Some standard content:
ICs 25. 220. 20
National Standard of the People's Republic of China
GB/T18682—2002
Specifications of physical vapor deposition TiN thin film
films2002-03-10 Issued
People's Republic of China
General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China
2002-08-01 Implementation
Normative reference documents
Terms and definitions
Technical requirements
5 Performance and test methods
Appendix A (Normative Appendix)
Appendix B (Normative Appendix)
Appendix C (Normative Appendix)
Appendix (Normative Appendix)
Technical requirements for surface quality control of parts before coating Sensitive targets for physical vapor deposition technology
Vacuum technical requirements for physical vapor deposition TiN equipment Method for measuring and displaying film thickness
Appendix Normative Appendix) Test method for anti-tumor ability of physical vapor deposition TiN films Appendix F (Normative Appendix) Test method for tribological properties of physical vapor deposition TiN films GB/T 18682—2002
Appendix A, Appendix B, Appendix C, Appendix D, Appendix E, and Appendix F of this standard are normative appendices. This standard is proposed by the China Machinery Industry Federation. This standard is organized by the National Metallurgical Institute Non-metallic Coating Standard Promotion Technical Committee. The responsible drafting unit of the standard is Wuhan Institute of Materials Protection. GB/T18682-2002
Participating drafting units of this standard are: General Iron and Steel Research Institute, Institute of Mechanics of the Chinese Academy of Sciences, Institute of Tools of the Fifth Institute of China Aerospace Science and Technology Group Corporation, Institute of Chemical Physics of the Chinese Academy of Sciences, Xingzhou Vacuum Equipment Co., Ltd., Changsha Kehang New Surface Technology Research Institute. The main drafters of this standard are: Ling Guo, Shou Jian, Kan Han, Yin Jixiang, Qu Xueji, Ji Xiaochun, Qin Xiangpei. 1 Scope
Technical conditions for physical vapor deposition of TiN thin films
This standard specifies the technical requirements for physical vapor deposition of TN thin films. This standard is applicable to physical vapor deposition of TiN thin films. It is also applicable to other 1iN thin film prepared by the method. This standard is also applicable to other material deposition layers (TiC, TiCN, TiAIN, etc.). 2 Normative references
GB/T18682--2002
The clauses in the following documents become clauses of this standard through reference in this standard. For any dated reference, all subsequent amendments (excluding errors) or revisions are not applicable to this standard. However, the parties to an agreement based on this standard are encouraged to study whether to use the latest versions of these documents. For any undated reference, the latest version is applicable to this standard. B191 Packaging, storage and transportation graphic symbols (eqvIS0780) GB/T3620.1 Titanium and titanium alloy grades and chemical composition G13/T3620.2 Chemical composition and allowable deviation of composition of titanium and titanium alloy processed products GB/T4698 Chemical analysis methods for sponge diamonds, diamonds and titanium alloys GB/T5158 High and low magnification microstructure inspection methods for titanium alloys GB/T 51H$4
Titanium and titanium alloy plus T. Product acoustic flaw detection method (eqVAMS2631) true method (egv1S609)wwW.bzxz.Net
GB/T 6070
GB/T 8180 t
Packaging, marking, transportation and storage of titanium and titanium alloy processing products GB/T11164--1999 General technical conditions for vacuum coating equipment GB/T 13384
General technical conditions for packaging of electromechanical products
GB/T 15827
Color of ion-plated imitation gold titanium nitride (1c9IS08654) JB/1 6075
Metallographic inspection method of nitride coating
JB/T 7506
JB/F 7673
Loose abrasives abrasive wear test methodRubber wheel methodVacuum equipment model compilation method
Western fixed abrasives abrasive wear pin-sandpaper disk sliding wear method1B1 7705
JB/T8554 Scratch test method for adhesion of vapor deposited thin film substrateJH/『53021 Vacuum coating equipment product quality classification3 Terms and definitions
The following terms and definitions apply to this standard.
