JJF 1190-2008 Dust Particle Counter Calibration Specification JJF1190-2008 Standard download decompression password: www.bzxz.net
This specification applies to the calibration of light scattering laser dust particle counters.


1 Scope (1)
2 Terminology (1)
3 Overview (1)
4 Metrological characteristics (1)
4.1 Appearance requirements (1)
4.2 Insulation resistance (1) 4.3
Electric strength (1) 4.4
Self-cleaning time (2) 4.5
Flow error (2) 4.6
Timing error (2)
4.7 Repeatability (2)
4.8 Particle size distribution error (2)
4.9 Particle concentration indication error (2)
5 Calibration conditions (2)
5.1 Calibration environment (2)
5.2 Main equipment for calibration (2)
6 Calibration items and calibration methods (2)
6.1 Appearance requirements (2)
6.2 Insulation resistance (3)
6.3 Electric strength (3)
6.4 Self-cleaning time (3)
6.5 Flow error (3)
6.6 Timing error (3)
6.7 Repeatability (3)
6.8 Particle size distribution error (4)
6.9 Particle concentration indication error (5)
7 Expression of calibration results (5)
8 Recalibration time interval (6)
Appendix A Dilution and storage method of monodisperse particle emulsion (7)
Appendix B Dust particle generation measurement device (8)
Appendix C Adjustment of aerosol concentration of monodisperse particles (9)
Appendix D Uncertainty evaluation of particle concentration indication error measurement results (10)
Appendix E Uncertainty evaluation of particle size distribution error measurement results (12)
Appendix F Original record format (14)
Appendix G Calibration result inner page format (15)

National Metrology Technical Specification of the People's Republic of China JJF1190-2008
Calibration Specification for Airborne Particle Counter
Calibration Specification for Airborne Particle Counter2008-03-24Promulgated
Implementation on 2008-09-24
Promulgated by the General Administration of Quality Supervision, Inspection and Quarantine JJF1190—2008
Calibration Specification for Airborne Particle Counter
JJF1190-2008
Replaces JJG547
This specification was approved by the General Administration of Quality Supervision, Inspection and Quarantine on March 24, 2008, and came into effect on September 24, 2008.
Responsible unit: National Technical Committee for Metrology of Environmental Chemistry Main drafting unit: Shanghai Institute of Metrology and Testing Technology Participating drafting unit: Suzhou Baishen Technology Co., Ltd. This specification is entrusted to the National Technical Committee for Metrology of Environmental Chemistry to be responsible for the interpretation of this specification Main drafters:
JJF1190-2008
Yu Peiying (Shanghai Institute of Metrology and Testing Technology) Ding Zhenmin (Shanghai Institute of Metrology and Testing Technology) Liu Yue (Shanghai Institute of Metrology and Testing Technology) Participating drafters:
Hu Xuecheng (Suzhou Baishen Technology Co., Ltd.) 2
Scope·||t t||Overview·
Metering characteristics·
Appearance requirements.
Insulation resistance
Electrical strength:
Self-cleaning time
Flow error·
Timing error
Repeatability
Particle size distribution error
Particle concentration indication error
Calibration conditions.
Calibration environment
Main equipment for calibration
Calibration items and calibration methods
Appearance requirements·
Insulation resistance·
Electrical strength·
Self-cleaning time| |tt||Flow error
Timing error
Repeatability
Error in particle size distribution
Error in indication of particle concentration
Expression of calibration result…·
Recalibration time interval
Appendix A
Appendix B
Appendix C
Appendix D
Appendix E
Appendix F
Appendix G
JJF1190-2008
Method for dilution and storage of monodisperse particle emulsionsDue particle generation measuring device
Aerosol of monodisperse particles Adjustment record of glue concentration
Uncertainty evaluation of measurement results of particle concentration indication errorUncertainty evaluation of measurement results of particle size distribution errorOriginal record format
Calibration result inner page format
(1)
(2)
(2)
(3)
(3)
(5)
(5)
JJF1190-2008
Calibration specification for dust particle counter
This specification applies to the calibration of light scattering laser dust particle counter (hereinafter referred to as particle counter). 2 Terminology
2.1 Monodisperse particles A batch of polystyrene spherical particles, the relative standard deviation of the particle diameter distribution is ≤5%, see Appendix A. 2.2 Particle size
The diameter of a discrete particle in the air (referred to as particle size) is the diameter of a monodisperse particle corresponding to the intensity of scattered light, in units of um.
