Standard guide for specimen handling in auger electron spectroscopy and X-ray photoelectron spectroscopy
Some standard content:
Electronic Industry Standard of the People's Republic of China
SJ/T 10458—93
Standard guide for sample handling for Auger electron spectroscopy and X-ray photoelectron spectroscopy
Standard guide for sample handling for Auger electron spectroscopy and X-ray photoelectron spectroscopy1993-12-17Promulgated
Implemented on 1994-06-01
Ministry of Electronics Industry of the People's Republic of China: Issued Electronic Industry Standard of the People's Republic of China
Standard guide for sample handling for Auger electron spectroscopy and X-ray photoelectron spectroscopy
S1/T 10468-93
Standard guide for sample handling for Auger electron spectroscopy and X-ray photoelectron spectroscopy 1.1 Contents
This standard guide specifies the details of sample handling before, during and after surface analysis. 1.2 Application
This standard guide applies to AES and X-ray photoelectron spectroscopy (XPS), and also to other surface sensitive spectroscopic techniques (such as ion spectroscopy, secondary ion spectroscopy, etc.). This standard guide may involve hazardous operations and modifications, but all relevant safety issues are explained: Before using this guide, the user should develop appropriate safety and health measures and determine the application of this guide. 2 Significance and application | |tt||2.1 Sample handling is an important step in surface analysis. Improper sample handling can lead to completely wrong analytical results.
2.2 X-ray photoelectron spectroscopy is a sensitive analytical technique that is only effective for surface analysis at a depth of several nanometers. Such depths are seriously affected by sample handling. 2.3 This guideline describes sample handling procedures in detail. These methods can minimize the effect of the shadow. 3. Although the sample preparation techniques for neutron spectroscopy and X-ray photoelectron spectroscopy are basically similar, there are still some differences. The electron beam often causes sample smearing and surface charge discharge. Therefore, more care should be taken when handling samples for neutron spectroscopy. If there are significant differences in the sample preparation methods for neutron spectroscopy and X-ray photoelectron spectroscopy, this standard guide will In addition, 3.2 The sensitive analysis technology does not require higher consumption than other analytical instruments. Personnel who first contact the spectrometer and X-ray photoelectron spectrometer should receive training on sample handling. 3.3 Any contact and handling of the surface of the sample to be analyzed should be minimized. 3.4 Observe.
Approved by the Ministry of Electronics Industry of the People's Republic of China on December 17, 1993 and implemented on June 1, 1994
SJ/T 10458—93
3.4.1 Before analysis, the sample should be examined visually (or with an optical microscope if necessary). 3.4.2 Not all sample details that can be seen in the optical microscope may be seen on the electron or absorption current images. In such cases, the sample should be marked so that the details to be analyzed can be found on the secondary electron or absorption current images.
3.4.3 After analysis, the sample should be examined again to check for any effects of radiation, electron beam irradiation, X-ray irradiation, or the vacuum environment on the sample.
The effect of sample treatment
4.1 Sample history
The history of the sample will affect the treatment it has undergone. For example, handling samples from a non-clean environment may be more likely to cause damage than handling samples from a contaminated environment. The samples to be tested should be treated with special care.
4.2 Test information
The presence of similar information will also affect the handling of the sample. If the test information is located below the target layer that must be removed in the analysis plan, it is possible to perform more sample surface treatment than the measured sample surface information. 4.3 Information from other analytical techniques
If the sample to be tested has been analyzed by other analytical techniques, the sample surface may be contaminated, which will affect its handling. Therefore, the sample should be analyzed by the analytical technique first, and then other analyses should be performed. 5 Sources of sample contamination
5.1 Tools, wool covers, etc.
5.1.1 When it is necessary to treat the sample, use clean tools to ensure that the sample surface does not change before analysis and that the sample is not damaged by the high temperature or high pressure environment. Tools should be made of materials that will not contaminate the sample surface and should be rinsed in high-purity water before use.
5.1.2 When photographing and handling samples, gloves may be used and the surface of the workpiece may be rubbed, which may cause some contamination to the sample. Avoid contact of slippery powder, silicone compounds and other substances on the hands with the sample. Also avoid contamination of the sample by the operating environment and the workbench.
5.2 Particle tail
The compressed gas discharged from the air and air pipes used to remove particles from the sample surface may contaminate the sample. Although these two methods can fully remove surface particles, there is a risk that in some cases the air flow will generate electricity on many samples, which may cause them to adsorb more particles. The use of ionization nozzles can solve this problem. 5.3 Vacuum Conditions and Time 5.3.1 The vacuum conditions in the chamber have a significant influence on the data collected, even if the electron energy technique is sensitive to the first layer of contamination. 5.3. Assume that the pressure is 10-1 Pa and that each gas molecule adheres to the surface of the sample after the magnetic pick-up (i.e., the surface adhesion coefficient is 1), it takes only 1 second to reach a thickness of one atomic layer. The exact time required for the adsorption of one atomic layer of contamination depends on the molecular weight of the gas and the number of molecules that can attach to the sample surface. Oxygen, water vapor, carbon dioxide, oxygen and methyl methoxide generally have high adhesion coefficients, so the partial pressures of these gases are affected and must be doubled. The adhesion coefficient of the less reactive gas on the inactive surface will increase near the hot filament, and the volatile substances can be deposited on the surface of the product from the hot surface (such as the old polarity>). 5.3.3 When micro-irradiation, fracture, cleavage or scratching of samples in the analysis room, the exposed surface is usually chemically active. In this case, pay attention to the high altitude conditions and the burst time. 5.4 The effect of artificial absorption of photons by radiation
SJ/T 1045A--93
5.4.1 The incident electron beam in neutron spectroscopy can cause changes in the surface of the sample being analyzed. Compared with the impact of the incident photon beam in photospectroscopy, the electron beam has a smaller impact on the sample, but it can also cause changes in the sample. These beams can gradually analyze the reaction between the residual gas in the sample and the sample. The beams can also degrade the sample and thus contaminate the analysis.