Ultimate pressureultimatevacuumpressureThe lowest pressure that an empty and dry vacuum chamber reaches when the vacuum system is operating normally. The unit is Pa. 3.2
Time for pump down
The time required to pump down an empty and dry vacuum chamber from atmospheric pressure (10\Ia) to the specified pressure when the vacuum system is operating normally. Unit is in
GR/T18682—2002
Pressure rise rateratenfpressurcriso
After the vacuum chamber is continuously evacuated to the lowest stable pressure, the pressure rise per unit time caused by the internal gas leakage. Unit is Pa/h. 3.4
Targetmaterialstargetmaterials
The material used as the deposition source to form the electrode of the sputtering evaporation device, 3. 5
Test loadtestload
In the pin-disc wear test, the load acting perpendicularly on the surface of the disk sample along the axis of the pin sample. Unit is. 3. 6
Test strokeslidingdistance
In the pin-disc wear test, the relative sliding distance between the pin sample and the disk sample. Unit is m. 3.7
Test rotation speed fortestThe relative rotation speed between the pin and the disk along the disk sample axis in the pin-disk wear test. The unit is T/mi3.8
Coated sample
The sample that has formed a physical vapor deposition film. 3.9
Samplemate
The sample that forms a sliding friction pair with the film sample. 4 Technical requirements
The technical requirements for physical vapor deposition[iN thin film mainly include: the surface quality of the parts before coating, the quality of the selected target material, the technical indicators of the equipment, etc., and ensuring these requirements is a prerequisite for obtaining qualified N thin films. 4.1 Technical requirements for surface quality control of parts before coating Before coating, there are strict regulations on the cleaning, cleaning, furnace loading and storage of parts. If the surface quality of the parts after cleaning does not meet the requirements of this standard after inspection, it will seriously affect the coating process and film quality, and should not be coated: its overall quality requirements and inspection methods are shown in Appendix A. 4.2 Quality requirements for target materials
Titanium target is an essential material for physical vapor deposition TiN thin film. The material used to make titanium target should adopt a special vacuum melting method. Its brand, organizational state and chemical composition must comply with the relevant regulations. In special cases, metallographic structure, non-destructive testing, surface quality requirements, etc. must also be indicated. The quality of the target should be inspected by the supplier and the demander in accordance with the provisions of this standard. Specific quality requirements and inspection methods are in Appendix B. 4.3 Vacuum technical requirements for physical vapor deposition TiN equipment The vacuum equipment for physical vapor deposition TiNV should meet the corresponding vacuum technical requirements and indicators, otherwise there will be no positive deposition of TiN film. The vacuum technical requirements of the equipment mainly include: equipment working conditions, equipment vacuum technical requirements, equipment structure requirements, equipment manufacturing quality, equipment safety protection, etc. The parameters that should be strictly controlled in the vacuum indicators of the equipment are: ultimate pressure, pumping time, and pressure rise rate. Specific technical requirements, measurement methods and point vacuum indicators are shown in Appendix C.
5 Performance and test methods
5.1 Color
Conform to the requirements of GH/T15827.
5.2 Metallographic structure
Test according to GB/T 6075. The metallographic hardness of TiN film on the surface of tool shall be ≥2 200 HV 0.025. 5.3 Thickness
GB/T18682-2002
TiN film shall reach the required thickness. For decorative plating, the thickness is generally 0.3μm~1.5μm according to the product object and the combination with other composite coatings. The thickness of Ti film used for tool surface shall reach 2.0μm-5.5μm. The specific measurement method adopts ball mark method or spherical surface method. See D.
5. 4 Adhesion between film and substrate
Test according to JB/I8554+The bonding strength of TiN film used on the surface of tools should not be less than 4UN. 5.5 Corrosion resistance of TiN film
The corrosion resistance of TiN film should meet the requirements after salt spray corrosion test and constant humidity and heat test, see E. 5.6 Tribological properties of TiN films
This standard uses the pin-on-disk wear test to measure the friction coefficient, wear volume, wear coefficient and abrasiveness of TiN films under sliding friction conditions. The specific provisions are shown in Appendix F.
GB/T18682—2002
A.1 Surface quality requirements before parts cleaning
Appendix A
(Normative Appendix)
Technical requirements for quality control of parts surface before coating The surface preparation should be done before cleaning the parts, and deionized water should be used for cleaning. A.1. Remove all kinds of dirt such as oil, wax, glue, etc. from the surface. A.1.2 The residual salt of the plugs after salt bath heat treatment should be cleaned, and no residue (such as salt, acid, alkali, etc.) is allowed. A.1.3 Assembled parts should be disassembled and cleaned.
A.1.4 After grinding as in .1., there should be no residual magnetism, magnetic powder, abrasive or foreign particles and grinding burns. A1.5 The surface is not allowed to have defects such as cracks, rust, burrs, edge curling and scratches. Decorative or other functional parts can be determined according to specific technical conditions.
A.1.6 The surface is not allowed to have black, blue, passivation and other covering layers. A.1.7 The surface roughness Ru value of the plated area of the part should not be higher than 0.40Jm. A.1.8 There is no excess coal material and olefin slag in the welded parts. The welds are cleaned by sandblasting or other methods. There should be no defects such as pores and loose welding.
A.1.9 The surface of parts that have not been finished and have oxide scale should be sandblasted or shot peened. The oxide scale can also be removed by shuttle method.
