Basic Information

Standard ID: GB/T 15862-1995

Standard Name: General technical requirements for ion implanters

Chinese Name: 离子注入机通用技术条件

Standard category:National Standard (GB)

state:in force

Date of Release1995-01-02

Date of Implementation:1996-08-01

standard classification number

Standard ICS number:Electronics>>31.200 Integrated Circuits, Microelectronics

Standard Classification Number:Electronic Components and Information Technology>>Electronic Industry Production Equipment>>L97 Processing Equipment

associated standards

Publication information

publishing house:China Standards Press

other information

Release date:1995-12-22

Review date:2004-10-14

Drafting unit:The 48th Research Institute of the Ministry of Electronics Industry

Focal point unit:Ministry of Information Industry (Electronics)

Publishing department:State Bureau of Technical Supervision

competent authority:Ministry of Information Industry (Electronics)

Introduction to standards: