method without detection error is The distance between the measuring point and the center of the Gaussian fitting ball is determined to evaluate whether the coordinate measuring machine meets the specified maximum permissible detection error ME. 7.1.1.2 Procedure
() Select the detection ball according to Table 1.
2) Within the permissible limits, the user can arbitrarily select the direction of operation and the installation position of the detection ball. This assumes that the direction of the probe is not parallel to any axis of the coordinate measuring machine. The choice of the detection ball installation strategy can significantly affect the result. (3) Install the test ball. The test ball should be installed firmly to reduce the error of movement. (4) Measure and record 25 points. These points should be evenly distributed on at least half of the test ball: The distribution of the points should be specified by the user. If the user does not specify, it is recommended to use the following depth measurement distribution (see Figure 1): At the pole of the test ball (the point defined by the probe direction): 4 points 22.5 below the pole (evenly distributed): 8 points 45 below the middle point (evenly distributed), relative to the previous set of points Rotate 22.5°: 67.5 points below the pole (evenly distributed), rotate 22.5° relative to the previous group of points: 90° below the pole, that is, 8 points on the equator [evenly distributed], rotate 2.5° relative to the previous group of points. 1.1.3 Processing of measurement results
Use all 25 measurement points to calculate the Gaussian fitting sphere. The 25 measurement points are divided into the calculation Gaussian radius distance R.
The detection error P is the range of 25 Gaussian radii: P= R -Rin
7.1.2 Dimension measurement
7.1.2.1 Principle
JJE 1064—2004
National 1 Measurement Error Distribution of Measurement Points
The calibration method of the eight-inch measuring machine is to evaluate whether the coordinate measuring machine meets the maximum allowable indication error MPE of the specification by comparing the accuracy value and indication value of 5 physical dimensions of different lengths. The 5 physical dimensions are placed in different directions or positions between the measuring objects, and the measurement is performed 3 times. The following procedures are performed:
7.1.2.2 Procedure
(1) Within the allowed limit, the user can select the directions and positions of the five physical dimensions that are not called small physical dimensions.
Method: The measurement may be correct or may be wrong. (2) For all? Repeat the following steps for each position or direction: measure the 5 physical objects three times in each direction or position: measure the outside or inside in both directions. Measure one point on each working end of the standard, and the minimum measurement value is the distance between the two points along the length of the standard.
For the purpose of alignment (determine the length of the standard), an auxiliary measurement is required, which is performed separately for each measurement.2 Error of indication of size measurement (E)
The error of indication of size measurement E of the whole measuring machine shall not exceed the maximum permissible error of indication MPE of the cupping machine. The unit is micrometer.
5.3 Coordinate measuring machine with rotary table as fourth axis 5.3.1 Axis error
The radial, tangential and axial four-axis errors FR, FT, FA shall not exceed the corresponding maximum permissible four-axis errors PE, MPE, MPEm. The unit is micrometer. 5.4 Coordinate measuring machine used in scanning mode 5.4.1 Scanning detection error
The scanning detection error T shall not exceed the maximum permissible detection error MP. The unit is micrometer. The scanning parameters are:
HI—scanning on the predetermined path to collect the commercial point density; IP—scanning on the predetermined path to collect the low point density; IIN—scanning on the non-predetermined path to collect the high point density; LN—scanning on the non-predetermined path to collect the low point density. Scanning test time
The scanning test time should not exceed the maximum allowable scanning test time MPE, in seconds. For selection, see 5.4.1
5.5 Coordinate measuring machine using multi-depth probe measurement system 5.5.1 Fixed multi-depth probe detection system error
Fixed multi-depth probe detection system shape, size and position error MF, MS, ML should not exceed the corresponding maximum allowable error (MIEw., MIE, MIE), in microns. 5.5.2 Universal depth measuring system error
The shape, size and position errors of the universal sounding system, 4, 1 shall not exceed the corresponding maximum allowable error (PE, MPE, MPE, the unit is micron). 6 Calibration conditions
6.1 Environmental conditions
6.1.1 Environmental conditions
JJF10642804
The environmental conditions that should be considered, such as the temperature, humidity and vibration conditions of the installation location that affect the measurement, shall be fully specified by the user during calibration. During the acceptance test, the user can freely choose the environmental conditions within the permissible limits. 6.1.2 Measurement of ambient temperature
The test environment temperature must be recorded.