41.10 Parts with high requirements for material fatigue life should be sandblasted. And choose sand that does not damage the surface of the parts: the surface after sandblasting should not touch the residual oxide scale, rust, oil stains, residual sand, fingerprints, etc. A.1.11 There should be no acidic or alkaline residue on the parts, and there should be no defects such as plating blistering, flaking, missing plating, etc. A.1.12 For parts with matching requirements specified in the design, the maximum size margin of the plating thickness must be left, and the size inspection and verification must be strictly carried out according to the requirements of the technical documents. A.1.13 Unless otherwise specified, plating should be carried out after all mechanical processing is completed. A.1.14 The tools and fixtures used in plating must be pre-cleaned accordingly. A.2 Surface quality and technical requirements of parts after cleaning A.2.1 After the parts are degreased, activated, painted, dehydrated, etc., there should be no residues such as oil, grease, water and water stains on the surface. A.2.2 It is strictly forbidden to touch the cleaned parts with bare hands. Clean fixtures or clean gloves (disposable plastic sleeves) must be used for clamping. A.3 Time limit and storage conditions for loading parts into the coating room after cleaning A.3.1 After cleaning, the parts should be coated or stored in a vacuum chamber or a clean dryer in time. The relative humidity in the dryer should be ≤540%, and the storage time should not exceed 24 hours.
A.3.2 All high-strength parts that have been sandblasted should be coated within 2 hours (including pretreatment). A.4 Inspection method for surface quality of parts after cleaning The surface quality of parts after cleaning can be inspected by one of the following three methods according to the specific situation: A.4.1 Visual inspection method
Use the naked eye to observe the surface under natural light (or a light lamp with a power of not less than 10W) at a distance of 20-30cm from the test surface. If there is no residual stains and water, it is qualified, otherwise it is unqualified. A-4.2 Water-hanging method (surface tension method)
GB/T 18682--2002
Immerse the test piece [size: 50 mm×50 mm×(3~5) mm, quantity 23 pieces/time] of the same material as the part in artificial oil pollution and drain it. Then, soak it with distilled water after cleaning the part. Place it horizontally for 5s~105 and observe it. If the water film on the surface is evenly mixed, it is qualified. Otherwise, it is unqualified.
A.4.3 Copper sulfate method
Immerse the test piece (quantity, size, material and treatment method see A.4.2) or the part in acidic copper sulfate aqueous solution [formula: copper sulfate (chemically pure) 50g/L, eucalyx acid (chemically pure) 20g/L, distilled water balance. Leave it for 10s~30s and then lift it up. After washing with water, observe the surface. If the film is uniform and the color is consistent, it is qualified. Otherwise, it is unqualified. GB/T 18682—2002
B.1 Technical requirements
15. 1.1 Brand and state
Appendix B
(Normative Appendix)
Titanium target for physical vapor deposition technology
The materials used for titanium targets shall comply with GB/T 3620. 1 and GB/T 3620. 2. The material grade shall be better than TA2. The recommended brands and states are shown in Table 13. 1.
Brand and organizational state of titanium target materials
B.1.2 Chemical composition
The chemical composition of the materials used for titanium targets shall comply with the provisions of Table B.2. Table B.2 Chemical composition of titanium target material
Hot working/quenching state
Quick quenching state
Chemical composition()
Main component
Impurity elements
1Other elements generally include Al, Sn, Mo.Cr, Mn, Zr, Ni, Cu, Si, YN
2Other elements are not inspected when the product leaves the factory. They will only be inspected when the user requires and specified in the contract. B.1.3 Metallographic structure
Other elements
The cross section of the target material is observed under a low-power microscope. Cracks, pores, metal or non-metal inclusions and other defects visible to the naked eye are not allowed.
B.1.4 Nondestructive testing
If the purchaser requires additional testing, the testing method and judgment level used shall be agreed upon by both parties and specified in the contract. B.2 Test methods
B.2.1 Chemical composition arbitration analysis
The chemical composition arbitration analysis of the product shall be carried out in accordance with the provisions of GET4698. B. 2.2 Dimension measurement
The product dimension measurement can be carried out using a vernier caliper, etc. B.2.3 Metallographic structure inspection
The metallographic structure inspection shall be carried out in accordance with the provisions of B/T5168. 6
B.2.4 Nondestructive testing
GR/T 18682--2002
The ultrasonic testing of the product shall be carried out in accordance with the provisions of GB/I5193. If other methods are used for testing, the standards and judgment levels shall be agreed upon by the supplier and indicated in the contract.
B.3 Inspection rules
B.3. 1 Inspection and acceptance
B.3.1.1 Products shall be inspected by the supplier's technical supervision department to ensure that the product quality complies with the provisions of this standard and a quality certificate shall be issued. B.3.1.2 The buyer shall accept the received products in accordance with the provisions of this standard. B.3.2 Batch
Products shall be submitted for inspection in batches. Each batch shall consist of products of the same brand, smelting furnace, manufacturing method, state, specification and heat treatment furnace.