5.4.2 The effect of the incident electron beam can be determined by monitoring the change of the sample signal with time, such as for deep analysis without opening the two-shot gun.
5.5 Contamination of the analysis chamber
5.5.1 Multiplication, sieve, copper, potassium, copper. Monument, gold, zinc, The parts such as the research, monuments, and magnets are high vapor pressure elements. When analyzing such samples, special attention should be paid to possible contamination to the analysis chamber and other samples in the analysis chamber. 5.5.2 Even if a small sample that produces contamination meets the requirements of the analysis chamber, the high-grade beam may also degrade the sample, thereby causing the situation described in Section 5.4 and causing serious contamination of the analysis chamber. In this case, the sample should be tested before entering the analysis chamber or during the introduction of the rapid sampling system; or, at the beginning of the analysis, a low-intensity combustion beam should be selected. 5.5.3 Surface diffusion can also cause contamination, especially in the case of surface diffusion. Even under extremely strict recirculation conditions, there may still be contamination caused by surface diffusion.
6 Storage and transfer of samples
6.1 6.1.1 Time
The longer the sample is stored, the more sensitive it will be. Even in a clean environment, the depth of the sample will increase to the depth of analysis required by electrochemical, X-ray, photoelectron spectroscopy and other sensitive analytical techniques. 6.1.2 Container
6.1.2.1 The container suitable for storing the sample should not transfer contaminants to the sample by means of particle, gas, liquid surface diffusion, etc. The sample surface being analyzed should not touch the container wall. 6.1.2.2 The following will be photographed.The best containers for storing samples are the laboratory and the laboratory. The inner wall of the container should be kept away from any volatile substances in the container. Otherwise, cross contamination may occur between samples. 6.1.3 Temperature Storage The influence of temperature should be considered when transferring samples. The influence of high temperature should be particularly important. 6.2 Transfer 6.2.1 Sample Transfer Chamber The sample can be transferred from the controlled environment to the analysis room by using the sample transfer chamber. The controlled environment refers to other vacuum chambers, glove boxes (flat chambers), hand boxes, and other areas. Other vacuum chambers, glove boxes, etc. can be directly connected to the analysis room through the pressure chamber. The glove box can be temporarily connected to the analysis room by removing the flange on the analysis room: 6.2.2 Sample Transfer Chamber When transferring samples in the atmosphere, they are protected by coating. Before analysis, the coating can be removed by heating or pressure in the analysis room or pre-extraction.
Technology for Removing the Covering Layer
7.1 General
SJ/T10458—93
The surface or boundary layer to be analyzed is often below the contaminated layer or other component layer. The general principle is to remove these cover layers, which will interfere with the test or interface to be analyzed. 2 Mechanical Separation
.2.1 Sometimes the sample layers can be separated by micro-processing to expose the surface to be analyzed. When using the micro-processing method, it should be noted that the sample may react with the air.
? .2.2 Mechanical separation is suitable for analyzing the inner surface of the bubble structure. However, the deep profiling method is not active when filtering. 1.3 Reduction treatment
It is difficult to completely eliminate the contaminant layer, and it is not necessary to do so. Sometimes, only a certain degree of information is required to obtain the sample, and the condensation analysis method described in 7.9 can be used for analysis. 7.4 Removal of the backing For some samples, it is more convenient to remove the backing than to remove the coating. When the composition of the backing is not required, but the composition of the coating is unknown, this method can be used. When the composition of the substance to be removed is known, the chemical etching method is not only more accurate, but also makes the etching more selective. As mentioned in 7.3, this method can no longer completely remove the backing. 7.5 The cross-sectioning technique is also applicable to common materials. When using the cross-sectioning technique, the change in the cross-section area should be minimized as much as possible. Before the cross-section sample is analyzed, it is often necessary to clean the surface by radiation protection. 7.5. The cross-section method can be cut by a saw, shears, knife, etc. The greater the speed of beating, the greater the damage. When the product is heated, the chemical changes will often be greater. Use abrasive belts or grinding wheels. Use carbide or diamond as abrasive. 7.5.3 Machine polishing is the most important step in preparing batch polishing products. The abrasives used can be aluminum oxide, lead oxide, intermetallic oxide, potassium oxide, silicon dioxide or gold. When selecting a support (usually water or cloth), careful consideration should be given. 7.5.4 Chemical or electrochemical polishing. Chemical or electrochemical polishing is sometimes required after polishing. Chemical polishing is to polish the product without adding external electricity. Electrochemical cell polishing requires a constant current and voltage to be added to the sample. The polishing liquid and equipment should be selected according to the sample. 7.5.5 When the sample is broken, The material width of the fixed block has the characteristics of pressure and maturity. These materials have great influence on the re-entry of the vacuum. Therefore, the sample should be removed and analyzed. 7.5.6 Waist angle method
The grinding angle method is used to make the sample within the range of the sample. When the difference is increased, the sample is expanded and the scanning is limited. The size of the electronic instrument used in the measurement must be smaller than the size of the expanded layer. The precautions described in .5 are also applicable to the grinding angle method.
7.5 Ball spot method bzxZ.net
The ball pit method is similar to the free method. The outflow rate of the three diameters of the outflow surface is greater than the original time of the outflow, and the ball method can be used. 7.5. The depth analysis of the magnetic field pit edge
is similar to the grinding angle method. The sample depth can also be measured by using the time-sharing edge green. Whether it is high or low, After irradiating the sample, all the pits left have slightly inclined pits. The pit wall can be scanned by electron beam to obtain the information about the changes in the sample structure with the depth.