During the test, the temperature change and temperature gradient of the environment should be measured and recorded. The measurement points should be no less than 4 points, distributed in different directions and heights.
6.2 Probe system
The detection system matching limit corresponding to the specified maximum permissible error can be considered (probe, probe extension rod, needle lifting space, depth gauge system reorders, etc. These limits are set by the manufacturer in the acceptance test and by the user in the calibration.
The variable probe lengths used in the inspection shall be carried out with a nominal head diameter light ball-end probe. The probes used in the multi-probe inspection are standard, i.e. they shall have the same material, the same probe holder diameter and nominal length: the same probe tip quality. However, the probe lengths may not be exactly the same in the inspection, but variations of 1 mm or % of the nominal length, or even greater, are permitted. ,
Acceptance test or calibration seal, the user can freely choose the configuration of the probe system within the limited range. 6.3 Operating conditions
The coordinate measuring machine should run smoothly, without noise caused by components, and the operating range should meet the requirements. When retrograde calibration and acceptance test, the following procedures should be used as specified in the manufacturer's operating instructions:) Coordinate measuring machine start-up warm-up cycle;
b) Configuration and equipment of the deep probe system:
) Cleaning procedure of the probe needle and the swimming ball:) Calibration of the deep measuring system.
: Before the detection system is calibrated, a new calibration ball with a clear needle is required, which can meet the requirements of the photography or detection of the results -
6.4 Standards
6.4.1 Dimensional physical standards (mother block or step gauge): The shortest length is more than 30mm, the maximum length is 1000mm, and there are five different-sized physical standards with a diagonal of 6% of the small space. The other lengths make the measured lengths uniform: The lengths of the dimensional physical standards should be effectively spread out: When the maximum length cannot reach 60% of the single-band space, you can consider using a supplementary support, 6.1.2 Detection ball
to meet the requirements, select according to needs.
Calibration items and calibration methods
7.1 Coordinate measuring rules of measuring ruler
7.1.1 Avoidance error
7.1.1 Principle
Scanning and measuring ball
Detection ball
Detection ball device
(1 ball)
g10mm~
+30mam
JJE 1864—2004
Requirements and applicable items for measuring balls
Steel: nominal diameter 2mm; use accuracy not less than
HVSM; surface twist exceeding H, not less than
m diameter and shape are calibrated
shape is issued by the company: Table 10 "+" indicates "appropriate", "_" indicates "not applicable". The principle of the calibration method without detection error is The distance between the measuring point and the center of the Gaussian fitting ball is determined to evaluate whether the coordinate measuring machine meets the specified maximum permissible detection error ME. 7.1.1.2 Procedure
() Select the detection ball according to Table 1.
2) Within the permissible limits, the user can arbitrarily select the direction of operation and the installation position of the detection ball. This assumes that the direction of the probe is not parallel to any axis of the coordinate measuring machine. The choice of the detection ball installation strategy can significantly affect the result. (3) Install the test ball. The test ball should be installed firmly to reduce the error of movement. (4) Measure and record 25 points. These points should be evenly distributed on at least half of the test ball: The distribution of the points should be specified by the user. If the user does not specify, it is recommended to use the following depth measurement distribution (see Figure 1): At the pole of the test ball (the point defined by the probe direction): 4 points 22.5 below the pole (evenly distributed): 8 points 45 below the middle point (evenly distributed), relative to the previous set of points Rotate 22.5°: 67.5 points below the pole (evenly distributed), rotate 22.5° relative to the previous group of points: 90° below the pole, that is, 8 points on the equator [evenly distributed], rotate 2.5° relative to the previous group of points. 1.1.3 Processing of measurement results
Use all 25 measurement points to calculate the Gaussian fitting sphere. The 25 measurement points are divided into the calculation Gaussian radius distance R.
The detection error P is the range of 25 Gaussian radii: P= R -Rin
7.1.2 Dimension measurement
7.1.2.1 Principle
JJE 1064—2004
National 1 Measurement Error Distribution of Measurement Points
The calibration method of the eight-inch measuring machine is to evaluate whether the coordinate measuring machine meets the maximum allowable indication error MPE of the specification by comparing the accuracy value and indication value of 5 physical dimensions of different lengths. The 5 physical dimensions are placed in different directions or positions between the measuring objects, and the measurement is performed 3 times. The following procedures are performed:
7.1.2.2 Procedure
(1) Within the allowed limit, the user can select the directions and positions of the five physical dimensions that are not called small physical dimensions.