The particle size measured by the particle counter is within the range of (0.110)um. 2.3 Particle concentration (particle concentration) The number of discrete particles of not less than the specified particle size in the unit volume of the measured air within the specified sampling flow rate and sampling time.
2.4 Particle size distribution error (error of particlesize) The measurement error of the particle counter when measuring the percentage of particles of different particle sizes in the aerosol 3 Overview
The particle counter is an instrument for measuring the particle size and particle concentration of discrete particles in clean air to determine the cleanliness level of clean rooms and clean environments. Dust particle counters can also be used to measure the dust content in the air and the performance test of clean benches and filters
The particle counter is mainly composed of gas path system, optical system, data processing system and other parts. Its working principle is: particles in the air scatter incident light, and the intensity of scattered light is related to the particle size. When the air containing dust particles is inhaled from the sampling port of the dust particle counter, the dust particles are irradiated by light when passing through the light-sensitive area, and scatter light pulse signals that are proportional to the particle size. The signal is received by the photosensitive device and converted into a corresponding electric pulse signal and then amplified. By counting the electric pulses in a detection cycle, the number of dust particles in the unit volume of sampled air, that is, the particle concentration, can be known.
4 Metrological characteristics
4.1 Appearance requirements
No defects that affect the calibration results: All parts should be complete and reliably connected, and there should be no damage or deformation that affects use; all knobs and switches should be free of damage and stuck. 4.2 Insulation resistance
The insulation resistance of the instrument shall not be less than 20MQ.
4.3 Electrical Strength
JJF1190—2008
The instrument is subjected to 1.5kV/50H1z AC test voltage and maintained for 1min. There should be no arcing and breakdown. 4.4 Self-cleaning time
Not more than 10min.
4.5 Flow Error
The error of the sampling flow setting value shall not exceed ±5%4.6 Timing Error
The timing error of the sampling time of 6min shall not exceed 1s. 4.7 Repeatability
Under the same measurement conditions, the repeatability of the continuous measurement value of particle concentration shall not exceed 10%FS. 4.8 Particle Size Distribution Error
The distribution error of 0.5um and 5um particle size blocks shall not exceed 30%. 4.9 Particle Concentration Indication Error
When the particle counter is in normal working state, the particle concentration indication error of the 0.5um particle size block shall not exceed ±30%FS.
Note: The above technical indicators are for reference during calibration. 5
Calibration conditions
5.1 Calibration environment
Environmental temperature: (20±5)C:
Environmental relative humidity: 75%RH;
Power supply: (220+22)V, (50±2)Hz: Laboratory: Cleanroom or clean area with cleanliness level 10000. 5.2 Main equipment for calibration
5.2.1 Monodisperse particles: Monodisperse particles of each particle size range (0.1~10)um, the relative standard deviation of the particle size distribution is 5%. The dilution of monodisperse particles is shown in Appendix A. 5.2.2 Dust particle generation and measurement device: The particle size range of the generated particles is (0.1~10)um, and the particle concentration is (1000~100000) pieces/28.3L: The flow stability is controlled at ±5%/8h: The repeatability of the particle concentration measurement is ≤5%. For detailed technical requirements, please refer to Appendix B.
Stopwatch: 0.01S scale value
Flowmeter: 40L/15 level and 4L/1.5 level. Pure water: produced by reverse osmosis method, meeting the requirements of GB/T17323-1998. Volumetric bottle of pure water: 100mL, Class A.
Micro-injector: 10,4%FS.
Ultra-high efficiency filter: can filter particles of 0.1um. Insulation resistance meter: 500V, Class 10.
Withstand voltage tester: (0~5)kV, Class 5. Calibration items and calibration methods
Appearance requirements
JJF1190—2008
Turn on the machine, preheat according to the particle counter manual, and conduct a visual inspection. 6.2 Insulation resistance
The instrument is in a non-working state, the switch is in the on position, and a 500V megohmmeter is used to check the insulation resistance between the connection line of the power phase line, the neutral line and the ground line of the particle counter. 6.3 Electrical strength
The instrument is in a non-working state: the switch is in the on position, and a test voltage is applied to the connection line of the power phase line, the neutral line and the ground line using a withstand voltage tester. The test voltage is a basic sinusoidal AC voltage with a frequency of 50Hz, and the maximum leakage current is not more than 5mA.