7.5.9 Position of the interface
SI/T10458—93
The position of the interface of some samples is not obvious by visual inspection and secondary electron rapid observation. If there is a difference in the concentration of an element across the interface, the position of the interface can be determined by scanning or imaging. 7.5.10 Combining the cross-sectional profiling method with the milling method When performing interface analysis, the interface to be analyzed can be selected. The side angle method can reduce the thickness of the layer that must be avoided. The ion condensation depth can be measured starting from the position of the layer closest to the interface. If the coating is grown slowly or in steps (e.g., a growth thickness of about 1/3 of an Å), the interface between the coating material and the bulk material can be analyzed by X-ray photoelectron spectroscopy and AES. X-ray photoelectron spectroscopy and AES are used to measure the properties of the surface and the energetic reactions of the interface during production. However, the interface determined by these methods is not always accurate for the composition of the coating. Solvents 7.7.1 High purity solvents can be used to characterize the coating. 2 Alcohols and solvents are used for washing. Residues of these solvents tend to coat the sample surface. In addition, the emission energy of the spectrometer will be reduced when using a filament of propylene glycol hexaboride. 7.8 Chemical Etching Chemical etching is used to remove or form layers. Sometimes the etching is selective and will only etch to the interface, not across it. 7.5.1 General ... 7.9.3 The smaller the range of the radiation energy, the deeper the mixed layer. The lower the irradiation rate of each sample group. This means that if the material in the mixed layer is irradiated most quickly, the lower the irradiation rate will be. This phenomenon must be considered when studying the composite. 7.9.4 Chemical changes The radiation energy used may cause chemical changes in the sample - whether this change can be caused depends on the composition of the sample. The aldehyde band, phosphorus salt and acid band are transformed into chemical 7.9.5 Morphology
Using a fixed-time ion beam to measure the sample will cause the surface morphology of the sample to change, thus strictly meeting the requirements of the store rate. The deep separation ability is usually 3%-5% of the set irradiation depth. Using two different ion beams to inject can reduce the morphological changes caused by cross-irradiation. During the irradiation process, the sample stage can be rotated to increase the uniformity of the irradiation. Thereby improving the depth separation ability during the depth separation,
7.9.6 Irradiation and heating
Irradiation and heating (whether performed at the same time or in sequence) can completely eliminate impurities in the gold film or nature. This is for example 5. -1
SJr10458-93
During the heating process, the sample will be deflected toward the surface. For single-piece samples, heating should be performed in advance to remove quality damage. 7.10 This section discusses
When the directional high-sensitivity is high, the measured data will not be real-time. Reactive gases such as oxygen may enter the sample, etc. This section discusses the specific details.
7, 11 Heating
7.11.1 Since only a few materials can withstand the high temperatures caused by the cleaning process, the sample should not be cleaned without heating. This technique can be used for refractory metals and ceramics. Heating can cause many changes in the sample, so caution must be exercised when using this technique. Heating can degas the sample, remove the injected rare gas ions, eliminate the sample damage caused by neutron bombardment, etc. The heating methods include neutron bombardment, quartz lamp laser and indirect heating. 7.1F.2 Heating the sample in a reactive gas environment such as argon pyrolysis gas (the temperature is lower than the room temperature specified in 7.11.1.) can turn the contaminants into volatile substances. This method needs to be carried out in another room that is separate from the analysis. 7.12 Oil removal
When the vapor of the covering material is lower than the vapor of the item being analyzed, the layer can be removed in the auxiliary vacuum chamber by the vacuum method. It can also be carried out according to 7.11. Vacuum extraction and heating. This method requires a long vacuum time (sometimes even several days), and the organic layer on the substrate is exposed to light. 7.13. Irradiate the sample with ultraviolet light in the atmosphere. This can completely remove organic pollutants such as photosensitive adhesive residues on the sample surface. It should be noted that some samples will decompose under ultraviolet irradiation. For in-situ surface decomposition technology, vacuum conditions, time and contaminants, see 5.3. 8.2 Fracture 8.2.1 General Principles In-situ cracking technology is mainly used for gold products, and is also applicable to other materials. In-situ cracking technology has been effectively applied to the treatment of related materials, glass and ceramics. Most samples can be used without or after fracture. The impact fracture system is equipped with a liquid cooling system. The product needs to be cooled to near the temperature before fracture. The impact fracture device can fracture several samples without the need for vacuum. The tensile fracture device usually draws a vacuum every time. It can fracture a sample. The tensile device pulls the selected product at a certain rate. The sample is fractured. Whether the sample can be fractured under high gravity can be tested by the feeding method. The product is placed on the instrument and fractured. If the fracture is not bounded, the impact fracture effect under vacuum conditions may be a crystal fracture: 8.2.3 Sample preparation
8.2.3.1 Geometric shape Fracture position
The impact fracture equipment has certain geometric requirements for the fractured product. A notch is made on the workpiece to control the fracture position. The tensile fracture also requires specific requirements for the sample. 8.2.3.2 For products with non-ideal shapes, the company may attach a fixed length to the product to make it close to the ideal shape, or use a special sample mounting device in the fracture equipment to perform the fracture test. If the sample shape is not suitable for the quality control mechanism or product specification in the fracture equipment, the sample can be fixed at the end with a standard or steel box to prevent premature fracture or fracture in an inappropriate position. 8.2.3.3 Many metal samples can be overfilled with hydrogen to increase the probability of product failure. The time and degree of hydrogenation depend on the sample. Oxygen-filled samples will lose hydrogen when stored in the room for a long time. Therefore, they can be transported and stored in ice during testing. In this way, there will be no excessive hydrogen.