Method: The measurement may be correct or may be wrong. (2) For all? Repeat the following steps for each position or direction: measure the 5 physical objects three times in each direction or position: measure the outside or inside in both directions. Measure one point on each working end of the standard, and the minimum measurement value is the distance between the two points along the length of the standard.
For the purpose of alignment (determine the length of the standard), an auxiliary measurement is required, which is performed separately for each measurement.2 Error of indication of size measurement (E)
The error of indication of size measurement E of the whole measuring machine shall not exceed the maximum permissible error of indication MPE of the cupping machine. The unit is micrometer.
5.3 Coordinate measuring machine with rotary table as fourth axis 5.3.1 Axis error
The radial, tangential and axial four-axis errors FR, FT, FA shall not exceed the corresponding maximum permissible four-axis errors PE, MPE, MPEm. The unit is micrometer. 5.4 Coordinate measuring machine used in scanning mode 5.4.1 Scanning detection error
The scanning detection error T shall not exceed the maximum permissible detection error MP. The unit is micrometer. The scanning parameters are:
HI—scanning on the predetermined path to collect the commercial point density; IP—scanning on the predetermined path to collect the low point density; IIN—scanning on the non-predetermined path to collect the high point density; LN—scanning on the non-predetermined path to collect the low point density. Scanning test time
The scanning test time should not exceed the maximum allowable scanning test time MPE, in seconds. For selection, see 5.4.1
5.5 Coordinate measuring machine using multi-depth probe measurement system 5.5.1 Fixed multi-depth probe detection system error
Fixed multi-depth probe detection system shape, size and position error MF, MS, ML should not exceed the corresponding maximum allowable error (MIEw., MIE, MIE), in microns. 5.5.2 Universal depth measuring system error
The shape, size and position errors of the universal sounding system, 4, 1 shall not exceed the corresponding maximum allowable error (PE, MPE, MPE, the unit is micron). 6 Calibration conditions
6.1 Environmental conditions
6.1.1 Environmental conditions
JJF10642804
The environmental conditions that should be considered, such as the temperature, humidity and vibration conditions of the installation location that affect the measurement, shall be fully specified by the user during calibration. During the acceptance test, the user can freely choose the environmental conditions within the permissible limits. 6.1.2 Measurement of ambient temperature
The test environment temperature must be recorded.
During the test, the temperature change and temperature gradient of the environment should be measured and recorded. The measurement points should be no less than 4 points, distributed in different directions and heights.
6.2 Probe system
The detection system matching limit corresponding to the specified maximum permissible error can be considered (probe, probe extension rod, needle lifting space, depth gauge system reorders, etc. These limits are set by the manufacturer in the acceptance test and by the user in the calibration.
The variable probe lengths used in the inspection shall be carried out with a nominal head diameter light ball-end probe. The probes used in the multi-probe inspection are standard, i.e. they shall have the same material, the same probe holder diameter and nominal length: the same probe tip quality. However, the probe lengths may not be exactly the same in the inspection, but variations of 1 mm or % of the nominal length, or even greater, are permitted. ,
Acceptance test or calibration seal, the user can freely choose the configuration of the probe system within the limited range. 6.3 Operating conditions
The coordinate measuring machine should run smoothly, without noise caused by components, and the operating range should meet the requirements. When retrograde calibration and acceptance test, the following procedures should be used as specified in the manufacturer's operating instructions:) Coordinate measuring machine start-up warm-up cycle;
b) Configuration and equipment of the deep probe system:
) Cleaning procedure of the probe needle and the swimming ball:) Calibration of the deep measuring system.
: Before the detection system is calibrated, a new calibration ball with a clear needle is required, which can meet the requirements of the photography or detection of the results -
6.4 Standards
6.4.1 Dimensional physical standards (mother block or step gauge): The shortest length is more than 30mm, the maximum length is 1000mm, and there are five different-sized physical standards with a diagonal of 6% of the small space. The other lengths make the measured lengths uniform: The lengths of the dimensional physical standards should be effectively spread out: When the maximum length cannot reach 60% of the single-band space, you can consider using a supplementary support, 6.1.2 Detection ball
to meet the requirements, select according to needs.
