JJG 56-2000 Verification Procedure for Tool Microscopes JJG56-2000 Standard download decompression password: www.bzxz.net
This procedure applies to the initial verification, subsequent verification and in-use inspection of universal tool microscopes and large and small tool microscopes.

National Metrology Verification Regulation of the People's Republic of China JJG56—2000
Toolmaker's Microscope
Promulgated on 2000-05-08
Implementation on 2000-10—01
Promulgated by the State Administration of Quality and Technical Supervision
JJG56—2000
Verification Regulation of
Toolmaker's Microscope
JJG56—2000
Replaces JJG56—1984
This regulation was approved by the State Administration of Quality and Technical Supervision on May 8, 2000, and came into effect on October 1, 2000.
Responsible unit: National Technical Committee for Geometry and Length Metrology Drafting unit: Aviation Industry 304th Research Institute, China National Institute of Metrology
This regulation is entrusted to the National Technical Committee for Geometry and Length Metrology to be responsible for the interpretation of this regulation. Main drafter:
Zhang Yuwen
Participating drafter:
Li Jingfang
JJG56—2000
(Aviation Industry 304th Research Institute)
(China National Institute of Metrology)
(Aviation Industry 304th Research Institute)
Overview·
3 Metrology performance requirements| |tt||JJGS6-2000
Parallelism of the metal work surface with the moving direction of the longitudinal and transverse slides.3.1
Parallelism of the glass work surface with the moving direction of the longitudinal and transverse slides, the straightness of the moving direction of the longitudinal and transverse slides and the verticality of the angular pendulum and longitudinal and transverse slides.
Verticality of the optical axis to the work surface when the column is at zero position. When the column is at zero position, the moving direction of the main microscope arm along the column guide rail and the verticality of the work surface.3.6
Correctness of the magnification of the reading device
Correctness of the magnification of the main microscope
Angle measuring microscope at zero position When the position is correct, the parallelism of the crosshairs of the goniometer eyepiece and the moving direction of the slide. The indication error of the goniometer microscope
The indication error of the reading device
The return error of the reading device
The indication error of the instrument
The radial runout of the pin together with the pin rod..
The parallelism of the two pin axes and the moving direction of the longitudinal slide. The coincidence of the two pins
The height difference between the upper surface of the measuring knife pad and the pin axis. The relative position of the optical axis of the main microscope, the column rotation axis and the pin axis. The correctness of the magnification of the projection device
The correctness of the zero position of the contour eyepiece
Optical positioning
Optical dividing head
Optical dividing table
4General technical requirements
5Control of measuring instruments
Verification conditions
Verification items.
5.3Verification method
5.4Processing of verification results
Appendix A Format of the inner pages of the verification certificate
(3)
1Scope
JJG56—2000
Verification procedures for tool microscopes
This procedure applies to the initial verification, subsequent verification and in-use inspection of universal tool microscopes and large and small tool microscopes.
2Overview
The tool microscope is a multi-purpose optical mechanical two-coordinate measuring instrument. The length and angle of precision mechanical parts are usually measured by the image method and the axis cutting method; the shape of mechanical parts is measured by the rectangular coordinate or polar coordinate method. 3 Metrological performance requirements
3.1 The parallelism between the metal work surface and the longitudinal and transverse sliding plate movement direction shall not exceed the requirements of Table 1.
Universal tool microscope
Longitudinal: 0.01mm
Transverse: 0.005mm
Large tool microscope
Not more than 0.02mm over a length of 100mm
3.2 The parallelism between the glass work surface and the longitudinal and transverse sliding plate movement Small tool microscope
Not more than 0.02mm over a length of 75mm
Universal tool microscope not more than 0.02mm; large and small tool microscopes not more than 0.03mm. 3.3 The straightness and angular runout of the longitudinal and transverse sliding plate movement shall not exceed the requirements of Table 2.
