SJ 20811-2002 General specification for piezoresistive accelerometers
Some standard content:
Military Standard of the Electronic Industry of the People's Republic of China FL5911
SJ20811--2002
General specification of piezoresistive acceleration sensors Issued on 2002-01-31
Implemented on 2002-05-01
Approved by the Ministry of Information Industry of the People's Republic of China 1 Scope
Military Standard of the Electronic Industry of the People's Republic of China General specification of piezoresist acceleration sensors
General specification of piezoresist acceleration sensorsSJ20811-2002
1.1 Subject Content
This specification specifies the general requirements, quality assurance provisions, test methods, and packaging, storage, and transportation requirements for piezoresistive acceleration sensors.
1.2 Scope of Application
This specification applies to the development, production, and procurement of piezoresistive acceleration sensors (hereinafter referred to as sensors). 2 References
GB191--90 Packaging, storage and transportation diagram and marking
GB7665-87
General terminology for sensors
Sensor naming method and code
GB7656-87
GJB150.3-86 Environmental test method for military equipment High temperature test GJB150.4--86 Environmental test method for military equipment Low temperature test GJB179A-96 Counting sampling inspection procedures and tables GJB360A-96 Test methods for electronic and electrical components GJB2712-96 Quality assurance requirements for measuring equipment Metrological confirmation system 3 Requirements
3.1 Product specificationsbzxz.net
The specific requirements for sensors shall comply with the provisions of this specification and the corresponding detailed specifications. If the requirements of this specification are inconsistent with those of the detailed specifications, the detailed specifications shall prevail. 3.2 Qualification
The sensors submitted in accordance with this specification shall be qualified products or approved products. 3.3 Appearance and installation dimensions
The appearance and installation dimensions of the sensors shall comply with the requirements of the detailed specifications. 3.4 Electrical connection
The electrical connection of the sensors shall comply with the requirements of the detailed specifications. 3.5 Excitation power supply
The excitation power supply of the sensors shall comply with the requirements of the detailed specifications. 3.6 Operating temperature
FiKAoNiiKAca issued by the Ministry of Information Industry of the People's Republic of China on January 31, 2002
Implementation on May 1, 2002
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The operating temperature of the sensors shall comply with the requirements of the detailed specifications. 3.7 Measuring range
After the test in accordance with 4.6.8, the measuring range of the sensors shall comply with the requirements of the detailed specifications. 3.8 Zero output
After the test in accordance with 4.6.6, the zero output of the sensor shall comply with the requirements of the detailed specification. 3.9 Sensitivity
After the test in accordance with 4.6.7, the sensitivity of the sensor shall comply with the requirements of the detailed specification. 3.10 Nonlinearity
After the test in accordance with 4.6.8, the nonlinearity of the sensor shall comply with the requirements of the detailed specification. 3.11 Transverse sensitivity ratio
After the test in accordance with 4.6.9, the transverse sensitivity ratio of the sensor shall comply with the requirements of the detailed specification. 3.12 Zero drift
After the test in accordance with 4.6.10, the zero drift of the sensor shall comply with the requirements of the detailed specification. 3.13 Thermal zero drift
After the test in accordance with 4.6.11, the thermal zero drift of the sensor shall comply with the requirements of the detailed specification. 3.14 Thermal sensitivity drift
After the test in accordance with 4.6.12, the thermal sensitivity drift of the sensor shall comply with the requirements of the detailed specification. 3.15 Insulation resistance
After the test according to 4.6.5, when a DC voltage of 100±10%V is applied, the insulation resistance of the sensor shall not be less than 100MQ3.16 Frequency response
After the test according to 4.6.13, the frequency response of the sensor shall meet the requirements of the detailed specifications. 3.17 High temperature storage
After the test according to 4.6.14, the appearance of the sensor shall meet the requirements of 3.25: the zero output of the sensor shall meet the requirements of the detailed specifications. 3.18 Low temperature storage
After the test according to 4.6.15, the appearance of the sensor shall meet the requirements of 3.25: the zero output of the sensor shall meet the requirements of the detailed specifications. 3.19 Temperature shock
After the test according to 4.6.16, the appearance of the sensor shall meet the requirements of 3.25; the zero output of the sensor shall meet the requirements of the detailed specifications. 3.20 Shock (specified pulse)
After the test according to 4.6.17, the appearance of the sensor shall meet the requirements of 3.25: the zero output of the sensor shall meet the requirements of the detailed specification. 3.21 Vibration
After the test according to 4.6.18, the appearance of the sensor shall meet the requirements of 3.25. The zero output of the sensor shall meet the requirements of the detailed specification. 3.22 Steady state damp heat
After the test according to 4.6.19, the appearance of the sensor shall meet the requirements of 3.25: the insulation resistance of the sensor shall meet the requirements of the detailed specification. 3.23 Quality
The quality of the sensor shall meet the requirements of the detailed specification. 3.24 Marking
The nameplate of the sensor shall indicate the following information: Model specification:
b. Name:
c. Measurement range;
d. Name and trademark of the contractor:
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e. Factory number.