8.2.3.4 Removal of layer on the continuous body
The sample to be cracked is the continuous body. During the analysis, it will retreat to the value. Before the cracking, the outer surface of the conductive material can be smoothed to reduce the charging effect. B.3 Scratching
In-situ scratching can remove the main body material. You can use a needle to scratch the surface of the sample. You should also pay attention to the contamination caused by this method. The scratch should be measured by the damage tester to interfere with the analysis. 9 Fixation of samples
9.1 Method of small-scale electrochemical treatment
9. 1.1 General
For products with very different electrical properties, the problem of sufficient charging of the products is very serious. For large samples, the value of the energy spectrum is large. Please compare the energy consumption of the sample with the light source to obtain the required results. 9.1.2 All conductive masks, coatings, and coatings on the sample surface should be pressed up and in close contact with the surface as possible. In many cases, it is better not to analyze the source area, because the gaps in some parts are large enough to cause the incident beam to be directed or deflected from the sample, thereby disturbing the analysis. When the conductive mask, conductive mesh, or conductive coating is used with a high-pressure beam, it is important to ensure that the conductive mask, conductive coating, etc. are not radiated to the sample surface. Although the conductive mask and conductive coating can conduct the current to the ground near the deflection point, the venting of the coating should be avoided. It is also possible to apply a thin layer of coating on the sample surface and then remove it by radiating. This method can be used for deep investigation. The conductive mask, conductive coating, etc. can be used together with the conductive coating. 9.1.3 Electrons and electrons can be emitted by the sample and the charging effect can be reduced. 5.1.1 Adding a space above the sample (not with the sample) and placing a positive and negative beam on the sample can reduce the sample. 9.1.5 Incident electron beam 9.1.5.1 The incident electron emission coefficient and the beam current are functions of the primary beam. The incident energy in the primary increases the cumulative emission of the secondary electrons, thereby reducing the cumulative effect. 9.1.5.2 Energy The secondary electrons also emit a certain amount of energy, which is the effect of the incident electron beam energy. The amount of electrons emitted by the electron beam can make the secondary electrons charge at a factor of 1. For multi-layer products, the energy of the emitted electrons can be shared by the insulating layer and the conductive layer below it. The conductive layer should also be well grounded, so that the electrons can be conducted to the conductive layer through the insulating layer, thereby reducing the heat of the sample.
9.1.5.3 Current intensity
The sample charge can be reduced by reducing the incident electron beam intensity. The ways to reduce the current include reducing the total current, compensating the electron beam in the upper part of the product, or increasing the incident angle. 9.2 Methods to reduce thermal damage
Fixing the sample on a lamp head or on a lamp with liquid or other cooling air or liquid passing through it can reduce the potential damage. The sample can be pressed to increase its thermal conductivity. There should be a good connection between the sample and the mounting system. In some cases, the sample can be wrapped in a (partial) material to reduce thermal conductivity. This can reduce the incident energy during analysis, but this will increase the acquisition time of the data. S.3 Cutting sample The cutting rod should not be too thin, otherwise the beam will shine outside the sample and non-sample signals will appear. In this case, the sample should be mounted in a way that the non-sample material is completely out of the focus of the beam, so that the acquired data is not affected. S.4 Techniques and particles 9.4.1 Basic fastness It is easy to analyze non-sample or particle materials on the guide substrate. Foil is soft at the research temperature. Powders and particles can be embedded in the substrate. Four old Xie Xin can be used as a medium, but it is not suitable for the sample at this time. If heat treated, the particles will also pop out during irradiation. Alternatively, aluminum foil or other materials may be used. However, only a small amount of particles can be adhered to the foil. For X-ray photocentrifugal spectroscopy, powder samples can be stored on tape for analysis. Usually metal-based tape is used, which can meet the vacuum requirements of the radiation receiving system. 9.4.2 Tablets
Most powders are H-based. Tablets are an excellent method for X-ray neutron analysis. For energy-sensitive spectroscopy, they are often charged. When tableting, attention should be paid to the fact that pressure and temperature will cause significant chemical changes in the product. When heat treating such products, the sample should be checked for outgassing and fragmentation. 9.4.3 Transfer of granular samples.
Use under a microscope. The sharp needle can transfer the sample to the substrate. The sample can be selected by the conductive filter.
9.4.4 Specimen with filaments
The method of spectral analysis of filaments and single products is almost the same as that of laser beam analysis. The fiber bundle can be fixed on the bite belt or the pressure cover on the drag film. 9.4.5 Mounting the base
Some analysis systems can mount the sample on the base so that the analyzer can only obtain information about the sample itself. This method is used for comparative analysis of small samples.
10 Special processing techniques
10.1 Top oil of degassing sample
To avoid the vacuum of the analyzer, the sample can be first placed in the auxiliary vacuum chamber and then sent to the analysis chamber. The sample should not have obvious absorption during the delivery process. Gas, but the single preparation is carried out in the fast sample chamber, this corresponds to the detailed product space contamination 1.2 electrochemical method salt account reverse protection electrochemical method prepared by the benefit membrane, only when the external pressure can exist: ·H move large external electrode, this compensation will be solved. In the case of adding the sample, it is also beneficial to protect the membrane, the sample can be kept in a non-reactive atmosphere in some cases can not be obtained without the new benefit of the liquid market, 10.3 microcell body
use the text of the radio-optical energy harmonic analysis of the unanalyzed mucus product, can be treated by the following method, the mucus is applied to the flat substrate SJ/T10458-93
, after heating wipe off the large liquid separation car. The group sample under the regression analysis of the road with the measurement of the base number, and can meet the requirements of the analysis of the phenomenon of the air. For the liquid with neutron radiation, nitrogen can be used for cooling. Additional remarks:
This standard is drafted by Tianjin Liangyi Village Material Research Institute. The drafters of this standard are Ren Guwei, Yan Ruyue, Meng Xinghua, and Hua Qing. This standard is equivalent to the sample treatment of neutron spectroscopy and X-ray spectroscopy by using the standard ASTME10R7 of the Association for Testing Materials.13. Irradiate the sample with ultraviolet light in the atmosphere. This can completely remove organic contaminants such as photosensitive resin residues on the sample surface. It should be noted that some samples will decompose under ultraviolet irradiation. For in-situ surface decomposition technology, please refer to Section 5.3 for air conditions, time and contaminants. 8.2 Fracture 8.2.1 General The in-situ fracture technology is mainly used for gold products and is also applicable to other materials. The in-situ fracture technology has been effectively applied to the treatment of related materials, glass and ceramics. Most samples can be used without or without fracture. The impact fracture system is equipped with a liquid cooling system. The product needs to be cooled to near the temperature before fracture. The impact fracture device can fracture several samples without the need for vacuum. The tensile fracture device usually draws a vacuum every time. It can fracture a sample. The tensile device pulls the selected product at a certain rate. The sample is fractured. Whether the sample can be fractured under high gravity can be tested by the feeding method. The product is placed on the instrument and fractured. If the fracture is not bounded, the impact fracture effect under vacuum conditions may be a crystal fracture: 8.2.3 Sample preparation
8.2.3.1 Geometric shape Fracture position
The impact fracture equipment has certain geometric requirements for the fractured product. A notch is made on the workpiece to control the fracture position. The tensile fracture also requires specific requirements for the sample. 8.2.3.2 For products with non-ideal shapes, the company may attach a fixed length to the product to make it close to the ideal shape, or use a special sample mounting device in the fracture equipment to perform the fracture test. If the sample shape is not suitable for the quality control mechanism or product specification in the fracture equipment, the sample can be fixed at the end with a standard or steel box to prevent premature fracture or fracture in an inappropriate position. 8.2.3.3 Many metal samples can be overfilled with hydrogen to increase the probability of product failure. The time and degree of hydrogenation depend on the sample. Oxygen-filled samples will lose hydrogen when stored in the room for a long time. Therefore, they can be transported and stored in ice during testing. In this way, there will be no excessive hydrogen.
