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Mechanical Industry Standard of the People's Republic of China
JB/T7673-95
Vacuum Equipment Model Compilation Method
1995-06-16 Issued
Ministry of Machinery Industry of the People's Republic of China
1996-07-01 Implementation
Mechanical Industry Standard of the People's Republic of China
Vacuum Equipment Model Compilation Method
1 Subject Content and Scope of Application
JB/T 767395
Generation Police ZBJ78016~78019-89
This standard specifies the compilation method of vacuum, vacuum unit, vacuum valve and vacuum coating machine models. This standard is applicable to the compilation of models of the above-mentioned various vacuum equipment. 2 Composition of vacuum equipment models
It consists of two parts: basic model and auxiliary model, with a horizontal line in the middle. The composition of various vacuum equipment models is described as follows. 2.1 Vacuum pump
Basic model
Auxiliary model
123-456
1 represents the number of vacuum pump stages (pole), expressed in Arabic numerals. Omitted for unstaged (pole) or single stage (pole), 2 represents the name of the vacuum pump, expressed in the first (or second) letter (print capital) of the Chinese pinyin of one (or two) keywords that constitute the name, as specified in Table 1.
3 represents the characteristics of the vacuum pump, expressed in the first (or second) letter (print capital) of the Chinese pinyin of its keyword, as specified in Table 2 or self-compiled supplementary code.
4 represents the use characteristics of the vacuum pump (mostly refers to the properties of the pumped gas), for condensable pumped gas, it is expressed in print capital "N"; for corrosive pumped gas, it is expressed in print capital "F". Omitted for no special reference. 5 represents the specifications or main parameters of the vacuum pump, expressed in Arabic numerals. 6 represents the design serial number of the vacuum pump. Starting from the first modified design, it is represented by the letters A, B, and C in sequence. Table 1
Vacuum name
Reciprocating vacuum pump
Stator vacuum pump
Rotary vane vacuum pump
Sliding valve vacuum pump
Roots vacuum pump (mechanical booster)
Cycloid vacuum pump
Ion pump
Single-stage multi-vane vacuum pump
Approved by the Ministry of Machinery Industry on June 16, 1995
Keyword meaning and pinyin
"Reciprocating"wang"
"Stator"ding
"Rotary"xuan
"Sliding valve"hua
"Boosting"zeng\,\mechanical"cycloid"yu\"Vacuum""Ion"
|"Rotary vane"，\multi\duo\vacuum pump specifications or main parameters
Gas rate
Evacuation rate
Corresponding units
1996-07-01implementation
Vacuum pump name
Molecular pump"
Oil diffusion vacuum pump
Mercury diffusion vacuum pump
Oil diffusion jet pump (oil booster pump)
Sublimation pump
Rotary pump (ballistic pump)
Compound ion pump
Zirconium aluminum getter pump
Refrigerator cryogenic pump
Perfusion cryogenic pump
Molecular sieve adsorption pump
Water jet pump
Air jet pump
Water vapor jet pump
JB/T 7673--95
Continued Table 1
Key Words Meaning and Pinyin
"molecule\fen"
"expand"disperse\kuo"
"expand"disperse\kuo\,\carry"\gong\"increase"pressure"zeng
"rise\sublimation\sheng"
"return\*hui\\journey\\xuen"
"ion\li","complex"form"fu""zirconium"\ gao\\aluminum"\lu"
"low" temperature"di","refrigeration\zhi\"low" temperature"di\"injection\guan\"absorption"xi\","molecule\fen""spray"\pen",\water\\shui""spray\pen\,air"\qi""spray\pen"
vacuum pump specifications or main parameters
inlet diameter
molecular sieve weight
air extraction volume||tt| |Note, 1) If the air inlet diameter of individual pumps is the same but the air extraction rate is different, the air extraction rate can be marked at the same time, in units of L/5. Table 2
Keyword meaning and pinyin
Horizontal\wo\
"Direct\2hi\
"Sheng" sublimator\sheng"
"Multi\,\$\yuan\duo\
"Magnetic\control\ci"
Vacuum unit (hereinafter referred to as the unit)
Basic Model
Auxiliary model
023-45
Keyword meaning and pinyin
"Convex" cavity\tu"
"Air\cooling\feng"
Magnetic\suspension" floating\xuan"
"Metal\seal\jin"
"Dry\type (oil-free》\gan\
1 represents the unit, represented by the first letter of the Chinese pinyin of the word "ji" (printed capital J). 2 represents the name of the main pump in the unit, represented by a code, as specified in Table 1. Corresponding unit
3 represents the combination characteristics of the unit, represented by the Chinese pinyin of its keywords (printed capital), compiled by the manufacturer. Usually it can be omitted.