The sensor housing shall be marked in the order of the above information. If the sensor is small, only items a and . may be marked. Other information may be marked on the card.
3.25 Appearance
The appearance of the sensor shall be free of cracks and scratches: The marking shall be clear, complete and accurate. 4 Quality Assurance Provisions
4.1 Inspection Responsibilities
The contractor shall be responsible for completing all inspections specified in this specification and detailed specifications (unless otherwise specified in the contract or order). The contractor must use equipment that can complete the inspection requirements of this specification and is approved by the appraisal agency (unless otherwise specified in the contract or order). When necessary, the user or the signing organization has the right to supervise or personally implement the inspection of any inspection item specified in this specification or detailed specifications to ensure that the supply and service meet the specified requirements.
4.1.1 Responsibility for Conformity
All products must meet all requirements of Chapter 3 and Chapter 5 of this specification. The inspection specified in this specification shall become an integral part of the contractor's entire inspection system or quality assurance program. If the contract includes inspection requirements not specified in this specification, the contractor shall also ensure that the products submitted for acceptance meet the contract requirements. Quality consistency inspection sampling does not allow the submission of products that are known to be defective, nor can the user be required to accept defective products.
4.1.2 Test equipment and inspection devices
The contractor shall establish and maintain the necessary test equipment, measuring equipment and inspection devices with the accuracy, quality and quantity required to meet the product requirements in order to carry out the required inspections. At the same time, in order to control the accuracy of measuring and test equipment, the contractor shall establish and maintain its metrological calibration system in accordance with GJB2712.
4.2 Inspection classification
The inspections specified in this specification are divided into:
a. Identification inspection;
b. Quality consistency inspection.
4.3 Inspection conditions
Unless otherwise specified in the detailed specifications, all inspections shall be carried out under the standard atmospheric conditions of the test specified in 4.1.1 of GJB360A: temperature: 15°℃~35°C;
Relative humidity: 20%~80%:
Air pressure: 86~106kPa.
4.4 Identification inspection
Identification inspection shall be carried out in a laboratory approved by the identification agency. 4.4.1 Samples
The samples submitted for identification inspection shall be taken from the production line, and these samples shall be produced by the equipment and processes normally used in production. The number of samples shall not be less than 3.