8.2.3.4 Removal of layer on the continuous body
The sample to be cracked is the continuous body. During the analysis, it will retreat to the value. Before the cracking, the outer surface of the conductive material can be smoothed to reduce the charging effect. B.3 Scratching
In-situ scratching can remove the main body material. You can use a needle to scratch the surface of the sample. You should also pay attention to the contamination caused by this method. The scratch should be measured by the damage tester to interfere with the analysis. 9 Fixation of samples
9.1 Method of small-scale electrochemical treatment
9. 1.1 General
For products with very different electrical properties, the problem of sufficient charging of the products is very serious. For large samples, the value of the energy spectrum is large. Please compare the energy consumption of the sample with the light source to obtain the required results. 9.1.2 All conductive masks, coatings, and coatings on the sample surface should be pressed up and in close contact with the surface as possible. In many cases, it is better not to analyze the source area, because the gaps in some parts are large enough to cause the incident beam to be directed or deflected from the sample, thereby disturbing the analysis. When the conductive mask, conductive mesh, or conductive coating is used with a high-pressure beam, it is important to ensure that the conductive mask, conductive coating, etc. are not radiated to the sample surface. Although the conductive mask and conductive coating can conduct the current to the ground near the deflection point, the venting of the coating should be avoided. It is also possible to apply a thin layer of coating on the sample surface and then remove it by radiating. This method can be used for deep investigation. The conductive mask, conductive coating, etc. can be used together with the conductive coating. 9.1.3 Electrons and electrons can be emitted by the sample and the charging effect can be reduced. 5.1.1 Adding a space above the sample (not with the sample) and placing a positive and negative beam on the sample can reduce the sample. 9.1.5 Incident electron beam 9.1.5.1 The incident electron emission coefficient and the beam current are functions of the primary beam. The incident energy in the primary increases the cumulative emission of the secondary electrons, thereby reducing the cumulative effect. 9.1.5.2 Energy The secondary electrons also emit a certain amount of energy, which is the effect of the incident electron beam energy. The amount of electrons emitted by the electron beam can make the secondary electrons charge at a factor of 1. For multi-layer products, the energy of the emitted electrons can be shared by the insulating layer and the conductive layer below it. The conductive layer should also be well grounded, so that the electrons can be conducted to the conductive layer through the insulating layer, thereby reducing the heat of the sample.
9.1.5.3 Current intensity
The sample charge can be reduced by reducing the incident electron beam intensity. The ways to reduce the current include reducing the total current, compensating the electron beam in the upper part of the product, or increasing the incident angle. 9.2 Methods to reduce thermal damage
Fixing the sample on a lamp head or on a lamp with liquid or other cooling air or liquid passing through it can reduce the potential damage. The sample can be pressed to increase its thermal conductivity. There should be a good connection between the sample and the mounting system. In some cases, the sample can be wrapped in a (partial) material to reduce thermal conductivity. This can reduce the incident energy during analysis, but this will increase the acquisition time of the data. S.3 Cutting sample The cutting rod should not be too thin, otherwise the beam will shine outside the sample and non-sample signals will appear. In this case, the sample should be mounted in a way that the non-sample material is completely out of the focus of the beam, so that the acquired data is not affected. S.4 Techniques and particles 9.4.1 Basic fastness It is easy to analyze non-sample or particle materials on the guide substrate. Foil is soft at the research temperature. Powders and particles can be embedded in the substrate. Four old Xie Xin can be used as a medium, but it is not suitable for the sample at this time. If heat treated, the particles will also pop out during irradiation. Alternatively, aluminum foil or other materials may be used. However, only a small amount of particles can be adhered to the foil. For X-ray photocentrifugal spectroscopy, powder samples can be stored on tape for analysis. Usually metal-based tape is used, which can meet the vacuum requirements of the radiation receiving system. 9.4.2 Tablets
Most powders are H-based. Tablets are an excellent method for X-ray neutron analysis. For energy-sensitive spectroscopy, they are often charged. When tableting, attention should be paid to the fact that pressure and temperature will cause significant chemical changes in the product. When heat treating such products, the sample should be checked for outgassing and fragmentation. 9.4.3 Transfer of granular samples.
Use under a microscope. The sharp needle can transfer the sample to the substrate. The sample can be selected by the conductive filter.
9.4.4 Specimen with filaments
The method of spectral analysis of filaments and single products is almost the same as that of laser beam analysis. The fiber bundle can be fixed on the bite belt or the pressure cover on the drag film. 9.4.5 Mounting the base
Some analysis systems can mount the sample on the base so that the analyzer can only obtain information about the sample itself. This method is used for comparative analysis of small samples.