Calibration items and calibration methods
7.1 Coordinate measuring rules of measuring ruler
7.1.1 Avoidance error
7.1.1 Principle
Scanning and measuring ball
Detection ball
Detection ball device
(1 ball)
g10mm~
+30mam
JJE 1864—2004
Requirements and applicable items for measuring balls
Steel: nominal diameter 2mm; use accuracy not less than
HVSM; surface twist exceeding H, not less than
m diameter and shape are calibrated
shape is issued by the company: Table 10 "+" indicates "appropriate", "_" indicates "not applicable". The principle of the calibration method without detection error is The distance between the measuring point and the center of the Gaussian fitting ball is determined to evaluate whether the coordinate measuring machine meets the specified maximum permissible detection error ME. 7.1.1.2 Procedure
() Select the detection ball according to Table 1.
2) Within the permissible limits, the user can arbitrarily select the direction of operation and the installation position of the detection ball. This assumes that the direction of the probe is not parallel to any axis of the coordinate measuring machine. The choice of the detection ball installation strategy can significantly affect the result. (3) Install the test ball. The test ball should be installed firmly to reduce the error of movement. (4) Measure and record 25 points. These points should be evenly distributed on at least half of the test ball: The distribution of the points should be specified by the user. If the user does not specify, it is recommended to use the following depth measurement distribution (see Figure 1): At the pole of the test ball (the point defined by the probe direction): 4 points 22.5 below the pole (evenly distributed): 8 points 45 below the middle point (evenly distributed), relative to the previous set of points Rotate 22.5°: 67.5 points below the pole (evenly distributed), rotate 22.5° relative to the previous group of points: 90° below the pole, that is, 8 points on the equator [evenly distributed], rotate 2.5° relative to the previous group of points. 1.1.3 Processing of measurement results
Use all 25 measurement points to calculate the Gaussian fitting sphere. The 25 measurement points are divided into the calculation Gaussian radius distance R.
The detection error P is the range of 25 Gaussian radii: P= R -Rin
7.1.2 Dimension measurement
7.1.2.1 Principle
JJE 1064—2004
National 1 Measurement Error Distribution of Measurement Points
The calibration method of the eight-inch measuring machine is to evaluate whether the coordinate measuring machine meets the maximum allowable indication error MPE of the specification by comparing the accuracy value and indication value of 5 physical dimensions of different lengths. The 5 physical dimensions are placed in different directions or positions between the measuring objects, and the measurement is performed 3 times. The following procedures are performed:
7.1.2.2 Procedure
(1) Within the allowed limit, the user can select the directions and positions of the five physical dimensions that are not called small physical dimensions.
Method: The measurement may be correct or may be wrong. (2) For all? Repeat the following steps for each position or direction: measure the 5 physical objects three times in each direction or position: measure the outside or inside in both directions. Measure one point on each working end of the standard, and the minimum measurement value is the distance between the two points along the length of the standard.
For the purpose of alignment (determine the length of the standard), an auxiliary measurement is required, which is performed separately for each measurement.1 Fixed multi-axis depth probe detection system error
Fixed multi-axis depth probe detection system shape, size and position error MF, MS, ML shall not exceed the corresponding maximum allowable error (MIEw., MIE, MIE, respectively), the unit is micron. 5.5.2 Universal depth probe system error
Universal probe system shape, size and position error, 4, 1 shall not exceed the corresponding maximum allowable error (PE, MPE, MPE, respectively, the unit is micron. 6 Calibration conditions
6.1 Environmental conditions
6.1.1 Environmental conditions
JJF10642804
Environmental conditions that should be considered, such as the temperature conditions, humidity conditions and vibration conditions that affect the measurement at the installation location, shall be within the user's requirements during calibration and shall be within the user's requirements during verification. During the acceptance test, the user can freely choose the environmental conditions within the permissible limits. 6.1.2 Measurement of ambient temperature
The test environment temperature must be recorded.
During the test, the temperature change and temperature gradient of the environment should be measured and recorded. The measurement points should be no less than 4 points, distributed in different directions and heights.
6.2 Probe system
The detection system matching limit corresponding to the specified maximum permissible error can be considered (probe, probe extension rod, needle lifting space, depth gauge system reorders, etc. These limits are set by the manufacturer in the acceptance test and by the user in the calibration.
