SJ/T 10454-1993 Dielectric slurry for thick film hybrid integrated circuit multilayer wiring SJ/T10454-1993 standard download decompression password: www.bzxz.net

Electronic Industry Standard of the People's Republic of China
SJ/T10454-93
Dielectric paste for maltilayer lay ont ofthick film hybrid integraled circuits1993-12-17 Issued
Implemented on 1994-06-01
Issued by the Ministry of Electronics Industry of the People's Republic of China Electronic Industry Standard of the People's Republic of China
Dielectric paste for maltilayer lay ont ofthick film hybrid integrated circuits clrcuits1 Subject content and scope of use
1.1 Subject content
S/T10454-93
This standard specifies the technical requirements, test methods, particle size distribution, packaging, storage and transportation of thick mixed circuit dielectric paste (hereinafter referred to as paste) for multi-layer wiring. 1.2 Applicable scope
This standard is used for dielectric paste for thick mixed circuit multi-layer wiring that matches gold and dense conductor paste. 2 Reference standards
G32421
GB2423.23
3 Technical requirements
3.1 Paste properties
Basic environmental test procedures for electronic products General provisions Basic environmental test procedures for electronic products Test: High temperature test method Electrical product basic environmental test procedures Test: Temperature change test method The properties of the paste shall comply with the provisions in the table above.
Table 1 Material properties
3.2 Technical properties
The properties of the paste shall comply with the provisions in Table 2. The dielectric material is uniform blue, with a color of 1.50--250. The Ministry of Electronics Industry of the People's Republic of China approved it on December 17, 1993. Pirs implemented it on June 1, 1994. 4 Test method: Through hole separation to calculate external electric current number, external quality loss tangent value, and voltage-free! Environmental test after the electric
breakdown voltage
sintered film thickness
4.1 Environmental conditions
SJ/T10454-93
polymer film properties
medium surface flat combustion equipment, no light
41 -5u
10 original)
Except for and without stipulation, all test ends should be in the normal atmospheric conditions specified in "24ZV" (humidity 15 ~ 35 death, relative intensity 45%). ~75%, gas jade 86~106kP. 4.2 Product preparation
Special core dielectric slurry working characteristics and dielectric performance test samples should be made according to the conventional original waist multi-layer wiring process, the test diagram is shown in Figure 1 and Figure 2.
Upper conductor
96% single-layer film
Figure 1 Film performance test shape
Upper and lower conductors are silver-plated conductors or square conductors: ± Film size: 51 mm×2.5mm
Both strip dimensions: 610m×6mm
Figure 2 Through hole resolution test shape
Substrate size 9020
4.3 Testing instruments
Viscometer:
Capacitance measurement unit:
Capacitance dielectric loss tester;
Dielectric breakdown device;
High ugly meter:
Mold thickness test unit:| |tt||Measuring microscope:
Micrometer.
4.4 External specification
SJ/T10454—93
The appearance of the slurry shall be visually inspected and shall comply with the provisions of Table 1. 4.5 Viscosity
Measured by absolute working energy conversion viscosity meter, constant salt water excitation 25±1, shear rate 10/min. 4.6 Through hole resolution
At 96% rate of zirconium base The dielectric layer is printed on the board (through hole 250um×250mm). The on-off of the via is measured. The test diagram is shown in Figure 2.
4.7 Dielectric constant adjustment (e)
can be used to ensure that the voltage is not greater than 5V and the measurement error is not greater than 2% of the instrument. The measurement frequency is 1=0.2MHz. The dielectric constant result is calculated as follows. a
Where: C—the dielectric constant of the sample, pF:
d - sample original length, cm;
s— sample conductor overlap area, m;
test graph is shown in Figure 1.
4.8 The tangent value of the mass loss angle
can be measured by the method of measuring the error of 0.1tg0.0002. The measuring frequency is 1±U.2MHz.
test graph is shown in Figure 1.
4.9 Insulation resistance
is used for the upper conductor bed and the lower conductor. High reading meter, measuring voltage is DC100+15V. Test diagram is shown in Figure 1.