4.4.2 Inspection Procedure
Identification inspection shall be carried out according to the items and sequence specified in Table 1. KAoNiKAca
4.4.3 Unqualified
Appearance and installation dimensions
Measuring range
Zero output
Sensitivity
Non-linearity
Transverse sensitivity ratio
Equipoint source shift
Thermal zero drift
Thermal sensitivity source shift
Insulator resistance
Frequency response
High temperature storage
Low temperature storage
Temperature shock
Shock (specified pulse)
Steady-state damp heat
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Table 1 Identification and inspection
Requirement clauses
Method clauses
If any sample fails to meet the specified requirements, the identification and inspection will be invalid and the identification approval cannot be given. 4.4.4 Retention of Qualification
To maintain the qualification of the product, the contractor shall submit a summary of the quality consistency test report to the certification body every 12 months. The summary report shall be submitted within 30 days after the end of each 12-month cycle as the basis for maintaining the qualification. The certification body has specified the starting report date. The report shall include the following: a Summary of the test results of the Group A batch inspection that has been conducted, which shall at least indicate the number of qualified batches, the number of unqualified batches and the group to which the unqualified products belong. The test results of all repair batches shall be marked and the reasons shall be stated; the summary of the test results of the Group C periodic inspection that has been conducted shall include the number of failures and failure modes. The summary shall include the test results of all periodic inspections conducted and completed within 12b.
months. If the test result summary indicates that the product does not meet the requirements of the specification and corrective measures approved by the certification body are not taken, the unqualified product will be removed from the catalog of qualified products. Failure to submit the report within 60 days after the end of each 12-month cycle. The product may lose its qualification for certification. In addition to submitting inspection data regularly, at any time within a 12-month period, if the inspection data shows that the qualified products that meet the requirements of this specification are invalid, the contractor shall immediately report to the certification body. If there is no production within the reporting period, a report shall be submitted to prove that the contractor still has the necessary capabilities and equipment to produce such products. If there is still no production within two reporting periods, according to the decision of the certification body, the contractor may be required to provide products for inspection in accordance with the 4
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Identification inspection requirements and explain the reasons for non-production. 4.5 Quality consistency inspection
Quality consistency inspection consists of three groups: A, B, and C. Group A and B inspections are batch inspections, and Group C inspections are periodic inspections. 4.5.1 Batch inspection
Batch inspection of sensors shall consist of two groups of inspections, A and B. Batch inspection is the product delivery inspection. 4.5.1.1 Inspection lot
An inspection lot shall consist of all products of the same model produced under basically the same conditions and submitted for inspection within a one-month period.
4.5.1.2 Group A inspection
4.5.1.2.1 Group A inspection shall be carried out according to the items and sequence specified in Table 2. Group A inspection shall be carried out 100%. If any item of a product fails to meet the requirements, the product shall be judged as unqualified and shall be rejected. The rejection rate shall not exceed 10%. Table 2 Group A inspection
Appearance and installation dimensions
Zero output
Sensitivity
Transverse sensitivity ratio
Zero drift
Thermal zero source shift
Insulation resistance
Frequency response
Requirement clause
Method clause
4.5.1.2.2 Rejected batch
If an inspection batch is rejected, the contractor may return the batch of products to correct its defects or eliminate defective products and resubmit them for re-inspection. The resubmitted batches shall be inspected using a stricter inspection sampling plan. These batches shall be distinguished from new batches and clearly marked as resubmitted batches.
4.5.1.3 Group B inspection
Group B inspection shall be carried out by the items and sequence specified in Table 3. 4.5.1.3.1
Table 3 Group B Inspection
Measurement Range
Nonlinearity
Thermal Sensitivity Drift
Requirement Clause
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Method Clause
4.5.1.3.2 Sampling Plan
SJ20811—2002
Samples for Group B inspection shall be randomly selected from the qualified products of Group A inspection and shall be inspected according to the normal sampling plan of the general inspection level IⅡI of GJBI79A, and the acceptable quality level (AQL) is 2.5.4.5.1.3.3 Rejected Lot
If an inspection lot is rejected, the contractor may repair the lot to correct its defects or remove the defective products and resubmit it for re-inspection. The resubmitted lot shall be inspected using a tightened inspection sampling plan. These batches should be distinguished from new batches and clearly marked as resubmitted batches.
4.5.1.3.4 Sample processing
If the inspection batch is accepted, the samples that have passed the Group B inspection and are still within the specified range can be delivered according to the contract or order. 4.5.2 Periodic inspection
The periodic inspection should consist of the Group C inspection. Products that have passed the Group A and Group B inspections should not be delayed for delivery until the results of the periodic inspection are obtained. If the results of the periodic inspection indicate unqualified, it should be handled in accordance with 4.5.2.5. 4.5.2.1 Group C inspection
Group C inspection shall be carried out according to the items and sequence specified in Table 4. Table 4 Group C test
4.5.2.2 Sampling plan
Storage at commercial temperature
Low temperature storage
Temperature shock
Shock (specified pulse)
Steady-state damp heat
Requirement clause
Method clause
Group C test shall be carried out on samples taken from each inspection batch that has passed Group A and Group B tests, and the number of samples shall not be less than 3. For continuous batch production, a periodic inspection shall be carried out once a year. 4.5.2.3 Failure
If a sample has one or more items that fail to meet the requirements, the Group C test shall be deemed invalid. 4.5.2.4 Sample handling
Samples that have been subjected to Group C test shall not be delivered according to the contract or order. 4.5.2.5 Non-conformity
If a sample fails the Group C test, the contractor shall report the failure to the certification body and the relevant competent authorities and take corrective action on the material or process or both, depending on the cause of the non-conformity, and, if deemed appropriate, take corrective action on all products made with substantially the same materials and processes, under substantially the same conditions, and deemed to have suffered the same failure and can be repaired. Acceptance and delivery of products shall be suspended until corrective action approved by the certification body is taken. After corrective action is taken, the additional samples shall be re-tested with Group C (either all items or the items that failed in the original sample at the discretion of the certification body). At the same time, Group A inspection may be restarted, but final acceptance and delivery shall not be made until the Group C re-test shows that the corrective action is successful. If failure still occurs after re-testing, the relevant failure information shall be provided to the certification body and the relevant competent authorities. 6
4.5.3 Packaging inspection
SJ20811-2002
, the packaging of the sensor shall comply with the provisions of Chapter 5 of this specification or the detailed specifications. 4.6 Inspection method
4.6.1 Appearance and installation dimensions
Use a vernier caliper or a plate gauge to check the appearance and installation dimensions of the sensor, and the results shall meet the requirements of 3.3. 4.6.2 Mass plate
Use a balance to weigh the mass of the sensor, and the results shall meet the requirements of 3.23. 4.6.3 Marking
Use visual inspection to check the marking of the sensor, and the results shall meet the requirements of 3.24. 4.6.4 Appearance
Use visual inspection to check the appearance of the sensor, and the results shall meet the requirements of 3.25. 4.6.5 Insulation resistance
The insulation resistance test of the sensor shall be carried out according to the test method specified in GJB360A method 302. Under the standard atmospheric conditions of the test, measure the insulation resistance between each lead and the sensor housing or cable shielding wire. The result shall meet the requirements of 3.15. 4.6.6 Zero output
Under the standard atmospheric conditions of the test, connect the test system according to 3.4, power it according to the excitation power supply in 3.6, preheat it for 30 minutes, and measure the output value of the sensor without load. The result shall meet the requirements of 3.8. 4.6.7 Sensitivity
Under the standard atmospheric conditions of the test, fix the standard acceleration sensor and the sensor to be tested back to back on the calibration table, with the sensitive axes of the standard acceleration sensor and the sensor to be tested coincident and parallel to the reporting direction. Then power on the entire system of the sensor and the calibration table for preheating for 30 minutes, adjust the acceleration value generated by the calibration table within the measurement range specified by the sensor, and record the output voltage or voltage ratio of the standard acceleration sensor and the sensor to be tested. The sensitivity of the sensor to be tested is calculated as follows: SzxSs
Where: Ss--calibration coefficient of the secondary standard acceleration sensor, mVl (m/s\): Us
output of the primary standard acceleration sensor, mV: Uz output of the sensor to be tested, mV.
The result should meet the requirements of 3.9.