B.3.3 Inspection items
Each batch of products shall be inspected for chemical composition, size and metallographic structure. B. 3. 4 Sampling location and sampling quantity
B.3.4.1 The chemical composition analysis sample shall be cut from the original chain ingot or bad material by the supplier, and the buyer may take any sample from the finished product. B.3.4.2 The sample for metallographic structure determination shall be taken at random for each batch of products. B.3.4.3 The finished products shall be inspected without inspection. B.3.4.4 The dimensions of each product shall be measured. B.3.5 Retest
In the analysis of chemical composition, if one sample fails to meet the requirements, a sample from the batch of products shall be selected and analyzed again for the failed item; if one sample still fails to meet the requirements after repeated analysis, the whole batch shall be scrapped or inspected one by one, and the qualified ones shall be re-batch for acceptance.
B.4 Marking, packaging, transportation, storage
B.4.1 Product marking
The following markings shall be clearly given on the inspected products: a) Brand; b) Specimen; c) State; d) Melting furnace number; e) Batch number.
B.4.2 Packaging, packaging marking, transportation and storage The packaging, packaging marking, transportation and storage of products shall comply with the provisions of GB/T81B0. B.4.3 Quality certificate
Each batch of products shall have a quality certificate, indicating the following: a) Name and address of the supplier:
b) Product name;
c) Brand, state and specification;
d) Melting furnace number and batch number;
Net weight of the product, number of pieces;
Results of various analysis and inspections and the stamp of the technical supervision department g)
Number of this standard:
Packing date.
GB/T 18682—2002
C.0 Scope
Appendix C
(Normative Appendix)
Vacuum Technical Requirements for Physical Vapor Deposition TiN Equipment This appendix specifies the vacuum technical requirements for physical vapor deposition TiN equipment. This appendix applies to sputtering and ion plating vacuum coating equipment (hereinafter referred to as equipment) for physical vapor deposition TiV film. C.1 Technical Requirements
C. 1.1 Normal Operating Conditions of Equipment
.1.1.1 Ambient temperature: 10℃--35℃.
C.1.1.2 Relative condensation: not more than 80%. C.1.1.3 Cooling water inlet temperature: not higher than 25CC.1.1.4 Cooling water quality: city white water or water of equivalent quality. C.1.1.5 Power supply: three-phase (380±38)V, (50±1)Hz or single-phase (22022)V, (50±1)Hz. C.1.1.6 The pressure and temperature of compressed air and cooling water used by the equipment shall be clearly stated in the product manual. C.1.7 The equipment’s treatment requirements for workpieces before plating are shown in Appendix A. C.1.1.8 The environment around the equipment should be clean and the air should be fresh; there should be no dust or gas that can cause corrosion to the surface of electrical appliances and other metal parts or cause static electricity between metals.
C.1.2 Equipment vacuum technical requirements
C. 1. 2. 1 In addition to meeting the requirements of GB/T 11161 and JB/T 53021, the main vacuum technical requirements of the equipment shall also meet the requirements of Table C.1.
Vacuum technical indicators of the equipment
Name of explosive number
Limiting pressure/Pa
Evacuation time/min
Pressure rise rate/(Pa/h)
Vacuum chamber size
Workpiece size and rotation type
Workpiece baking method and baking temperature (working temperature of vacuum chamber)
Deposition source form, size, number, power Working current and working current of deposition source power supply Ion bombardment current Pressure, workpiece bias power
Equipment control mode and control accuracy
Equipment maximum power consumption
$5X10-*
Parameter value
(10Pa pumped to 1.3×10Pa)
$6×10
(10*Pa pumped to 6.7×10-3Pa)
According to design requirements
C.1.2.2 Equipment numbering compilation see JB/T7673. C.1.3 Structural requirements
C.1.3.1 The structural form and size of the vacuum pipes, static and dynamic sealing parts in the equipment see GB/16070. GB/T18682—2002
C1.3.2Install vacuum test gauges on the roughing pipeline, the water-cooled baffle of the front vacuum pipeline (if the main pump is a diffusion pump) and the vacuum chamber to measure the pressure of each part.
C.1.3.3If the main pump of the equipment is an oil diffusion pump, a water-cooled oil baffle cap and a water-cooled baffle should be installed on the inner and outer sides of the pump. C.1.3.4A vacuum regulating valve should be installed between the vacuum chamber and the vacuum unit of the equipment. C.1.3.5The vacuum chamber of the equipment should have an observation window. C.1.3.6
When the equipment is used for high-temperature deposition of TiN thin film, the vacuum chamber should have a cooling water jacket. When the workpiece rack in the equipment has both revolution and rotation, the ratio of the revolution speed to the rotation speed shall not be an integer. C. 1. 3. 7
C, 1.3.8 The insulating sleeves and pads in the vacuum chamber should be made of high temperature resistant insulating materials, such as tetrafluoroethylene, ceramics, etc., and protective measures should be taken to prevent the insulating sleeves and pads from depositing coating materials.