4 represents the specifications or main parameters of the main pump in the unit, represented by Arabic numerals. 5 represents the design number of the unit, starting from the first modified design, and is represented by the letters AB, C, etc. Vacuum valve (hereinafter referred to as valve)
JB/T 7673-95
Basic model
Auxiliary model
123-456
1 represents the vacuum range of the valve, represented by the first letter of the Chinese pinyin of its keyword (print capital). According to the provisions of Table 3. 2 represents the valve structure type or function category, represented by the first (second, third) letter of the Chinese pinyin of its keyword (print capital), according to the provisions of Table 4.
3 represents the valve drive mode, represented by the first letter of the Chinese pinyin of its keyword (print capital). According to the provisions of Table 5, manual type is omitted.
4 represents the valve channel type, represented by the first letter of the Chinese pinyin of its keyword (print capital)·According to the provisions of Table 6·Straight-through type is omitted.
Each nominal diameter, unit: mm, expressed in Arabic numerals, the valve with inflatable valve must add 5 before the number to represent the valve specification -
print capital letter Q.
6 represents the valve design number, starting from the first modified design, it is expressed in the order of letters A, B, C... Table 3
Keyword meaning and pinyin
"Ultra" high vacuum valve\chao"
Keyword meaning and pinyin
"Baffle\dang"
"\insert\cha\
"flip\fan\
Diaphragm\mo\
"butterfly\die\
Keyword meaning and pinyin
"Electric\dian"
Keyword meaning and pinyin
Vacuum coating machine (hereinafter referred to as coating machine) 2.4
“Magnetic” motion\ei”
“High\vacuum valve\gao\
“Three\way\san”
Basic model
Auxiliary model
“Low\vacuum valve“di\
Keyword meaning and pinyin
“Cone\zhui\
“Fine” adjustment\wei\
Inflatable”“qi”
“Ball\qiu\
“Pressure\difference\ya”
“Pneumatic”\Qi”
023-456
“Wave” motion\ye”
Right\angle\jiao\
JB/T 7673-95
12 represents the film deposition principle, represented by the first (or second) Chinese pinyin letter (printed capital letter) of two to three keywords, as specified in Table 7.
3 represents the structural characteristics of the coating machine, represented by the first (or second) Chinese pinyin letter (printed capital letter) of the main characteristic keyword. According to Table 8 or self-compiled supplementary code.
4 represents the application characteristics of the coating machine, represented by the first (or second) Chinese pinyin letter (printed capital letter) of its keyword. Indicated, according to the provisions of Table 9 or self-compiled supplementary code.
5 represents the internal geometric dimensions of the coating chamber. The cylindrical type is the inner diameter × length, and the box type is the internal dimensions of the box body length × width × height. Expressed in Arabic numerals, unit; mm.