Then it gradually rises to 1.5kV. Maintain for 1min
and then steadily drops to zero. No arcing or breakdown should occur. 6.4 Cleaning time
After the instrument is preheated and enters the normal working state, first measure the particle concentration of the air in the laboratory for 1 minute, then connect the particle counter sampling port to the ultra-high efficiency filter (or the self-cleaning port of the instrument), so that the particle counter is in the self-cleaning state, and start timing. Each sampling time is 1m and the timing is stopped when the particle concentration is zero three times in a row.
The time from the start of the instrument to the stop of the timing is the self-cleaning time. 6.5 Flow error
6.5.1 The sampling flow is required to be carried out in a 10000 clean room, and the temperature, humidity and atmospheric pressure during the measurement are recorded.
6.5.2 Connect the standard flow meter to the air inlet of the instrument, and take over as much as possible. May be short. Turn on the sampling pump, and after the particle counter enters the normal manual operation state, adjust the instrument flow to its set value. Measure the flow sample once,
6.5.3 Calculate the sampling flow error Q:
Where: Q is the average value of the two actual measurement values ​​of the particle counter sampling flow. —The set nominal value of the particle counter sampling flow. 6.6 Timing error
, 0.5h later, repeat the same
6.6.1 After the particle counter enters the normal operation state, set the sampling interval to 6min, and start the stopwatch and particle counter at the same time. When the particle counter reaches the set sampling interval, stop timing. Record the last displayed time t of the stopwatch.
According to the formula (2 ）Calculate the timing error △1:
Where: to
The sampling timing time of the particle counter, .=3605: t
6.7 Repeatability
Stopwatch timing time.
Use the Appendix B device to conduct repeatability test. After the instrument under test enters the normal working state, it should be self-cleaned first. 6.7.1bzxz.net
6.7.2 After fully shaking the monodisperse particle dilution liquid of about 0.5um, inject it into the spray head JJF1190—2008
of the Appendix B device. After atomization, the particle concentration is controlled between (4500～5500)/28.3 liters. After atomization, input it into the particle counter under test according to the instrument operating procedures.
6.7 .3 Start measuring the particle concentration after the particle counter has been operating normally for 5 minutes, and take samples continuously for at least 10 times. 6.7.1
Calculate the average particle concentration of 0.5um according to formula (3): s
Wherein:
(n10）
The measured values ​​of the particle concentration of the particle counter greater than or equal to 0.5um and the repeatability of the particle counter are calculated according to formula (4): Vn
Wherein:
Cas）
The reference value, here is the maximum particle concentration value of the cleanliness level of the aerosol, 10,000 particles/28.3 liters
6.8 Particle size distribution error
The particle counter should be self-cleaned after entering the normal working state. 6.8.1
6.8.2 According to the method in 6.7.2, the monodisperse particle dilution liquid of about 0.60um is input into the particle counter under test through the device in Appendix B
After the particle counter has been in normal operation for 5 minutes, the particle concentration is measured and the sampling is continued for 3 times. 6.8.3
According to formula (5), the particle size distribution h is calculated as follows:
hw=co×100%
Wherein: co.5
The particle concentration of particles greater than or equal to 0.5um measured value of the particle counter under test, the tth measured value of the particle concentration of particles greater than or equal to 0.3um measured value of the particle counter under test. The average value of the particle size distribution is calculated as follows: 6.8.5
The particle counter is then self-cleaned
According to the method in 6.7.2, the monodisperse standard particles of about 0.4um are input into the particle counter under test through the particle concentration misting device in Appendix B.
6.8.8 After the particle counter has been in normal operation for 5 minutes, start measuring the particle concentration and take samples for 3 consecutive times. Each sample is Imin
. Calculate the particle size distribution according to formula (7): h3
h2,=Co×100%
wherein, h is the measured value of the particle concentration of particles greater than or equal to 0.5um of the particle counter under test; h is the measured value of the particle concentration of particles greater than or equal to 0.3um of the particle counter under test. 6.8.10 Calculate the average value of the particle size distribution according to formula (8): h
JJF1190—2008
6.8.11 Calculate the particle size distribution error △hAh according to formula (9): hh Theoretical value is 100% when using 0.6um particles for measurement and 00% when using 0.4μm particles for measurement. 6.8.12 In the same way, measure and calculate the particle size distribution error at the 5.0 block. 6.9 Particle concentration indication error
6.9.1 After the particle counter has been preheated: first perform self-cleaning (9)
6.9.2 Use the device in Appendix B to generate a stable aerosol with a 0.5um monodisperse particle dilution, and input it into the precision particle counter and the particle counter under test with the same flow rate. The concentration of atomized particles is controlled between (4500~5500)/28.3 liters.