Vertical direction
Straightness
Horizontal direction
Universal tool microscope
Large tool microscopeSmall tool microscope10
3.4Verticality of longitudinal and transverse slide movement
JJG56-—2000
Universal tool microscopeNot more than 0.003mm/100mm. Large tool microscopeNot more than 0.005mm/50mm. Small tool microscopeNot more than 0.004mm/25mm. 3.5When the column is at zero position, when the verticality of the optical axis to the worktable is checked with a gauge block, the images of the two working surfaces of the gauge block should be equally clear. 3.6 When the column is at zero position, the verticality of the main microscope arm along the moving direction of the column guide rail and the worktable surface is not more than 0.06mm/100mm for universal tool microscope and not more than 0.09mm/100mm for large and small tool microscopes
3.7 The accuracy of the magnification of the reading device
Not more than 0.5μm.
3.8 The accuracy of the magnification of the main microscope
Not more than the provisions of Table 3.
Eyepiece type
Objective lens magnification
Accuracy
Angle eyepiece
1×, 1.5×, 3x
Contour eyepiece
1×, 1.5x, 3x
3.9 When the goniometric microscope is at zero position, the parallelism of the crosshairs of the goniometric eyepiece and the moving direction of the slide is not more than 1.
3.10 The indication error of the goniometer microscope
shall not be greater than 1.
3.11 The indication error of the reading device
shall not be greater than 0.6μm.
3.12 The return error of the reading device
Universal tool microscope: not greater than 0.3um. Large and small tool microscopes: not greater than 0.002mm. 3.13 The indication error of the instrument
Universal tool microscope should not be greater than (1+L/100)μm; L is the length of the scale to be tested (mm). The indication error between any two points of the differential cylinder of large and small tool microscopes shall not be greater than 0.003mm. The indication error when using a gauge block shall not be greater than that specified in Table 4. 2
Measuring range mm
Indication error mm
3.14 Radial runout of ejector pin and ejector pin rod JJG56—2000
External ejector pin is not more than 0.005mm: internal ejector pin is not more than 0.007mm. 3.15 Parallelism between the axis of two ejector pins and the moving direction of longitudinal slide Universal tool microscope is not more than 0.015mm in both vertical and horizontal directions; large and small tool microscopes are not more than 0.04mm in vertical direction. 3.16 Coincidence of two ejector pins
Coincidence of two ejector pins in horizontal direction, for universal tool microscope, when the distance between two ejector pins is 20mm, it is not more than 0.01mm; when the distance between two ejector pins is 200mm, it is not more than 0.02mm. For large and small tool microscopes, when the distance between two ejector pins is any size within the measuring range, it is not more than 0.02mm. 3.17 The height difference between the upper surface of the measuring knife pad and the axis of the ejector is not greater than 0.015mm.
3.18 The relative position of the optical axis of the main microscope, the rotation axis of the column and the axis of the ejector When the column rotates 12 degrees from the zero position to the left and right sides, the displacement of the aiming point is not greater than 0.01mm in the left and right direction. It is not greater than 0.002mm (universal tool microscope) and 0.003mm (large and small tool microscopes) in the front and back directions.
3.19 The correctness of the magnification of the projection device The error of the magnification is not greater than 0.6%.
3.20 The correctness of the zero position of the contour eyepiece
is not greater than 3.
3.21 Optical locator
3.21.1 The verticality of the measuring rod and the work surface When the measuring rod is perpendicular to the work surface, the three-segment double-line image of the locator should be between the two imaginary lines with the largest distance in the field of view of the goniometer eyepiece.
3.21.2 The variability of positioning
shall not exceed 0.001mm.
3.22 Optical dividing head
3.22.1 The relative position and consistency of degree scale and sub-scale The degree and sub-scale lines shall be parallel and without visible parallax. The degree scale line shall be symmetrical to the sub-scale line. The consistency of the sub-scale line and the degree scale shall not exceed 12.
3.22.2 The radial runout of the ejector together with the spindle3
shall not exceed 0.007mm
JJG56-—2000
3.22.3 The parallelism between the needle axis and the longitudinal sliding plate moving direction shall not exceed 0.015mm
3.22.4 The indication error shall not exceed 30.
3.23 Optical indexing table
3.23.1 Relative position and correspondence between the degree scale and the sub-scale scale lines The sub-scale and degree scale lines shall be parallel and without visible parallax, and the sub-scale lines shall be symmetrical to the degree scale lines. The correspondence between the degree scale and the sub-scale shall not exceed 12\.