6 represents the design serial number of the coating machine. Starting from the first modified design, it is represented by letters A, B, C... in sequence. Table 7
Classification of equipment according to the principle of film deposition
Resistance heating evaporation
Chemical gas
Phase deposition||tt| |Compound
Electron beam heating evaporation
High-end induction heating evaporation
Laser beam heating evaporation
Both resistance evaporation source and electron beam evaporation sourceDC sputtering
DC magnetron sputtering
DC reactive sputtering
DC adsorption sputtering
DC bias sputtering
High frequency sputtering
High frequency magnetron sputtering
High frequency reactive sputtering
High frequency adsorption sputtering
High frequency Bias irradiation
Resistive evaporation ion plating
Electron beam evaporation ion plating
High frequency induction evaporation ion plating
Hollow cathode ion plating
Sputtering ion plating
Multi-arc cathode ion plating
Group ion plating
Low pressure chemical vapor deposition
Plasma chemical vapor deposition
Photochemical vapor deposition
Both the source and the sputtering source
Both the flow deposition of different principles Source
Keyword meaning and pinyin
"evaporation"zheng\,electrical"resistance\\zu"evaporation\zheng",electron"beam\\shu"evaporation\zheng","inductive"gan"evaporation"\zheng","laser"beam"ji"sputtering\jian"
"sputtering\jian","magnetic"control\ci\"sputtering\jian\","reaction\fan"sputtering\ian","absorption\xi\"sputtering\jian","bias"pian"sputtering\jian","high\ying\gao"sputtering\jian\","high\frequency"gao\","micro\control"ci"sputtering"jian","high\amountgao","reaction\fan"sputtering\jian","high\frequency\gao","absorption\xi\"sputtering\jian","high\frequency"gao","bias"pian"sputtering\jian","high\frequency"gao","micro\control"ci"sputtering"jian","high\amountgao","reaction\fan"sputtering\jian","high\frequency\gao","absorption\xi\"sputtering\jian","high\frequency"gao","bias"pian"ion" 1i", electrical "resistance\zu" "high\i\, electron" beam\\shu\"ion\li\, "induction\gan" "ion\\li\, \hollow\kong" "ion\l", "sputtering"\jian\"ion\li\, "multiple" arc "duo\"ion\li", "chopstick" group\cu" "chemistry\hua\, \low\pressure "di"\chemistry\hua\, \ion\li\"chemistry\hua\\light" "light "Compound"fu, evaporation, "sputtering"jian"compound". Meaning see note
Note: The words in the table represent the first (or second) letter of the Chinese pinyin of the keywords of several different deposition principles (print capital letters), 4
Structural features
Plane sputtering
Coaxial sputtering
Example type sputtering
Continuous
Semi-continuous
Multi-chamber
JB/T 7673—95
Meaning and phonetic letters of the characters
\Plane\ping"
"Coaxial"tong"bZxz.net
"Inverted" cone\dao\
"Horizontal*wo\
"Continuous"lian"
"Speedy"continuous\ban\
"Multi-chamber"duo"
"Box\xiang\
Note: For diode, tripole or quadrupole sputtering coating equipment, the corresponding Arabic numerals are used to indicate and marked at the first position of the model. Table 9
Application characteristics
Plastic coating
Mirror coating
Toner cartridge coating
Resistor coating
Capacitor coating
Crystal coating
Tool coating
Decorative coating
Optical coating
Electrical component coating
Vacuum equipment model example
Vacuum pump
W—35B
Reciprocating vacuum pump, pumping rate is 35L/s, the second modified design: 2X-15A
Double-stage rotary vane vacuum Pump, the pumping rate is 15L/s, the first modified design; XD-63
single-stage multi-vane vacuum pump. The pumping rate is 63m\/h; d.
ZJ-600
Roots vacuum pump. The pumping rate is 600L/s: e.
YZ-150
trochoidal vacuum pump. The pumping rate is 150L/s: 3L-160
tripole sputtering ion pump, the pumping rate is 160L/s; g.