The variable probe lengths used in the inspection shall be carried out with a nominal head diameter light ball-end probe. The probes used in the multi-probe inspection are standard, i.e. they shall have the same material, the same probe holder diameter and nominal length: the same probe tip quality. However, the probe lengths may not be exactly the same in the inspection, but variations of 1 mm or % of the nominal length, or even greater, are permitted. ,
Acceptance test or calibration seal, the user can freely choose the configuration of the probe system within the limited range. 6.3 Operating conditions
The coordinate measuring machine should run smoothly, without noise caused by components, and the operating range should meet the requirements. When retrograde calibration and acceptance test, the following procedures should be used as specified in the manufacturer's operating instructions:) Coordinate measuring machine start-up warm-up cycle;
b) Configuration and equipment of the deep probe system:
) Cleaning procedure of the probe needle and the swimming ball:) Calibration of the deep measuring system.
: Before the detection system is calibrated, a new calibration ball with a clear needle is required, which can meet the requirements of the photography or detection of the results -
6.4 Standards
6.4.1 Dimensional physical standards (mother block or step gauge): The shortest length is more than 30mm, the maximum length is 1000mm, and there are five different-sized physical standards with a diagonal of 6% of the small space. The other lengths make the measured lengths uniform: The lengths of the dimensional physical standards should be effectively spread out: When the maximum length cannot reach 60% of the single-band space, you can consider using a supplementary support, 6.1.2 Detection ball
to meet the requirements, select according to needs.
Calibration items and calibration methods
7.1 Coordinate measuring rules of measuring ruler
7.1.1 Avoidance error
7.1.1 Principle
Scanning and measuring ball
Detection ball
Detection ball device
(1 ball)
g10mm~
+30mam
JJE 1864—2004
Requirements and applicable items for measuring balls
Steel: nominal diameter 2mm; use accuracy not less than
HVSM; surface twist exceeding H, not less than
m diameter and shape are calibrated
shape is issued by the company: Table 10 "+" indicates "appropriate", "_" indicates "not applicable". The principle of the calibration method without detection error is The distance between the measuring point and the center of the Gaussian fitting ball is determined to evaluate whether the coordinate measuring machine meets the specified maximum permissible detection error ME. 7.1.1.2 Procedure
() Select the detection ball according to Table 1.
2) Within the permissible limits, the user can arbitrarily select the direction of operation and the installation position of the detection ball. This assumes that the direction of the probe is not parallel to any axis of the coordinate measuring machine. The choice of the detection ball installation strategy can significantly affect the result. (3) Install the test ball. The test ball should be installed firmly to reduce the error of movement. (4) Measure and record 25 points. These points should be evenly distributed on at least half of the test ball: The distribution of the points should be specified by the user. If the user does not specify, it is recommended to use the following depth measurement distribution (see Figure 1): At the pole of the test ball (the point defined by the probe direction): 4 points 22.5 below the pole (evenly distributed): 8 points 45 below the middle point (evenly distributed), relative to the previous set of points Rotate 22.5°: 67.5 points below the pole (evenly distributed), rotate 22.5° relative to the previous group of points: 90° below the pole, that is, 8 points on the equator [evenly distributed], rotate 2.5° relative to the previous group of points. 1.1.3 Processing of measurement results
Use all 25 measurement points to calculate the Gaussian fitting sphere. The 25 measurement points are divided into the calculation Gaussian radius distance R.
The detection error P is the range of 25 Gaussian radii: P= R -Rin
7.1.2 Dimension measurement
7.1.2.1 Principle
JJE 1064—2004
National 1 Measurement Error Distribution of Measurement Points
The calibration method of the eight-inch measuring machine is to evaluate whether the coordinate measuring machine meets the maximum allowable indication error MPE of the specification by comparing the accuracy value and indication value of 5 physical dimensions of different lengths. The 5 physical dimensions are placed in different directions or positions between the measuring objects, and the measurement is performed 3 times. The following procedures are performed:
7.1.2.2 Procedure
(1) Within the allowed limit, the user can select the directions and positions of the five physical dimensions that are not called small physical dimensions.
Method: The measurement may be correct or may be wrong. (2) For all? Repeat the following steps for each position or direction: measure the 5 physical objects three times in each direction or position: measure the outside or inside in both directions. Measure one point on each working end of the standard, and the minimum measurement value is the distance between the two points along the length of the standard.