C.14 Manufacturing quality
C.1.4.1 The raw materials used in the manufacture of the main parts of the equipment should comply with the provisions of the corresponding material standards and should have a quality certificate. If the certificate is incomplete or has problems, the inspection department of the manufacturer shall be responsible for re-inspection. C.1.4.2 The machining quality of the parts and the welding quality of the equipment shall comply with the provisions of the manufacturer's technical documents. C.1.4.3 The assembly quality of the equipment shall comply with the provisions of the manufacturer's technical documents. During assembly, the surfaces of the parts in vacuum during work should be effectively vacuum cleaned and sealed, and the moving parts should move flexibly and smoothly after assembly. C.1.4.4 The coating deposition source, ion bombardment, workpiece bias, workpiece heating, membrane port monitoring and other devices in the equipment should be debugged item by item and jointly debugged, and the performance should meet the design requirements and operate reliably. The equipment should be able to run normally during the workpiece heating process. C.1.4.5 The self-made or purchased pumps, valves, meters, meters and other mechanical and electrical components used in the equipment should comply with the provisions of the corresponding product standards, and should have a quality certificate or be inspected by the manufacturer's inspection department before use: C.1.4.6 The manufacturing quality of the electrical devices matched with the equipment should comply with the provisions of the manufacturing technical documents, and should ensure the safety and reliability of the equipment during operation and operation. The layout of the lines in the installation should be neat and clear for easy maintenance. The insulation resistance value of the electrical circuit in the device shall not be less than 2M0 for circuits below 500V, 2.5M0 for 501V-1000V circuits, 3.5M0 for 1001V~~3000V circuits, and 6M0 for 3001V~-10000V circuits. C.1.4.7 The appearance of the equipment shall be free of sharp corners, protrusions and rough surfaces that are not required for functionality. The edges of the joint surfaces shall be neat and symmetrical, without obvious misalignment. The plating of the metal parts shall be solid, without deterioration, shedding and rust. All fasteners shall have an anti-corrosion layer. The coating surface of the equipment shall be bright, beautiful, firm and without peeling. C.1.4.8 The vacuum chamber must be made of austenitic stainless steel. C.1.4.9 For decorative plating, the equipment shall ensure that no arc is left on the surface of the workpiece under normal circumstances. C.1.5 Safety protection
C.1.5.1 The water cooling system of key components should have an alarm device for water failure or insufficient water pressure and an emergency cooling water interface, and an interlocking protection mechanism should be provided in the parts related to the power supply, vacuum system, and transmission system. The action of these protection mechanisms should be sensitive and reliable. C.1.5.2 When electric or pneumatic valves are used in the vacuum system, interlocking protection should be provided. C.1.5.3 The equipment and its affiliated electrical devices should be equipped with grounding devices. The grounding point should have a clear mark. C.1.5.4 The connecting wires between the equipment and its affiliated electrical devices should have protection measures to prevent wear or damage. C.1.5.5 The electrical circuits and electrical optical components of the equipment should be guaranteed not to be affected by cooling blankets, lubricating oils and other harmful substances. C.1.5.6 After a sudden power outage during operation, the electrical appliances should be prevented from automatically connecting when the power supply is restored: C.1.5-7 In the electrical circuits of the equipment, necessary protection measures such as short-circuit protection and over-constant current protection should be taken according to the load conditions. C.1.5.8 For equipment using high voltage power supply, the vacuum chamber with high voltage electrodes and the connection with high voltage line should have safety interlocking device.
C.1.5.9 High voltage, high voltage and other radiation parts in the equipment that may harm human body should be equipped with shielding device.1.
Vacuum technical indicators of the equipment
Name of explosive number
Limiting pressure/Pa
Evacuation time/min
Pressure rise rate/(Pa/h)
Vacuum chamber size
Workpiece size and rotation
Workpiece baking method and baking temperature (working temperature of vacuum chamber)
Deposition source form, size, number, power Working current and working current of deposition source power supply Ion bombardment current Pressure, workpiece bias power
Equipment control mode and control accuracy
Equipment maximum power consumption
$5X10-*
Parameter value
(10Pa pumped to 1.3×10Pa)
$6×10
(10*Pa pumped to 6.7×10-3Pa)
According to design requirements
C.1.2.2 Equipment numbering compilation see JB/T7673. C.1.3 Structural requirements
C.1.3.1 The structural form and size of the vacuum pipes, static and dynamic sealing parts in the equipment see GB/16070. GB/T18682—2002
C1.3.2Install vacuum test gauges on the roughing pipeline, the water-cooled baffle of the front vacuum pipeline (if the main pump is a diffusion pump) and the vacuum chamber to measure the pressure of each part.