4.10 Impact voltage
Use dielectric breakdown device to slowly apply voltage to 100UV at a rate of 100V/3~4s, measuring error%±5%, test diagram is shown in Figure 1,
4.t1 Sintering algae original
Use waist thickness tester or other instruments with equal accuracy to measure the thickness of the dielectric layer, and the measurement error is%±5%. 4.12 For the measurement of the maximum deflection, select a flat oxide substrate, print the substrate, burn the film, and contact the substrate with the printed and dielectric film with a reference plane. At least three points should be measured. The three points are distributed at a corner of the substrate. Use a gauge or a dial gauge to measure. The measured value should be 3/r 10454-93. The maximum linear dimension should be correctly found based on the data measured at least at the above three points.
Derivative m: substrate size 50mm×25mm×0.6mmz product area: 50mmx25mm.
4.13 Temperature cycle
According to GB 2423.22
Test a is carried out, where:
Ia-s5t:
Tei25r:
:30min;
Pay no more than 10 times: 10
4.14 Temperature constant sensible heat
Night B2423.3 is carried out, test strict fermentation 96h.
5.15 High vision storage
According to (iH212.3.2 Test Bb, temperature 155T, duration 21d. 5 Inspection regulations
51 Inspection batchesbzxZ.net
Each batch is a number of inspection batches, with inspection After taking out a certain amount of tea material from the batch, prepare a pollen sample. For sample preparation, see 4.2. 5.2 Batch control inspection. Follow the instructions in Table 3 for the B-group short-term inspection. The B group inspection should be carried out after the A group control inspection is qualified. 5.3 Periodic inspection. Whole samples should be randomly selected from the representative period, and periodic inspections should be carried out according to the provisions of Tables 3 and 4 and the order of items of Groups AB and C. If any non-conformity is found during the test, the subsequent tests will not be carried out and the periodic inspection will be considered unqualified. Periodic control inspections are carried out every 10 minutes. When the production process or the raw material particles are replaced, the test shown in Table 3 should also be carried out. Slurry specific test
Waist request miscellaneous items
Method change
Through hole resolution
Electrical load
Introduction to the loss tangent
Cut insulation voltage
Strike voltage
Sintering thickness ratio
Environmental protection
Initial test limit
Initial image voltage
Recognition ring
After test (D standard
SJ/T 1045493
Table 4 Membrane dielectric performance test
Method acceptance
Insulation resistance after opening test
Initial insulation resistance
Initial insulation charged
[Performance determination
After test, weak inspection①Appearance
Ball Xiaowu report station deep resistance
Cut inspection
Shi Wei electric
High cavity inspection
After test, inspection①Appearance
Insulation resistance after environmental test
5.4. Grid criterion
Certified sample quality
(Control hole quality test)
According to the shape and characteristics
Allow non-product effectiveness
The test results should meet the requirements of the original requirements. If it is found that it does not meet the requirements of the technical specifications, the state shall return two times the number of samples recorded from the same batch of slurry, and re-test the unqualified items. If the test is still unqualified, the batch of slurry is considered unqualified. 6. Marking, packaging, storage and transportation
6.1 Labeling
6.1.1 In addition to the special markings required by the contract, the product name shall be clearly stated on each bottle and outer packaging;
b Quality:
Production name:
d Production month, number.
SJ/T 10454—93
6.1.2 Each inner package should have a certificate of inspection stamp. 6.2 Packaging
The dielectric slurry should be tightly packed in ethylene plastic bottles. 6.3 Storage
The homogeneous polymer should be stored in a clean, dry place, away from sunlight. The storage temperature should not exceed 25, the relative strength should not exceed 75%, and the validity period is half a year.
6.4 Packaging
The packaged dielectric slurry can be transported by direct transport, but should be away from sunlight, dust or other contamination. Additive Note:
This standard is under the jurisdiction of the Standardization Institute of the Ministry of Electronics Industry. The standard was drafted by the Standardization Institute of the Ministry of Electronics Industry and the East China Microelectronics Technology Research Institute of the Ministry of Electronics Industry and the responsible person of the factory.
The main drafters of this standard: Xia Zhengyi, Guo Hua, Neng Jisheng, Liu Chengjun, Xing Huilian
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