For the purpose of alignment (determine the length of the standard), an auxiliary measurement is required, which is performed separately for each measurement.1 Fixed multi-axis depth probe detection system error
Fixed multi-axis depth probe detection system shape, size and position error MF, MS, ML shall not exceed the corresponding maximum allowable error (MIEw., MIE, MIE, respectively), the unit is micron. 5.5.2 Universal depth probe system error
Universal probe system shape, size and position error, 4, 1 shall not exceed the corresponding maximum allowable error (PE, MPE, MPE, respectively, the unit is micron. 6 Calibration conditions
6.1 Environmental conditions
6.1.1 Environmental conditions
JJF10642804
Environmental conditions that should be considered, such as the temperature conditions, humidity conditions and vibration conditions that affect the measurement at the installation location, shall be within the user's requirements during calibration and shall be within the user's requirements during verification. During the acceptance test, the user can freely choose the environmental conditions within the permissible limits. 6.1.2 Measurement of ambient temperature
The test environment temperature must be recorded.
During the test, the temperature change and temperature gradient of the environment should be measured and recorded. The measurement points should be no less than 4 points, distributed in different directions and heights.
6.2 Probe system
The detection system matching limit corresponding to the specified maximum permissible error can be considered (probe, probe extension rod, needle lifting space, depth gauge system reorders, etc. These limits are set by the manufacturer in the acceptance test and by the user in the calibration.
The variable probe lengths used in the inspection shall be carried out with a nominal head diameter light ball-end probe. The probes used in the multi-probe inspection are standard, i.e. they shall have the same material, the same probe holder diameter and nominal length: the same probe tip quality. However, the probe lengths may not be exactly the same in the inspection, but variations of 1 mm or % of the nominal length, or even greater, are permitted. ,
Acceptance test or calibration seal, the user can freely choose the configuration of the probe system within the limited range. 6.3 Operating conditions
The coordinate measuring machine should run smoothly, without noise caused by components, and the operating range should meet the requirements. When retrograde calibration and acceptance test, the following procedures should be used as specified in the manufacturer's operating instructions:) Coordinate measuring machine start-up warm-up cycle;
b) Configuration and equipment of the deep probe system:
) Cleaning procedure of the probe needle and the swimming ball:) Calibration of the deep measuring system.
: Before the detection system is calibrated, a new calibration ball with a clear needle is required, which can meet the requirements of the photography or detection of the results -
6.4 Standards
6.4.1 Dimensional physical standards (mother block or step gauge): The shortest length is more than 30mm, the maximum length is 1000mm, and there are five different-sized physical standards with a diagonal of 6% of the small space. The other lengths make the measured lengths uniform: The lengths of the dimensional physical standards should be effectively spread out: When the maximum length cannot reach 60% of the single-band space, you can consider using a supplementary support, 6.1.2 Detection ball
to meet the requirements, select according to needs.
Calibration items and calibration methods
7.1 Coordinate measuring rules of measuring ruler
7.1.1 Avoidance error
7.1.1 Principle
Scanning and measuring ball
Detection ball
Detection ball device
(1 ball)
g10mm~
+30mam
JJE 1864—2004
Requirements and applicable items for measuring balls
Steel: nominal diameter 2mm; use accuracy not less than
HVSM; surface twist exceeding H, not less than
m diameter and shape are calibrated
shape is issued by the company: Table 10 "+" indicates "appropriate", "_" indicates "not applicable". The principle of the calibration method without detection error is The distance between the measuring point and the center of the Gaussian fitting ball is determined to evaluate whether the coordinate measuring machine meets the specified maximum permissible detection error ME. 7.1.1.2 Procedure
() Select the detection ball according to Table 1.
2) Within the permissible limits, the user can arbitrarily select the direction of operation and the installation position of the detection ball. This assumes that the direction of the probe is not parallel to any axis of the coordinate measuring machine. The choice of the detection ball installation strategy can significantly affect the result. (3) Install the test ball. The test ball should be installed firmly to reduce the error of movement. (4) Measure and record 25 points. These points should be evenly distributed on at least half of the test ball: The distribution of the points should be specified by the user. If the user does not specify, it is recommended to use the following depth measurement distribution (see Figure 1): At the pole of the test ball (the point defined by the probe direction): 4 points 22.5 below the pole (evenly distributed): 8 points 45 below the middle point (evenly distributed), relative to the previous set of points Rotate 22.5°: 67.5 points below the pole (evenly distributed), rotate 22.5° relative to the previous group of points: 90° below the pole, that is, 8 points on the equator [evenly distributed], rotate 2.5° relative to the previous group of points. 1.1.3 Processing of measurement results
Use all 25 measurement points to calculate the Gaussian fitting sphere. The 25 measurement points are divided into the calculation Gaussian radius distance R.