C.1.3.3If the main pump of the equipment is an oil diffusion pump, a water-cooled oil baffle cap and a water-cooled baffle should be installed on the inner and outer sides of the pump. C.1.3.4A vacuum regulating valve should be installed between the vacuum chamber and the vacuum unit of the equipment. C.1.3.5The vacuum chamber of the equipment should have an observation window. C.1.3.6
When the equipment is used for high-temperature deposition of TiN thin film, the vacuum chamber should have a cooling water jacket. When the workpiece rack in the equipment has both revolution and rotation, the ratio of the revolution speed to the rotation speed shall not be an integer. C. 1. 3. 7
C, 1.3.8 The insulating sleeves and pads in the vacuum chamber should be made of high temperature resistant insulating materials, such as tetrafluoroethylene, ceramics, etc., and protective measures should be taken to prevent the insulating sleeves and pads from depositing coating materials.
C.14 Manufacturing quality
C.1.4.1 The raw materials used in the manufacture of the main parts of the equipment should comply with the provisions of the corresponding material standards and should have a quality certificate. If the certificate is incomplete or has problems, the inspection department of the manufacturer shall be responsible for re-inspection. C.1.4.2 The machining quality of the parts and the welding quality of the equipment shall comply with the provisions of the manufacturer's technical documents. C.1.4.3 The assembly quality of the equipment shall comply with the provisions of the manufacturer's technical documents. During assembly, the surfaces of the parts in vacuum during work should be effectively vacuum cleaned and sealed, and the moving parts should move flexibly and smoothly after assembly. C.1.4.4 The coating deposition source, ion bombardment, workpiece bias, workpiece heating, membrane port monitoring and other devices in the equipment should be debugged item by item and jointly debugged, and the performance should meet the design requirements and operate reliably. The equipment should be able to run normally during the workpiece heating process. C.1.4.5 The self-made or purchased pumps, valves, meters, meters and other mechanical and electrical components used in the equipment should comply with the provisions of the corresponding product standards, and should have a quality certificate or be inspected by the manufacturer's inspection department before use: C.1.4.6 The manufacturing quality of the electrical devices matched with the equipment should comply with the provisions of the manufacturing technical documents, and should ensure the safety and reliability of the equipment during operation and operation. The layout of the lines in the installation should be neat and clear for easy maintenance. The insulation resistance value of the electrical circuit in the device shall not be less than 2M0 for circuits below 500V, 2.5M0 for 501V-1000V circuits, 3.5M0 for 1001V~~3000V circuits, and 6M0 for 3001V~-10000V circuits. C.1.4.7 The appearance of the equipment shall be free of sharp corners, protrusions and rough surfaces that are not required for functionality. The edges of the joint surfaces shall be neat and symmetrical, without obvious misalignment. The plating of the metal parts shall be solid, without deterioration, shedding and rust. All fasteners shall have an anti-corrosion layer. The coating surface of the equipment shall be bright, beautiful, firm and without peeling. C.1.4.8 The vacuum chamber must be made of austenitic stainless steel. C.1.4.9 For decorative plating, the equipment shall ensure that no arc is left on the surface of the workpiece under normal circumstances. C.1.5 Safety protection
C.1.5.1 The water cooling system of key components should have an alarm device for water failure or insufficient water pressure and an emergency cooling water interface, and an interlocking protection mechanism should be provided in the parts related to the power supply, vacuum system, and transmission system. The action of these protection mechanisms should be sensitive and reliable. C.1.5.2 When electric or pneumatic valves are used in the vacuum system, interlocking protection should be provided. C.1.5.3 The equipment and its affiliated electrical devices should be equipped with grounding devices. The grounding point should have a clear mark. C.1.5.4 The connecting wires between the equipment and its affiliated electrical devices should have protection measures to prevent wear or damage. C.1.5.5 The electrical circuits and electrical optical components of the equipment should be guaranteed not to be affected by cooling blankets, lubricating oils and other harmful substances. C.1.5.6 After a sudden power outage during operation, the electrical appliances should be prevented from automatically connecting when the power supply is restored: C.1.5-7 In the electrical circuits of the equipment, necessary protection measures such as short-circuit protection and over-constant current protection should be taken according to the load conditions. C.1.5.8 For equipment using high voltage power supply, the vacuum chamber with high voltage electrodes and the connection with high voltage line should have safety interlocking device.
