JB/T 2965-1992 Sputtering ion pump performance test method

Basic Information

Standard ID: JB/T 2965-1992

Standard Name: Sputtering ion pump performance test method

Chinese Name: 溅射离子泵性能测试方法

Standard category:Machinery Industry Standard (JB)

state:in force

Date of Release1992-01-01

Date of Implementation:1992-01-01

standard classification number

Standard Classification Number:Machinery>>General Machinery and Equipment>>J78 Vacuum Technology and Equipment

associated standards

alternative situation:JB 2965-81

Publication information

other information

Focal point unit:Shenyang Vacuum Technology Research Institute

Publishing department:Shenyang Vacuum Technology Research Institute

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Introduction to standards:

This standard specifies the performance test method for sputtering ion pumps. This standard applies to ion pumps with a pumping speed greater than 10Ls(-1). JB/T 2965-1992 Performance test method for sputtering ion pumps JB/T2965-1992 Standard download decompression password: www.bzxz.net