4.6.8 Measuring range, nonlinearity
Under the standard atmospheric conditions of the test, fix the standard acceleration sensor and the sensor to be measured back to back on the calibration table, with the sensitive axes of the standard acceleration sensor and the sensor to be measured coincident and parallel to the vibration direction. Then power on the sensor and the entire calibration table system for preheating for 30 minutes. Adjust the acceleration value generated by the calibration table within the measurement range specified by the sensor (including the maximum value). Start loading from the measurement lower limit of the sensor to the measurement upper limit of the sensor. There should be no less than six measuring points, and record the indicated values. Then calculate the nonlinear error according to the following method.
First calculate the average value S of the sensitivity Sz of the i-th (i=1, 2.n, n≥6) test point: S=ZS/n
Then calculate the nonlinear error & of each test point as follows: =(S-Sz)/Sx100%.
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Find the maximum value in &, which is the nonlinearity of the measurement system. The result should meet the requirements of 3.5 and 3.10. 4.6.9 Lateral sensitivity ratio
The lateral sensitivity ratio test error caused by the lateral calibration device and fixture is required to be no more than 0.5%. Connect the test system according to 3.4, power it according to the excitation power supply in 3.6, preheat it for 30 minutes, install the sensor under test and the standard accelerometer on the table of the transverse calibration device, with the sensitive axis of the sensor under test perpendicular to the perturbation direction and the standard accelerometer parallel to the vibration direction, apply the acceleration value within the measurement range, record the output of the sensor under test and the output of the standard accelerometer, calculate the transverse sensitivity of the sensor according to formula (1), and the transverse sensitivity ratio TSR of the sensor is calculated as follows: STm×100%
Where: STm—transverse sensitivity of the sensor under test, mVi (m/s\): Sz—sensitivity of the sensor under test, mV/(m/s)4.6.10 Zero drift
Under the standard atmospheric conditions of the test, power on the sensor and preheat it for 30 minutes, and measure the zero output of the sensor. Read it every 30 minutes, and read it continuously for 2 hours (5 times in total). The zero drift of the sensor is calculated as follows:
×100%
The maximum difference in zero output, mV;
Where: AUomax
Urs——Full scale output of the measured axis, mV. UFs=A/ Sz.
Where: A——The measuring range of the sensor, m/s2. The result should meet the requirements of 3.12.
4.6.11 Thermal zero drift
Put the measured sensor in a high and low temperature constant temperature box, keep it at room temperature, upper limit temperature, and lower limit temperature for 1 hour respectively, and measure the zero output value of the sensitive axis at the above temperatures after reaching equilibrium. The thermal zero drift is calculated as follows:
UFs·(T,-T)
Where: T—room temperature, ℃
T2 is the upper or lower temperature, ℃C; UT1—the zero output of the measured axis at T, mV; UT2—the zero output of the measured axis at T2, mV. x100%
According to the above formula, the thermal zero drift αc and αp of the sensitive axis in the high and low temperature ranges are calculated. The results should meet the requirements of 3.13. 4.6.12 Thermal sensitivity drift
The standard accelerometer is installed on the calibration table in a room temperature constant temperature environment. The sensor under test is placed in a high and low temperature constant temperature 8
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box through a connecting rod. It is kept at room temperature, upper temperature, and lower temperature for 1 hour respectively. After reaching thermal equilibrium, the sensitivity of the measured axis at the above temperatures is measured.