C.1.5.9 High voltage, high voltage and other radiation parts in the equipment that may harm human body should be equipped with shielding device.1.
Vacuum technical indicators of the equipment
Name of explosive number
Limiting pressure/Pa
Evacuation time/min
Pressure rise rate/(Pa/h)
Vacuum chamber size
Workpiece size and rotation
Workpiece baking method and baking temperature (working temperature of vacuum chamber)
Deposition source form, size, number, power Working current and working current of deposition source power supply Ion bombardment current Pressure, workpiece bias power
Equipment control mode and control accuracy
Equipment maximum power consumption
$5X10-*
Parameter value
(10Pa pumped to 1.3×10Pa)
$6×10
(10*Pa pumped to 6.7×10-3Pa)
According to design requirements
C.1.2.2 Equipment numbering compilation see JB/T7673. C.1.3 Structural requirements
C.1.3.1 The structural form and size of the vacuum pipes, static and dynamic sealing parts in the equipment see GB/16070. GB/T18682—2002
C1.3.2Install vacuum test gauges on the roughing pipeline, the water-cooled baffle of the front vacuum pipeline (if the main pump is a diffusion pump) and the vacuum chamber to measure the pressure of each part.
C.1.3.3If the main pump of the equipment is an oil diffusion pump, a water-cooled oil baffle cap and a water-cooled baffle should be installed on the inner and outer sides of the pump. C.1.3.4A vacuum regulating valve should be installed between the vacuum chamber and the vacuum unit of the equipment. C.1.3.5The vacuum chamber of the equipment should have an observation window. C.1.3.6
When the equipment is used for high-temperature deposition of TiN thin film, the vacuum chamber should have a cooling water jacket. When the workpiece rack in the equipment has both revolution and rotation, the ratio of the revolution speed to the rotation speed shall not be an integer. C. 1. 3. 7
C, 1.3.8 The insulating sleeves and pads in the vacuum chamber should be made of high temperature resistant insulating materials, such as tetrafluoroethylene, ceramics, etc., and protective measures should be taken to prevent the insulating sleeves and pads from depositing coating materials.
C.14 Manufacturing quality
C.1.4.1 The raw materials used in the manufacture of the main parts of the equipment should comply with the provisions of the corresponding material standards and should have a quality certificate. If the certificate is incomplete or has problems, the inspection department of the manufacturer shall be responsible for re-inspection. C.1.4.2 The machining quality of the parts and the welding quality of the equipment shall comply with the provisions of the manufacturer's technical documents. C.1.4.3 The assembly quality of the equipment shall comply with the provisions of the manufacturer's technical documents. During assembly, the surfaces of the parts in vacuum during work should be effectively vacuum cleaned and sealed, and the moving parts should move flexibly and smoothly after assembly. C.1.4.4 The coating deposition source, ion bombardment, workpiece bias, workpiece heating, membrane port monitoring and other devices in the equipment should be debugged item by item and jointly debugged, and the performance should meet the design requirements and operate reliably. The equipment should be able to run normally during the workpiece heating process. C.1.4.5 The self-made or purchased pumps, valves, meters, meters and other mechanical and electrical components used in the equipment should comply with the provisions of the corresponding product standards, and should have a quality certificate or be inspected by the manufacturer's inspection department before use: C.1.4.6 The manufacturing quality of the electrical devices matched with the equipment should comply with the provisions of the manufacturing technical documents, and should ensure the safety and reliability of the equipment during operation and operation. The layout of the lines in the installation should be neat and clear for easy maintenance. The insulation resistance value of the electrical circuit in the device shall not be less than 2M0 for circuits below 500V, 2.5M0 for 501V-1000V circuits, 3.5M0 for 1001V~~3000V circuits, and 6M0 for 3001V~-10000V circuits. C.1.4.7 The appearance of the equipment shall be free of sharp corners, protrusions and rough surfaces that are not required for functionality. The edges of the joint surfaces shall be neat and symmetrical, without obvious misalignment. The plating of the metal parts shall be solid, without deterioration, shedding and rust. All fasteners shall have an anti-corrosion layer. The coating surface of the equipment shall be bright, beautiful, firm and without peeling. C.1.4.8 The vacuum chamber must be made of austenitic stainless steel. C.1.4.9 For decorative plating, the equipment shall ensure that no arc is left on the surface of the workpiece under normal circumstances. C.1.5 Safety protection
C.1.5.1 The water cooling system of key components should have an alarm device for water failure or insufficient water pressure and an emergency cooling water interface, and an interlocking protection mechanism should be provided in the parts related to the power supply, vacuum system, and transmission system. The action of these protection mechanisms should be sensitive and reliable. C.1.5.2 When electric or pneumatic valves are used in the vacuum system, interlocking protection should be provided. C.1.5.3 The equipment and its affiliated electrical devices should be equipped with grounding devices. The grounding point should have a clear mark. C.1.5.4 The connecting wires between the equipment and its affiliated electrical devices should have protection measures to prevent wear or damage. C.1.5.5 The electrical circuits and electrical optical components of the equipment should be guaranteed not to be affected by cooling blankets, lubricating oils and other harmful substances. C.1.5.6 After a sudden power outage during operation, the electrical appliances should be prevented from automatically connecting when the power supply is restored: C.1.5-7 In the electrical circuits of the equipment, necessary protection measures such as short-circuit protection and over-constant current protection should be taken according to the load conditions. C.1.5.8 For equipment using high voltage power supply, the vacuum chamber with high voltage electrodes and the connection with high voltage line should have safety interlocking device.