10 Special processing techniques
10.1 Top oil of degassing sample
To avoid the vacuum of the analyzer, the sample can be first placed in the auxiliary vacuum chamber and then sent to the analysis chamber. The sample should not have obvious absorption during the delivery process. Gas, but the single preparation is carried out in the fast sample chamber, this corresponds to the detailed product space contamination 1.2 electrochemical method salt account reverse protection electrochemical method prepared by the benefit membrane, only when the external pressure can exist: ·H move large external electrode, this compensation will be solved. In the case of adding the sample, it is also beneficial to protect the membrane, the sample can be kept in a non-reactive atmosphere in some cases, the new benefit can be obtained without dropping the liquid market, 10.3 microcell body
use the text of the radio-optical energy harmonic unanalyzed mucus product, can be treated by the following method, the mucus is applied to the flat belt substrate SJ/T10458-93
, and then wiped off the large liquid separation car. The group sample under the regression analysis of the road belt measurement day estimate number, and can meet the requirements of the analysis of the phenomenon of the air. For the liquid with neutron radiation, nitrogen can be used for cooling. Additional remarks:
This standard is drafted by Tianjin Liangyi Village Material Research Institute. The drafters of this standard are Ren Guwei, Yan Ruyue, Meng Xinghua, and Hua Qing. This standard adopts the sample treatment of neutron spectroscopy and X-ray spectroscopy in accordance with the standard ASTME10R7 of the Association for Testing Materials.13. Irradiate the sample with ultraviolet light in the atmosphere. This can completely remove organic contaminants such as photosensitive resin residues on the sample surface. It should be noted that some samples will decompose under ultraviolet irradiation. For in-situ surface decomposition technology, please refer to Section 5.3 for air conditions, time and contaminants. 8.2 Fracture 8.2.1 General The in-situ fracture technology is mainly used for gold products and is also applicable to other materials. The in-situ fracture technology has been effectively applied to the treatment of related materials, glass and ceramics. Most samples can be used without or without fracture. The impact fracture system is equipped with a liquid cooling system. The product needs to be cooled to near the temperature before fracture. The impact fracture device can fracture several samples without the need for vacuum. The tensile fracture device usually draws a vacuum every time. It can fracture a sample. The tensile device pulls the selected product at a certain rate. The sample is fractured. Whether the sample can be fractured under high gravity can be tested by the feeding method. The product is placed on the instrument and fractured. If the fracture is not bounded, the impact fracture effect under vacuum conditions may be a crystal fracture: 8.2.3 Sample preparation
8.2.3.1 Geometric shape Fracture position
The impact fracture equipment has certain geometric requirements for the fractured product. A notch is made on the workpiece to control the fracture position. The tensile fracture also requires specific requirements for the sample. 8.2.3.2 For products with non-ideal shapes, the company may attach a fixed length to the product to make it close to the ideal shape, or use a special sample mounting device in the fracture equipment to perform the fracture test. If the sample shape is not suitable for the quality control mechanism or product specification in the fracture equipment, the sample can be fixed at the end with a standard or steel box to prevent premature fracture or fracture in an inappropriate position. 8.2.3.3 Many metal samples can be overfilled with hydrogen to increase the probability of product failure. The time and degree of hydrogenation depend on the sample. Oxygen-filled samples will lose hydrogen when stored in the room for a long time. Therefore, they can be transported and stored in ice during testing. In this way, there will be no excessive hydrogen.
8.2.3.4 Removal of layer on the continuous body
The sample to be cracked is the continuous body. During the analysis, it will retreat to the value. Before the cracking, the outer surface of the conductive material can be smoothed to reduce the charging effect. B.3 Scratching
In-situ scratching can remove the main body material. You can use a needle to scratch the surface of the sample. You should also pay attention to the contamination caused by this method. The scratch should be measured by the damage tester to interfere with the analysis. 9 Fixation of samples
9.1 Method of small-scale electrochemical treatment
9. 1.1 General
For products with very different electrical properties, the problem of sufficient charging of the products is very serious. For large samples, the value of the energy spectrum is large. Please compare the energy consumption of the sample with the light source to obtain the required results. 9.1.2 All conductive masks, coatings, and coatings on the sample surface should be pressed up and in close contact with the surface as possible. In many cases, it is better not to analyze the source area, because the gaps in some parts are large enough to cause the incident beam to be directed or deflected from the sample, thereby disturbing the analysis. When the conductive mask, conductive mesh, or conductive coating is used with a high-pressure beam, it is important to ensure that the conductive mask, conductive coating, etc. are not radiated to the sample surface. Although the conductive mask and conductive coating can conduct the current to the ground near the deflection point, the venting of the coating should be avoided. It is also possible to apply a thin layer of coating on the sample surface and then remove it by radiating. This method can be used for deep investigation. The conductive mask, conductive coating, etc. can be used together with the conductive coating. 9.1.3 Electrons and electrons can be emitted by the sample and the charging effect can be reduced. 5.1.1 Adding a space above the sample (not with the sample) and placing a positive and negative beam on the sample can reduce the sample. 9.1.5 Incident electron beam 9.1.5.1 The incident electron emission coefficient and the beam current are functions of the primary beam. The incident energy in the primary increases the cumulative emission of the secondary electrons, thereby reducing the cumulative effect. 9.1.5.2 Energy The secondary electrons also emit a certain amount of energy, which is the effect of the incident electron beam energy. The amount of electrons emitted by the electron beam can make the secondary electrons charge at a factor of 1. For multi-layer products, the energy of the emitted electrons can be shared by the insulating layer and the conductive layer below it. The conductive layer should also be well grounded, so that the electrons can be conducted to the conductive layer through the insulating layer, thereby reducing the heat of the sample.
