GB/T 15871-1995 Hard surface photomask substrate

Basic Information

Standard ID: GB/T 15871-1995

Standard Name: Hard surface photomask substrate

Chinese Name: 硬面光掩模基板

Standard category:National Standard (GB)

state:in force

Date of Release1995-01-02

Date of Implementation:1996-08-01

standard classification number

Standard ICS number:31.030

Standard Classification Number:Electronic Components and Information Technology>>Electronic Industry Production Equipment>>L97 Processing Equipment

associated standards

Procurement status:SEMI P1-1992, NEQ

Publication information

publishing house:China Standards Press

Publication date:1996-08-01

other information

Release date:1995-12-22

Review date:2004-10-14

Drafting unit:Changsha Shaoguang Microelectronics Corporation

Focal point unit:National Technical Committee for Standardization of Semiconductor Materials and Equipment

Publishing department:State Bureau of Technical Supervision

competent authority:National Standardization Administration

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Introduction to standards:

This standard specifies the requirements, test methods, inspection rules, etc. for glass substrates used in hard-surface photomasks. This standard applies to glass substrates used in hard-surface photomasks. GB/T 15871-1995 Hard-surface photomask substrates GB/T15871-1995 Standard download decompression password: www.bzxz.net