C.1.5.9 High voltage, high voltage and other radiation parts in the equipment that may harm human body should be equipped with shielding device.7 The surface of the equipment should be free of sharp corners, protrusions and rough surfaces that are not required for functionality. The edges of the joint surfaces should be neat and symmetrical, without obvious misalignment. The coating of the metal parts should be solid, without deterioration, shedding and rust. All fasteners should have an anti-corrosion layer. The coating surface of the equipment should be bright, beautiful, firm and without peeling. C.1.4.8 The vacuum chamber must be made of austenitic stainless steel. C.1.4.9 For decorative plating, the equipment should ensure that no arc is left on the surface of the workpiece under normal circumstances. C.1.5 Safety protection
C.1.5.1 The water cooling system of key components should have an alarm device for water failure or insufficient water pressure and an emergency cooling water interface, and there should be an interlocking protection mechanism in the parts related to the power supply, vacuum system and transmission system. The action of these protection mechanisms should be sensitive and reliable. C.1.5.2 When electric or pneumatic valves are used in the vacuum system, there should be interlocking protection. C.1.5.3 The equipment and its attached electrical devices should be equipped with grounding devices. The grounding points should be clearly marked. C.1.5.4 The connecting wires between the equipment and its attached electrical devices should be protected from wear or damage. C.1.5.5 The electrical circuits and electrical optical components of the equipment should be guaranteed not to be affected by cooling blankets, lubricating oils and other harmful substances. C.1.5.6 After a sudden power outage during operation, the electrical appliances should be prevented from automatically connecting when the power is restored: C.1.5-7 In the electrical circuits of the equipment, necessary protection measures such as short-circuit protection and constant current protection should be taken according to the load conditions. C.1.5.8 For equipment using high-voltage power supply, the opening of the vacuum chamber equipped with high-voltage electrodes and the connection with the high-voltage circuit should have a safety interlock device.
C.1.5.9 High-voltage, high-voltage and other radiation parts in the equipment that may be harmful to the human body should be equipped with shielding devices. 97 The surface of the equipment should be free of sharp corners, protrusions and rough surfaces that are not required for functionality. The edges of the joint surfaces should be neat and symmetrical, without obvious misalignment. The coating of the metal parts should be solid, without deterioration, shedding and rust. All fasteners should have an anti-corrosion layer. The coating surface of the equipment should be bright, beautiful, firm and without peeling. C.1.4.8 The vacuum chamber must be made of austenitic stainless steel. C.1.4.9 For decorative plating, the equipment should ensure that no arc is left on the surface of the workpiece under normal circumstances. C.1.5 Safety protection
C.1.5.1 The water cooling system of key components should have an alarm device for water failure or insufficient water pressure and an emergency cooling water interface, and there should be an interlocking protection mechanism in the parts related to the power supply, vacuum system and transmission system. The action of these protection mechanisms should be sensitive and reliable. C.1.5.2 When electric or pneumatic valves are used in the vacuum system, there should be interlocking protection. C.1.5.3 The equipment and its attached electrical devices should be equipped with grounding devices. The grounding points should be clearly marked. C.1.5.4 The connecting wires between the equipment and its attached electrical devices should be protected from wear or damage. C.1.5.5 The electrical circuits and electrical optical components of the equipment should be guaranteed not to be affected by cooling blankets, lubricating oils and other harmful substances. C.1.5.6 After a sudden power outage during operation, the electrical appliances should be prevented from automatically connecting when the power is restored: C.1.5-7 In the electrical circuits of the equipment, necessary protection measures such as short-circuit protection and constant current protection should be taken according to the load conditions. C.1.5.8 For equipment using high-voltage power supply, the opening of the vacuum chamber equipped with high-voltage electrodes and the connection with the high-voltage circuit should have a safety interlock device.
C.1.5.9 High-voltage, high-voltage and other radiation parts in the equipment that may be harmful to the human body should be equipped with shielding devices. 9
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