The detection error P is the range of 25 Gaussian radii: P= R -Rin
7.1.2 Dimension measurement
7.1.2.1 Principle
JJE 1064—2004
National 1 Measurement Error Distribution of Measurement Points
The calibration method of the eight-inch measuring machine is to evaluate whether the coordinate measuring machine meets the maximum allowable indication error MPE of the specification by comparing the accuracy value and indication value of 5 physical dimensions of different lengths. The 5 physical dimensions are placed in different directions or positions between the measuring objects, and the measurement is performed 3 times. The following procedures are performed:
7.1.2.2 Procedure
(1) Within the allowed limit, the user can select the directions and positions of the five physical dimensions that are not called small physical dimensions.
Method: The measurement may be correct or may be wrong. (2) For all? Repeat the following steps for each position or direction: measure the 5 physical objects three times in each direction or direction: measure the outside or inside in both directions. Measure one point on each working end of the standard, and the minimum measurement value is the distance between the two points along the length of the standard.
For the purpose of alignment (determine the length of the standard), an auxiliary measurement is required, which is performed separately for each measurement.3 Operating conditions
The coordinate measuring machine should run smoothly, without any noise caused by components, and the operating range should meet the requirements. When retrograde calibration and collection measurement, the following procedures should be carried out as specified in the manufacturer's operating instructions: a) Coordinate measuring machine start-up warm-up cycle; b) Configuration and equipment of the deep probe system; c) Cleaning procedure of the probe needle and the standard ball; d) Calibration of the deep measuring system.
: Before the detection system is calibrated, a new calibration ball with a clear needle is required, which can meet the requirements of the photography or detection of the results -
6.4 Standards
6.4.1 Dimensional physical standards (mother block or step gauge): The shortest length is more than 30mm, the maximum length is 1000mm, and there are five different-sized physical standards with a diagonal of 6% of the small space. The other lengths make the measured lengths uniform: The lengths of the dimensional physical standards should be effectively spread out: When the maximum length cannot reach 60% of the single-band space, you can consider using a supplementary support, 6.1.2 Detection ball
to meet the requirements, select according to needs.
Calibration items and calibration methods
7.1 Coordinate measuring rules of measuring ruler
7.1.1 Avoidance error
7.1.1 Principle
Scanning and measuring ball
Detection ball
Detection ball device
(1 ball)
g10mm~
+30mam
JJE 1864—2004
Requirements and applicable items for measuring balls
Steel: nominal diameter 2mm; use accuracy not less than
HVSM; surface twist exceeding H, not less than
m diameter and shape are calibrated
shape is issued by the company: Table 10 "+" indicates "appropriate", "_" indicates "not applicable". The principle of the calibration method without detection error is The distance between the measuring point and the center of the Gaussian fitting ball is determined to evaluate whether the coordinate measuring machine meets the specified maximum permissible detection error ME. 7.1.1.2 Procedure
() Select the detection ball according to Table 1.
2) Within the permissible limits, the user can arbitrarily select the direction of operation and the installation position of the detection ball. This assumes that the direction of the probe is not parallel to any axis of the coordinate measuring machine. The choice of the detection ball installation strategy can significantly affect the result. (3) Install the test ball. The test ball should be installed firmly to reduce the error of movement. (4) Measure and record 25 points. These points should be evenly distributed on at least half of the test ball: The distribution of the points should be specified by the user. If the user does not specify, it is recommended to use the following depth measurement distribution (see Figure 1): At the pole of the test ball (the point defined by the probe direction): 4 points 22.5 below the pole (evenly distributed): 8 points 45 below the middle point (evenly distributed), relative to the previous set of points Rotate 22.5°: 67.5 points below the pole (evenly distributed), rotate 22.5° relative to the previous group of points: 90° below the pole, that is, 8 points on the equator [evenly distributed], rotate 2.5° relative to the previous group of points. 1.1.3 Processing of measurement results
Use all 25 measurement points to calculate the Gaussian fitting sphere. The 25 measurement points are divided into the calculation Gaussian radius distance R.
The detection error P is the range of 25 Gaussian radii: P= R -Rin
7.1.2 Dimension measurement
7.1.2.1 Principle
JJE 1064—2004
National 1 Measurement Error Distribution of Measurement Points
The calibration method of the eight-inch measuring machine is to evaluate whether the coordinate measuring machine meets the maximum allowable indication error MPE of the specification by comparing the accuracy value and indication value of 5 physical dimensions of different lengths. The 5 physical dimensions are placed in different directions or positions between the measuring objects, and the measurement is performed 3 times. The following procedures are performed:
7.1.2.2 Procedure
(1) Within the allowed limit, the user can select the directions and positions of the five physical dimensions that are not called small physical dimensions.
Method: The measurement may be correct or may be wrong. (2) For all? Repeat the following steps for each position or direction: measure the 5 physical objects three times in each direction or position: measure the outside or inside in both directions. Measure one point on each working end of the standard, and the minimum measurement value is the distance between the two points along the length of the standard.
For the purpose of alignment (determine the length of the standard), an auxiliary measurement is required, which is performed separately for each measurement.3 Operating conditions
The coordinate measuring machine should run smoothly, without any noise caused by components, and the operating range should meet the requirements. When retrograde calibration and collection measurement, the following procedures should be carried out as specified in the manufacturer's operating instructions: a) Coordinate measuring machine start-up warm-up cycle; b) Configuration and equipment of the deep probe system; c) Cleaning procedure of the probe needle and the standard ball; d) Calibration of the deep measuring system.
: Before the detection system is calibrated, a new calibration ball with a clear needle is required, which can meet the requirements of the photography or detection of the results -
6.4 Standards
6.4.1 Dimensional physical standards (mother block or step gauge): The shortest length is more than 30mm, the maximum length is 1000mm, and there are five different-sized physical standards with a diagonal of 6% of the small space. The other lengths make the measured lengths uniform: The lengths of the dimensional physical standards should be effectively spread out: When the maximum length cannot reach 60% of the single-band space, you can consider using a supplementary support, 6.1.2 Detection ball
to meet the requirements, select according to needs.
Calibration items and calibration methods
7.1 Coordinate measuring rules of measuring ruler
7.1.1 Avoidance error
7.1.1 Principle
Scanning and measuring ball
Detection ball
Detection ball device
(1 ball)
g10mm~
+30mam
JJE 1864—2004
Requirements and applicable items for measuring balls
Steel: nominal diameter 2mm; use accuracy not less than
HVSM; surface twist exceeding H, not less than
m diameter and shape are calibrated
shape is issued by the company: Table 10 "+" indicates "appropriate", "_" indicates "not applicable". The principle of the calibration method without detection error is The distance between the measuring point and the center of the Gaussian fitting ball is determined to evaluate whether the coordinate measuring machine meets the specified maximum permissible detection error ME. 7.1.1.2 Procedure
() Select the detection ball according to Table 1.
2) Within the permissible limits, the user can arbitrarily select the direction of operation and the installation position of the detection ball. This assumes that the direction of the probe is not parallel to any axis of the coordinate measuring machine. The choice of the detection ball installation strategy can significantly affect the result. (3) Install the test ball. The test ball should be installed firmly to reduce the error of movement. (4) Measure and record 25 points. These points should be evenly distributed on at least half of the test ball: The distribution of the points should be specified by the user. If the user does not specify, it is recommended to use the following depth measurement distribution (see Figure 1): At the pole of the test ball (the point defined by the probe direction): 4 points 22.5 below the pole (evenly distributed): 8 points 45 below the middle point (evenly distributed), relative to the previous set of points Rotate 22.5°: 67.5 points below the pole (evenly distributed), rotate 22.5° relative to the previous group of points: 90° below the pole, that is, 8 points on the equator [evenly distributed], rotate 2.5° relative to the previous group of points. 1.1.3 Processing of measurement results
Use all 25 measurement points to calculate the Gaussian fitting sphere. The 25 measurement points are divided into the calculation Gaussian radius distance R.
The detection error P is the range of 25 Gaussian radii: P= R -Rin
7.1.2 Dimension measurement
7.1.2.1 Principle
JJE 1064—2004
National 1 Measurement Error Distribution of Measurement Points
The calibration method of the eight-inch measuring machine is to evaluate whether the coordinate measuring machine meets the maximum allowable indication error MPE of the specification by comparing the accuracy value and indication value of 5 physical dimensions of different lengths. The 5 physical dimensions are placed in different directions or positions between the measuring objects, and the measurement is performed 3 times. The following procedures are performed:
7.1.2.2 Procedure
(1)
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