Keyword meaning and pinyin
"Plastic" material\su\||t t||Mirror making\\jing\"
Selenium\drum"\gu"
Resistor\\zu\
Capacitor\\rong"
Crystal"ti\
"Tool"dao\
Decoration\\shi\
"Optics\
"Components\yuan"
Molecular pump, air inlet diameter is 160mm;
Oil diffusion vacuum pump, air inlet diameter is 800mm; 2-400
Oil diffusion jet pump , the air inlet diameter is 400mm; jS-400
sublimation pump, the air inlet diameter is 400mm;
k.GL--100
zirconium aluminum getter pump, the air inlet diameter is 100mm, DZ—160
refrigerator cryogenic pump, the air inlet diameter is 160mm; m.IF-3
JB/T7673
molecular sieve adsorption pump, the weight of the loaded molecular sieve is 3kg; the water vapor jet pump model is compiled according to the following example: 3P0.63—50/0.6-10
three-stage water vapor jet pump. The suction pressure is 0.63kPa, the air extraction volume is 50kg/h, of which the condensable gas volume is 10kg/h, and the working steam pressure is 0.6MPa.
3.2 Unit
JK-400
Oil diffusion vacuum pump unit, the main pump air inlet diameter is 400mm; b.J3L-320
Triode sputtering ion pump unit, the main pump exhaust rate is 320L/s: c.JF-250
Molecular pump unit, the main pump air inlet diameter is 250mm. 3.3 Valves
GDQJ320
High vacuum pneumatic flapper valve. Right angle type, nominal diameter is 320mm; DDC—JQ50
Low vacuum magnetic flapper valve, right angle type, with inflation, nominal diameter is 50mm; GI-—50
High vacuum manual butterfly valve, nominal diameter is 50mm; d.DW-2A
Low vacuum fine-tuning valve, nominal diameter is 2mm, the first modified design; e.
CD—J25
Ultra-high vacuum manual flapper valve, right angle type, nominal diameter is 25mm; f.CCQ-100
Ultra-high vacuum pneumatic gate valve, nominal diameter is 100mm; g. CDY-320
Ultra-high vacuum hydraulic flapper valve, nominal diameter is 320mm. 3.4
Coating machine
ZZB—S$630X800A
Resistance evaporation semi-continuous plastic coating machine. The inner diameter of the coating chamber cylinder is 4630mm and the length is 800mm. The first modification design: ZZW-G$1000X1000
JB/T7673-95
Resistance evaporation horizontal drum coating machine, the inner diameter of the coating chamber cylinder is $1000mm and the length is 1000mm; ZSX—S630X400X800B
Electron beam evaporation box-type plastic coating machine, the inner dimensions of the coating chamber box are 630mm long, 400mm wide and 800mm high. The second modification design;
JGCP-Y$400X400||t t||Flat high-frequency magnetron sputtering coating machine for electrical components, the inner diameter of the coating chamber cylinder is $400mm and the length is 400mm: 3JG-H$400×400
Tripolar high-frequency sputtering decorative coating machine, the inner diameter of the coating chamber cylinder is $400mm and the length is 400mm; f.JCT—J2500X650X1700
Coaxial DC magnetron sputtering mirror coating machine, the inner dimensions of the coating chamber box are 2500mm long, 650mm wide and 1700mm high; LKW-D$800X800
Hollow cathode ion horizontal tool coating machine, the inner diameter of the coating chamber cylinder is $800mm and the length is 800mm, additional instructions:
This standard is proposed by the National Technical Committee for Vacuum Technology Standardization. This standard is drafted by the Shenyang Vacuum Technology Research Institute of the Ministry of Machinery Industry. The main drafters of this standard are Zhang and Li Yuying. People's Republic of China
Mechanical Industry Standard
Vacuum Equipment Model Compilation Method
JB/T 7673-95
Issued by the Machinery Standardization Research Institute of the Ministry of Machinery Industry Printed by the Machinery Standardization Research Institute of the Ministry of Machinery Industry (Beijing 8141 Letter
#10081)
No Reproduction
Copyright
Format 880×12301/16 Printing Sheet 3/4
Word Count 14.000
Edition 1 in April 1996
First Printing in + Month 1996
Print Count 00.001-500
Price 8. Yuan
No. 95-127
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