9.1.5.3 Current intensity
The sample charge can be reduced by reducing the incident electron beam intensity. The ways to reduce the current include reducing the total current, compensating the electron beam in the upper part of the product, or increasing the incident angle. 9.2 Methods to reduce thermal damage
Fixing the sample on a lamp head or on a lamp with liquid or other cooling air or liquid passing through it can reduce the potential damage. The sample can be pressed to increase its thermal conductivity. There should be a good connection between the sample and the mounting system. In some cases, the sample can be wrapped in a (partial) material to reduce thermal conductivity. This can reduce the incident energy during analysis, but this will increase the acquisition time of the data. S.3 Cutting sample The cutting rod should not be too thin, otherwise the beam will shine outside the sample and non-sample signals will appear. In this case, the sample should be mounted in a way that the non-sample material is completely out of the focus of the beam, so that the acquired data is not affected. S.4 Techniques and particles 9.4.1 Basic fastness It is easy to analyze non-sample or particle materials on the guide substrate. Foil is soft at the research temperature. Powders and particles can be embedded in the substrate. Four old Xie Xin can be used as a medium, but it is not suitable for the sample at this time. If heat treated, the particles will also pop out during irradiation. Alternatively, aluminum foil or other materials may be used. However, only a small amount of particles can be adhered to the foil. For X-ray photocentrifugal spectroscopy, powder samples can be stored on tape for analysis. Usually metal-based tape is used, which can meet the vacuum requirements of the radiation receiving system. 9.4.2 Tablets
Most powders are H-based. Tablets are an excellent method for X-ray neutron analysis. For energy-sensitive spectroscopy, they are often charged. When tableting, attention should be paid to the fact that pressure and temperature will cause significant chemical changes in the product. When heat treating such products, the sample should be checked for outgassing and fragmentation. 9.4.3 Transfer of granular samples.
Use under a microscope. The sharp needle can transfer the sample to the substrate. The sample can be selected by the conductive filter.
9.4.4 Specimen with filaments
The method of spectral analysis of filaments and single products is almost the same as that of laser beam analysis. The fiber bundle can be fixed on the bite belt or the pressure cover on the drag film. 9.4.5 Mounting the base
Some analysis systems can mount the sample on the base so that the analyzer can only obtain information about the sample itself. This method is used for comparative analysis of small samples.
10 Special processing techniques
10.1 Top oil of degassing sample
To avoid the vacuum of the analyzer, the sample can be first placed in the auxiliary vacuum chamber and then sent to the analysis chamber. The sample should not have obvious absorption during the delivery process. Gas, but the single preparation is carried out in the fast sample chamber, this corresponds to the detailed product space contamination 1.2 electrochemical method salt account reverse protection electrochemical method prepared by the benefit membrane, only when the external pressure can exist: ·H move large external electrode, this compensation will be solved. In the case of adding the sample, it is also beneficial to protect the membrane, the sample can be kept in a non-reactive atmosphere in some cases can not be obtained without the new benefit of the liquid market, 10.3 microcell body
use the text of the radio-optical energy harmonic analysis of the unanalyzed mucus product, can be treated by the following method, the mucus is applied to the flat substrate SJ/T10458-93
, after heating wipe off the large liquid separation car. The group sample under the regression analysis of the road with the measurement of the base number, and can meet the requirements of the analysis of the phenomenon of the air. For the liquid with neutron radiation, nitrogen can be used for cooling. Additional remarks:
This standard is drafted by Tianjin Liangyi Village Material Research Institute. The drafters of this standard are Ren Guwei, Yan Ruyue, Meng Xinghua, and Hua Qing. This standard adopts the sample treatment of neutron spectroscopy and X-ray spectroscopy in accordance with the standard ASTME10R7 of the Association for Testing Materials.It can completely remove organic pollutants such as light-irradiated glue residues on the sample surface. It should be noted that some samples will decompose under ultraviolet irradiation. For the vacuum conditions, time and contaminants of the in-situ fracture resistance technique, see 5.3. 8.2 Fracture 8.2.1 General Principles The in-situ fracture technique is mainly used for gold products, and is also applicable to other materials. The in-situ fracture technique has been effectively applied to the treatment of glass and ceramic materials, and most samples can be used without or after fracture. The impact fracture system is equipped with a liquid cooling system. The product needs to be cooled to near the temperature before fracture. The impact fracture device can fracture several samples without damage, while the after fracture device usually draws a vacuum each time! Can be pulled apart, a sample is pulled apart by a tensile device at a certain rate. The sample is cracked by the sample. Whether the sample can be cracked under high gravitational force can be tested by the downward method. The sample is pushed on the surface of the instrument and the fracture is caused by impact. If the fracture is not bounded, the impact fracture effect under vacuum conditions may be a crystal fracture: 8.2.3 Sample preparation
8.2.3.1 Geometric fracture position
The impact fracture equipment has certain geometric requirements for the fractured product. A notch is made on the workpiece to control the fracture position. The tensile fracture also requires specific requirements for the sample. 8.2.3.2 Non-ideal shape
For products with non-ideal shape, the company attaches a fixed length to the product to make it close to the ideal shape, or uses a special sample installation in the fracture equipment to fracture. If the sample shape is not suitable for the quality control mechanism or detailed product summary in the fracture package, the sample can be fixed at the end with a mold or steel box: it will break prematurely or break at an inappropriate position. 8.2.3.3 Many metal samples can be filled with hydrogen to increase the probability of product failure. The time and degree of hydrogenation depend on the sample. The sample filled with oxygen will lose hydrogen when stored in the room for a long time. Therefore, it can be transported and stored in ice in the test. In this way, there will be no more hydrogen.