Thermal sensitivity drift is calculated as follows:
S., (T, -T,)
Wherein: T is room temperature, C;
T2 is the upper limit temperature or lower limit temperature, C: 100%
ST1 is the sensitivity of the measured axis at room temperature T, mV/(m/s)SI
is the sensitivity of the measured axis at the upper limit temperature or lower limit temperature, inV(m/s). (8
Calculate the thermal sensitivity drift β of the upper or lower temperature limit according to formula (8), and test the thermal sensitivity drift of the sensitive axis respectively. The results should meet the requirements of 3.14. 4.6.13 Frequency response
Firmly install the sensor under test on the calibration table with the sensitive axis perpendicular to the mounting table. Connect the system and preheat for 3 minutes. Sweep the vibration table upward at a constant acceleration within the measurement range, from the lower frequency limit to the upper frequency limit. On the amplitude-frequency characteristic curve drawn by the level recorder, find the two frequency points where the amplitude changes to -3dB (the -3dB point can also be found manually according to actual conditions). The frequency range between these two frequency points is the frequency response range of the sensor. The test results should meet the requirements of 3.16. 4.6.14 High temperature storage
According to The test method specified in GJB150.3 shall be carried out under the following conditions: Lower limit temperature: 70°C, 85°C, 100°C. Holding time: 48h
After the test, recover for 2h and then test. The result shall meet the requirements of 3.17. 4.6.15 Low temperature storage
Perform the test method specified in GJB150.4 and one of the following conditions: Upper limit temperature: -55°C, -40°C, -25°C Holding time: 24h
After the test, recover for 2h and then test. The result shall meet the requirements of 3.18. 4.6.16 Temperature shock
Perform the test method specified in GJB360A Method 107 and one of the following conditions: Extreme temperature: respectively from the upper limit temperature and lower limit specified in 4.6.14 and 4.6.15 of this specification. Select from the temperature. Minimum test time at extreme temperature: According to the weight of the test sample, perform in accordance with the provisions of the detailed specifications. Conversion time: no more than 5min
Number of cycles: 5 times
After the test, recover for 2h for testing, and the result should meet the requirements of 3.19. 4.6.17 Shock (specified pulse)
Perform according to the test method specified in GJB360A Method 213 and the provisions of the detailed specifications. After the test, the results should meet the requirements of 3.20. 4.6.18 Vibration
Perform according to the test method specified in GJB360A Method 204 and GJB360A Method 214 and the provisions of the detailed specifications. 9
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After the test, the results should meet the requirements of 3.21. 4.6. 19 Steady-state damp heat
SJ20811—2002
Perform the test method specified in GJB360A Method 103 and the following conditions: Temperature: 40±2℃
Relative humidity: 90%~95%
Test time: 96h
After the test, the result should meet the requirements of 3.22. 5 Delivery preparation
The sensor should have a special packaging box, which should be lightning-proof. The packaging box should contain a certificate of conformity and instruction manual. The packaging box should be sealed and marked with:
a. Name or trademark of the manufacturer;
b. Product name, model and number:
c. Inspection date and inspector's seal;
d. Packing date and packaging seal:
e. Detailed specification number.
5.2 Storage
The sensor should be stored in a ventilated warehouse without the influence of corrosive gas with an ambient temperature of -10°C to 40°C and a relative humidity of no more than 80%.
5.3 Transportation
The sensor should be transported in a sturdy packaging box, and the outside of the box should be marked with words or signs such as "Handle with care" and "Afraid of moisture" in accordance with GB191. The packaging box containing the product can be transported by any means, and direct rain, snow and mechanical impact should be avoided during transportation. Notes
6.1 Intended use
Sensors that comply with this specification are used for the measurement and control of acceleration in military weapons and equipment. 6.2 Contents of order documents
The following contents should be included in the contract or order: 8. Name and number of this specification:
b Quantity;
c.Special packaging and transportation requirements:
d. Other requirements.
6.3 Definitions
The definitions used in this specification shall comply with the provisions of GB7665. 6.4 Model naming
The model naming of products developed and produced in accordance with this specification shall comply with the provisions of GB7666. 10
Additional instructions:
SJ20811-2002
This specification is under the jurisdiction of the Fourth Institute of Electronics of the Ministry of Information Industry. This specification was drafted by the 49th Institute of Electronics of the Ministry of Information Industry. Drafters of this specification: Qian Jingbo, Wu Yalin, Li Huimin. Project code: B91018.
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