3.23.2 The parallelism between the glass work surface and the longitudinal and transverse sliding plate moving direction shall not exceed 0.03mm.
3.23.3 The coincidence between the center of the worktable centering device and the center of rotation shall not exceed 0.005mm.
3.23.4 Indication error
For a scale value of 30\, it shall not exceed 30; for a scale value of 10\, it shall not exceed 20.4 General technical requirements
Appearance and interaction of various parts:
a) The manufacturer's name or factory logo, factory number and MC mark shall be marked on the instrument. b) There shall be no rust, bruises, obvious scratches or defects that affect the accuracy of use on each working surface. c) The imaging of the optical system shall be clear. There shall be no significant dust, water stains or oil stains that affect the measurement in the field of view, and the brightness shall be uniform.
d) The installation of accessories shall be reliable.
e) The action of each movable part shall be smooth, without looseness or jamming; the action of the brake screw shall be reliable. f) When the intersection of the crosshairs of the goniometer eyepiece coincides with the axis of the thimble, the indication of the horizontal reading device shall be (50±0.5) mm.
g) The millimeter scale should be clear over the entire length and should not be tilted by the naked eye. h) The index line of the reading device should not have tilt or parallax with the micrometer scale, 0.1 mm scale and spiral line. i) The instrument in use and after repair should not have defects that affect the accuracy of use. i) Digital counters and microcomputer digital counters should have a zeroing function, and their minimum resolution should not be greater than 0.5μm.
k) Digital counters should not lose numbers during movement, and the change in the stability of their indication within 4h should not be greater than 0.5μm.
5 Control of measuring instrumentswww.bzxz.net
Includes: initial calibration, subsequent calibration and inspection during use. 5.1 Calibration conditions
5.1.1 Environmental conditions See Table 5.
Temperature of instrument room ℃
Change of room temperature per hour ℃
Temperature difference between instrument and standard instrument
Time for instrument to reach equilibrium temperature in room h
Time for standard instrument to reach equilibrium temperature in room h5.1.2 Calibration equipment
a) Graduation value of autocollimator <1\
b) Graduation value of micrometer ≤0.001mm
JJG56—2000
Universal tool microscope
20 ±1
c) Special ruler parallelism <0.002mm, flatness <0.5μmd) Second-class glass scale ±0.5um
e) Knife-edge square 100×63 (200×100) mm90±3f) Wide seat angle ruler 100×60 first-class
g) Third-class gauge block, second-class gauge block
h) 12-face prism ±1”
i) Special mandrel, engraved mandrel
i) Inductive micrometer resolution 0.1μm
5.2 Verification items
The verification items of tool microscope are listed in Table 6.
Verification items
Appearance and interaction between various parts
Parallelism of metal work surface and moving direction of longitudinal and transverse slides
Transverse direction of glass work surface and moving direction of longitudinal and transverse slides Parallelism
First calibration
Large and small tool microscopes
Subsequent calibration
In-use inspection
Calibration items
Straightness of longitudinal and transverse slides
Verticality of longitudinal and transverse slides
JJG56—2000
Table 6 (continued)
First calibration
Verticality of the optical axis to the work surface when the column is at zero position
Verticality of the main microscope arm along the moving direction of the column guide rail and the work surface when the column is at zero position
Correctness of the magnification of the reading device
Correctness of the magnification of the main microscope
Parallelism of the crosshairs of the goniometer eyepiece with the moving direction of the slide when the goniometer eyepiece is at zero position
Indication error of the goniometer eyepiece
Indication error of the reading device
Return error of the reading device
Indication error of the instrument
Radial runout of the thimble together with the thimble rod
Parallelism of the two thimble axes with the moving direction of the longitudinal slide
Coincidence of the two apexes
Measurement of the height difference between the upper surface of the knife pad and the thimble axis
Relative position of the optical axis of the main microscope, the rotation axis of the column and the thimble axis
Subsequent calibration
Inspection during use
Calibration items
Correctness of the magnification of the projection device
Correctness of the zero position of the contour eyepiece
Optical positioner
Verticality of the measuring rod and the workbench
Variability of positioning
Optical dividing head
JJG56—2000|| tt||Table 6 (continued)
Initial calibration
Relative position and conformity of sub-scale and degree scale
Radial runout of ejector pin and spindle
Parallelism of ejector pin axis and moving direction of longitudinal slide
Indication error
Optical indexing table
Relative position and conformity of sub-scale and degree scale
Parallelism of glass work table and moving direction of longitudinal and transverse slide
Coincidence of center of work table centering device and center of rotation
Indication error
Note: In the table, “+” indicates that calibration is required; “_” indicates that calibration is not required. Subsequent calibration
Inspection during use
5.3 Calibration method
5.3.1 Appearance and interaction of various components
Calibrate by observation and test.