6.9.3 After the particle counter has been operating normally for 5 minutes, the particle concentration is measured and the particle counter measures 1e times continuously. 6.9.4 Calculate the average value of 10 measurements of the precision counter according to formula (10): c17
(n=10)
6.9.5 Calculate the average value of 10 measurements of the particle counter under test according to formula (11): 1(n=10)
Wherein: C
the kth measurement value of the particle concentration greater than or equal to 0.5um of the particle counter under test. 6.9.6 Calculate the particle concentration indication error 1 according to formula (12): Ya = 2" × 100%
Where: CN
Reference value, here is the maximum particle concentration value of the cleanliness level of the aerosol 10000 / 28.3 liters.
6.9.7 Similarly, the particle concentration of the monodisperse particle dilution liquid is controlled between (45000 ~ 55000) / 28.3 liters. Use the above method to detect and calculate the particle concentration indication error 2-G × 100%
Where: c——- reference value, here is The maximum particle concentration value of the cleanliness level of aerosol is 100,000 particles/28.3 liters.
7 Expression of calibration results
The calibration results should be reflected in the calibration certificate or calibration report. The calibration certificate or calibration report should include at least the following information: Title, such as "Calibration Certificate" or "Calibration Report"; Laboratory name and address;
Location of calibration:
Unique identification of the calibration certificate or calibration report (such as number), identification of each page and total number of pages: Unit and address of the calibration sender:
Description and clear definition of the object of calibration Identification;
JJF1190-—2008
Calibration date, if necessary, the date of submission for calibration: If it is related to the validity and application of the calibration results, the sampling procedure should be explained: The technical specifications based on which the calibration is based;
Traceability and validity of the measurement standards used for calibration: Description of the calibration environment;
Explanation of the calibration results and measurement uncertainty: Valid identification of the issuer of the calibration certificate or calibration report and the date of issuance Statement that the calibration results are only valid for the calibrated object shall not be made without the written approval of the laboratory. Partially copied certificates or reports of disease d
Recalibration time interval
The recalibration time interval of the particle counter shall be determined by the user, and it is recommended not to exceed 1 year T
ISHING
Appendix A
JJF1190—2008
Dilution and storage method of monodisperse particle emulsion A. 1 Storage method of monodisperse particles
A.1.1 High-concentration polystyrene emulsion is called stock solution and needs to be stored in a refrigerator. A.1.2 The temperature of the refrigerator should be maintained between (5 and 15)°C. A.1.3 The stock solution diluted with pure water is called monodisperse particle solution! It should be placed in a ground glass bottle, tightly capped and stored in a refrigerator.
The solution must be shaken well before the required amount can be taken out for use.
If the solution shows a lump phenomenon,
it should generally be scrapped
The stock solution or dilution stored for more than two years
monodisperse particle solution dilution method
needs to be recalibrated when used. Drop the high-concentration polystyrene stock solution directly into a clean micro-beaker to avoid contamination of the stock solution. The micro-sampler of zL transfers 50L of stock solution from the micro-beaker to a 100mL volumetric flask. Select
and inject pure water into the volumetric flask. When it is close to the 100ml mark, cover the stopper of the volumetric flask and turn it back and forth 3 times to make the solution fully wet. Then inject pure water into
until it reaches the 100mL mark.
METROL
Appendix B
The working principle of this device is as follows:
Spray head
Built-in monodisperse particle diluent
Tested particle counter
JJE1190—2008
Dust particle generation measurement device
Clean air
Buffer 1
(Aerosol)
Buffer 2
(Stable aerosol)
Figure B.1 Working principle of dust particle generation measurement device Figure B.1 Working principle
Precision particle counter
The spray head is filled with a monodisperse particle diluent of a certain particle size. By spray drying, a stable aerosol of monodisperse particles is obtained in the buffer of this device (as shown in Figure B.1). The precision particle counter can display the particle concentration of the aerosol.
Technical requirements
Measurement range of the device: particle size (0.1~10) um, particle concentration (1000~100000) pieces/28.3 liters B.2.1
The flow stability of each gas path in the device is controlled at 5%/8h. B.2.3
Using this device, the repeatability of particle concentration measurement is ≤5%. The precision particle counter in this device must participate in the comparison organized by the state and obtain satisfactory results before B.2.4
Calibrate the particle concentration indication error, use a precision particle counter to measure the stable measured object generated by the same dust particle measurement device, take the average value of these measurement results as the standard value, and assign values ​​to several precision particle counters respectively.
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