GB/T 14600-1993 Nitrous oxide gas for use in the electronics industry

Basic Information

Standard ID: GB/T 14600-1993

Standard Name: Nitrous oxide gas for use in the electronics industry

Chinese Name: 电子工业用气体氧化亚氮

Standard category:National Standard (GB)

state:in force

Date of Release1993-08-26

Date of Implementation:1994-07-01

standard classification number

Standard ICS number:Chemical Technology>>Chemical Products>>71.100.20 Industrial Gases

Standard Classification Number:Chemicals>>Other Chemical Products>>G86 Industrial Gases and Chemical Gases

associated standards

Publication information

publishing house:China Standards Press

Publication date:1994-07-01

other information

Release date:1993-08-26

Review date:2004-10-14

drafter:Duan Shufang

Drafting unit:Southwest Research Institute of Chemical Industry, Ministry of Chemical Industry

Focal point unit:National Technical Committee for Standardization of Semiconductor Materials and Equipment

Proposing unit:Ministry of Chemical Industry of the People's Republic of China

Publishing department:State Bureau of Technical Supervision

competent authority:National Standardization Administration

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Introduction to standards:

This standard specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation and storage requirements for bottled nitrous oxide, a gas used in the electronics industry. This standard applies to nitrous oxide produced by the thermal decomposition of ammonium nitrate. This product is mainly used in chemical vapor deposition and plasma processes of silicon dioxide in the electronics industry. GB/T 14600-1993 Nitrous oxide, a gas used in the electronics industry GB/T14600-1993 Standard download decompression password: www.bzxz.net