JJG56-2000
5.3.2 Parallelism between the metal work surface and the moving direction of the longitudinal and transverse slides. Fix the micrometer on the main microscope of the instrument with a table stand. Adjust the micrometer so that its measuring axis is perpendicular to the work surface. Lift and lower the main microscope arm so that the measuring head of the micrometer contacts the measuring surface of the special ruler placed on the work surface, and make the indication of the table at zero or a certain value nearby. Move the longitudinal or transverse slide to observe the change of the indication of the micrometer.
When calibrating the universal tool microscope, the position of the special ruler is: when calibrating the longitudinal direction, place the ruler at the front and back positions of the work table according to the longitudinal stroke; when calibrating the transverse direction, place the ruler at the left, middle and right positions of the work table according to the transverse stroke. The indication changes measured at all positions are not greater than the requirements. When calibrating large and small tool microscopes, calibrate at the front, back and left and right positions of the work table. For large tool microscopes, the rotary table should also be calibrated according to the above method every time it rotates 90°. The above calibration results should not be greater than the requirements of 3.1.
5.3.3 When calibrating the parallelism between the glass work table and the longitudinal and transverse slides, first fix the micrometer on the main microscope with a table stand and adjust its measuring axis perpendicular to the work table. Lift the main microscope arm so that the measuring head of the table contacts the work table and the indication of the table is at zero or a nearby value. Then move the longitudinal or transverse slide to observe the change in the indication of the micrometer. When calibrating a universal tool microscope, the calibration is carried out when the micrometer measuring head contacts the work table at the three longitudinal positions of the front, back and middle and the three transverse positions of the left, middle and right. When calibrating large and small tool microscopes, the calibration is carried out when the micrometer measuring head contacts the work table at the diameter position parallel to the longitudinal and transverse directions. For large tool microscopes, calibration should also be carried out every 90° rotation of the rotary table, and the above calibration results should not exceed the requirements of 3.2. 5.3.4 Straightness of longitudinal and transverse slide movement
When using an autocollimator to calibrate the angular pendulum: place the plane reflector on the slide or work surface of the instrument, and install the autocollimator on the base of the instrument. When calibrating large and small tool microscopes, the instrument and autocollimator should be installed on the same substrate (such as a flat plate). Adjust the autocollimator and reflector so that they are parallel to the direction of travel of the slide. Move the slide in the full stroke in the forward and reverse directions, and read the readings on the autocollimator. The difference between the maximum and minimum readings is the straightness of the slide movement. The angular pendulum of the longitudinal and transverse slide movement should not be greater than 3 in both the horizontal and vertical directions.3. When using a micrometer and a straight ruler to verify straightness: fix the micrometer on the main microscope of the instrument with a table stand. Install the straight ruler on the workbench of the instrument and adjust it to be parallel to the direction of movement of the slide. Adjust the micrometer so that its measuring axis is perpendicular to the measuring surface of the straight ruler. Raise or lower the main microscope arm or move the slide so that the measuring head of the micrometer contacts the measuring surface of the straight ruler, and at the same time make the indication of the meter at zero or a value close to it. Move the slide through its full stroke in the forward and reverse directions and observe the changes in the indication on the micrometer. When using a micrometer and a straight ruler to verify the straightness of the longitudinal and transverse slide movement, it should also be done in both the horizontal and vertical directions and should not exceed the requirements of 3.3. 5.3.5 When verifying the verticality
of the longitudinal and transverse slide movement, install a 200mm×100mm wide square on the workbench of the instrument. The micrometer is measured with the aid of Table 8
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