SJ/T 10454-1993 Dielectric slurry for thick film hybrid integrated circuit multilayer wiring SJ/T10454-1993 standard download decompression password: www.bzxz.net
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Electronic Industry Standard of the People's Republic of China SJ/T10454-93 Dielectric paste for maltilayer lay ont ofthick film hybrid integraled circuits1993-12-17 Issued Implemented on 1994-06-01 Issued by the Ministry of Electronics Industry of the People's Republic of China Electronic Industry Standard of the People's Republic of China Dielectric paste for maltilayer lay ont ofthick film hybrid integrated circuits clrcuits1 Subject content and scope of use 1.1 Subject content S/T10454-93 This standard specifies the technical requirements, test methods, particle size distribution, packaging, storage and transportation of thick mixed circuit dielectric paste (hereinafter referred to as paste) for multi-layer wiring. 1.2 Applicable scope This standard is used for dielectric paste for thick mixed circuit multi-layer wiring that matches gold and dense conductor paste. 2 Reference standards G32421 GB2423.23 3 Technical requirements 3.1 Paste properties Basic environmental test procedures for electronic products General provisions Basic environmental test procedures for electronic products Test: High temperature test method Electrical product basic environmental test procedures Test: Temperature change test method The properties of the paste shall comply with the provisions in the table above. Table 1 Material properties 3.2 Technical properties The properties of the paste shall comply with the provisions in Table 2. The dielectric material is uniform blue, with a color of 1.50--250. The Ministry of Electronics Industry of the People's Republic of China approved it on December 17, 1993. Pirs implemented it on June 1, 1994. 4 Test method: Through hole separation to calculate external electric current number, external quality loss tangent value, and voltage-free! Environmental test after the electric breakdown voltage sintered film thickness 4.1 Environmental conditions SJ/T10454-93 polymer film properties medium surface flat combustion equipment, no light 41 -5u 10 original) Except for and without stipulation, all test ends should be in the normal atmospheric conditions specified in "24ZV" (humidity 15 ~ 35 death, relative intensity 45%). ~75%, gas jade 86~106kP. 4.2 Product preparation Special core dielectric slurry working characteristics and dielectric performance test samples should be made according to the conventional original waist multi-layer wiring process, the test diagram is shown in Figure 1 and Figure 2. Upper conductor 96% single-layer film Figure 1 Film performance test shape Upper and lower conductors are silver-plated conductors or square conductors: ± Film size: 51 mm×2.5mm Both strip dimensions: 610m×6mm Figure 2 Through hole resolution test shape Substrate size 9020 4.3 Testing instruments Viscometer: Capacitance measurement unit: Capacitance dielectric loss tester; Dielectric breakdown device; High ugly meter: Mold thickness test unit:| |tt||Measuring microscope: Micrometer. 4.4 External specification SJ/T10454—93 The appearance of the slurry shall be visually inspected and shall comply with the provisions of Table 1. 4.5 Viscosity Measured by absolute working energy conversion viscosity meter, constant salt water excitation 25±1, shear rate 10/min. 4.6 Through hole resolution At 96% rate of zirconium base The dielectric layer is printed on the board (through hole 250um×250mm). The on-off of the via is measured. The test diagram is shown in Figure 2. 4.7 Dielectric constant adjustment (e) can be used to ensure that the voltage is not greater than 5V and the measurement error is not greater than 2% of the instrument. The measurement frequency is 1=0.2MHz. The dielectric constant result is calculated as follows. a Where: C—the dielectric constant of the sample, pF: d - sample original length, cm; s— sample conductor overlap area, m; test graph is shown in Figure 1. 4.8 The tangent value of the mass loss angle can be measured by the method of measuring the error of 0.1tg0.0002. The measuring frequency is 1±U.2MHz. test graph is shown in Figure 1. 4.9 Insulation resistance is used for the upper conductor bed and the lower conductor. High reading meter, measuring voltage is DC100+15V. Test diagram is shown in Figure 1. 4.10 Impact voltage Use dielectric breakdown device to slowly apply voltage to 100UV at a rate of 100V/3~4s, measuring error%±5%, test diagram is shown in Figure 1, 4.t1 Sintering algae original Use waist thickness tester or other instruments with equal accuracy to measure the thickness of the dielectric layer, and the measurement error is%±5%. 4.12 For the measurement of the maximum deflection, select a flat oxide substrate, print the substrate, burn the film, and contact the substrate with the printed and dielectric film with a reference plane. At least three points should be measured. The three points are distributed at a corner of the substrate. Use a gauge or a dial gauge to measure. The measured value should be 3/r 10454-93. The maximum linear dimension should be correctly found based on the data measured at least at the above three points. Derivative m: substrate size 50mm×25mm×0.6mmz product area: 50mmx25mm. 4.13 Temperature cycle According to GB 2423.22 Test a is carried out, where: Ia-s5t: Tei25r: :30min; Pay no more than 10 times: 10 4.14 Temperature constant sensible heat Night B2423.3 is carried out, test strict fermentation 96h. 5.15 High vision storage According to (iH212.3.2 Test Bb, temperature 155T, duration 21d. 5 Inspection regulations 51 Inspection batchesbzxZ.net Each batch is a number of inspection batches, with inspection After taking out a certain amount of tea material from the batch, prepare a pollen sample. For sample preparation, see 4.2. 5.2 Batch control inspection. Follow the instructions in Table 3 for the B-group short-term inspection. The B group inspection should be carried out after the A group control inspection is qualified. 5.3 Periodic inspection. Whole samples should be randomly selected from the representative period, and periodic inspections should be carried out according to the provisions of Tables 3 and 4 and the order of items of Groups AB and C. If any non-conformity is found during the test, the subsequent tests will not be carried out and the periodic inspection will be considered unqualified. Periodic control inspections are carried out every 10 minutes. When the production process or the raw material particles are replaced, the test shown in Table 3 should also be carried out. Slurry specific test Waist request miscellaneous items Method change Through hole resolution Electrical load Introduction to the loss tangent Cut insulation voltage Strike voltage Sintering thickness ratio Environmental protection Initial test limit Initial image voltage Recognition ring After test (D standard SJ/T 1045493 Table 4 Membrane dielectric performance test Method acceptance Insulation resistance after opening test Initial insulation resistance Initial insulation charged [Performance determination After test, weak inspection①Appearance Ball Xiaowu report station deep resistance Cut inspection Shi Wei electric High cavity inspection After test, inspection①Appearance Insulation resistance after environmental test 5.4. Grid criterion Certified sample quality (Control hole quality test) According to the shape and characteristics Allow non-product effectiveness The test results should meet the requirements of the original requirements. If it is found that it does not meet the requirements of the technical specifications, the state shall return two times the number of samples recorded from the same batch of slurry, and re-test the unqualified items. If the test is still unqualified, the batch of slurry is considered unqualified. 6. Marking, packaging, storage and transportation 6.1 Labeling 6.1.1 In addition to the special markings required by the contract, the product name shall be clearly stated on each bottle and outer packaging; b Quality: Production name: d Production month, number. SJ/T 10454—93 6.1.2 Each inner package should have a certificate of inspection stamp. 6.2 Packaging The dielectric slurry should be tightly packed in ethylene plastic bottles. 6.3 Storage The homogeneous polymer should be stored in a clean, dry place, away from sunlight. The storage temperature should not exceed 25, the relative strength should not exceed 75%, and the validity period is half a year. 6.4 Packaging The packaged dielectric slurry can be transported by direct transport, but should be away from sunlight, dust or other contamination. Additive Note: This standard is under the jurisdiction of the Standardization Institute of the Ministry of Electronics Industry. The standard was drafted by the Standardization Institute of the Ministry of Electronics Industry and the East China Microelectronics Technology Research Institute of the Ministry of Electronics Industry and the responsible person of the factory. The main drafters of this standard: Xia Zhengyi, Guo Hua, Neng Jisheng, Liu Chengjun, Xing Huilian Tip: This standard content only shows part of the intercepted content of the complete standard. If you need the complete standard, please go to the top to download the complete standard document for free.