8.2.3.4 Removal of layer on the continuous body
The sample to be cracked is the continuous body. During the analysis, it will retreat to the value. Before the cracking, the outer surface of the conductive material can be smoothed to reduce the charging effect. B.3 Scratching
In-situ scratching can remove the main body material. You can use a needle to scratch the surface of the sample. You should also pay attention to the contamination caused by this method. The scratch should be measured by the damage tester to interfere with the analysis. 9 Fixation of samples
9.1 Method of small-scale electrochemical treatment
9. 1.1 General
For products with very different electrical properties, the problem of sufficient charging of the products is very serious. For large samples, the value of the energy spectrum is large. Please compare the energy consumption of the sample with the light source to obtain the required results. 9.1.2 All conductive masks, coatings, and coatings on the sample surface should be pressed up and in close contact with the surface as possible. In many cases, it is better not to analyze the source area, because the gaps in some parts are large enough to cause the incident beam to be directed or deflected from the sample, thereby disturbing the analysis. When the conductive mask, conductive mesh, or conductive coating is used with a high-pressure beam, it is important to ensure that the conductive mask, conductive coating, etc. are not radiated to the sample surface. Although the conductive mask and conductive coating can conduct the current to the ground near the deflection point, the venting of the coating should be avoided. It is also possible to apply a thin layer of coating on the sample surface and then remove it by radiating. This method can be used for deep investigation. The conductive mask, conductive coating, etc. can be used together with the conductive coating. 9.1.3 Electrons and electrons can be emitted by the sample and the charging effect can be reduced. 5.1.1 Adding a space above the sample (not with the sample) and placing a positive and negative beam on the sample can reduce the sample. 9.1.5 Incident electron beam 9.1.5.1 The incident electron emission coefficient and the beam current are functions of the primary beam. The incident energy in the primary increases the cumulative emission of the secondary electrons, thereby reducing the cumulative effect. 9.1.5.2 Energy The secondary electrons also emit a certain amount of energy, which is the effect of the incident electron beam energy. The amount of electrons emitted by the electron beam can make the secondary electrons charge at a factor of 1. For multi-layer products, the energy of the emitted electrons can be shared by the insulating layer and the conductive layer below it. The conductive layer should also be well grounded, so that the electrons can be conducted to the conductive layer through the insulating layer, thereby reducing the heat of the sample.
9.1.5.3 Current intensity
The sample charge can be reduced by reducing the incident electron beam intensity. The ways to reduce the current include reducing the total current, compensating the electron beam in the upper part of the product, or increasing the incident angle. 9.2 Methods to reduce thermal damage
Fixing the sample on a lamp head or on a lamp with liquid or other cooling air or liquid passing through it can reduce the potential damage. The sample can be pressed to increase its thermal conductivity. There should be a good connection between the sample and the mounting system. In some cases, the sample can be wrapped in a (partial) material to reduce thermal conductivity. This can reduce the incident energy during analysis, but this will increase the acquisition time of the data. S.3 Cutting sample The cutting rod should not be too thin, otherwise the beam will shine outside the sample and non-sample signals will appear. In this case, the sample should be mounted in a way that the non-sample material is completely out of the focus of the beam, so that the acquired data is not affected. S.4 Techniques and particles 9.4.1 Basic fastness It is easy to analyze non-sample or particle materials on the guide substrate. Foil is soft at the research temperature. Powders and particles can be embedded in the substrate. Four old Xie Xin can be used as a medium, but it is not suitable for the sample at this time. If heat treated, the particles will also pop out during irradiation. Alternatively, aluminum foil or other materials may be used. However, only a small amount of particles can be adhered to the foil. For X-ray photocentrifugal spectroscopy, powder samples can be stored on tape for analysis. Usually metal-based tape is used, which can meet the vacuum requirements of the radiation receiving system. 9.4.2 Tablets
Most powders are H-based. Tablets are an excellent method for X-ray neutron analysis. For energy-sensitive spectroscopy, they are often charged. When tableting, attention should be paid to the fact that pressure and temperature will cause significant chemical changes in the product. When heat treating such products, the sample should be checked for outgassing and fragmentation. 9.4.3 Transfer of granular samples.
Use under a microscope. The sharp needle can transfer the sample to the substrate. The sample can be selected by the conductive filter.
9.4.4 Specimen with filaments
The method of spectral analysis of filaments and single products is almost the same as that of laser beam analysis. The fiber bundle can be fixed on the bite belt or the pressure cover on the drag film. 9.4.5 Mounting the base
Some analysis systems can mount the sample on the base so that the analyzer can only obtain information about the sample itself. This method is used for comparative analysis of small samples.
10 Special processing techniques
10.1 Top oil of degassing sample
To avoid the vacuum of the analyzer, the sample can be first placed in the auxiliary vacuum chamber and then sent to the analysis chamber. The sample should not have obvious absorption during the delivery process. Gas, but the single preparation is carried out in the fast sample chamber, this corresponds to the detailed product space contamination 1.2 electrochemical method salt account reverse protection electrochemical method prepared by the benefit membrane, only when the external pressure can exist: ·H move large external electrode, this compensation will be solved. In the case of adding the sample, it is also beneficial to protect the membrane, the sample can be kept in a non-reactive atmosphere in some cases can not be obtained without the new benefit of the liquid market, 10.3 microcell body
use the text of the radio-optical energy harmonic analysis of the unanalyzed mucus product, can be treated by the following method, the mucus is applied to the flat substrate SJ/T10458-93
, after heating wipe off the large liquid separation car. The group sample under the regression analysis of the road with the measurement of the base number, and can meet the requirements of the analysis of the phenomenon of the air. For the liquid with neutron radiation, nitrogen can be used for cooling. Additional remarks:
This standard is drafted by Tianjin Liangyi Village Material Research Institute. The drafters of this standard are Ren Guwei, Yan Ruyue, Meng Xinghua, and Hua Qing. This standard adopts the sample treatment of neutron spectroscopy and X-ray spectroscopy in accordance with the standard ASTME10R7 of the Association for Testing Materials.It can completely remove organic pollutants such as light-irradiated glue residues on the sample surface. It should be noted that some samples will decompose under ultraviolet irradiation. For the vacuum conditions, time and contaminants of the in-situ fracture resistance technique, see 5.3. 8.2 Fracture 8.2.1 General Principles The in-situ fracture technique is mainly used for gold products, and is also applicable to other materials. The in-situ fracture technique has been effectively applied to the treatment of glass and ceramic materials, and most samples can be used without or after fracture. The impact fracture system is equipped with a liquid cooling system. The product needs to be cooled to near the temperature before fracture. The impact fracture device can fracture several samples without damage, while the after fracture device usually draws a vacuum each time! Can be pulled apart, a sample is pulled apart by a tensile device at a certain rate. The sample is cracked by the sample. Whether the sample can be cracked under high gravitational force can be tested by the downward method. The sample is pushed on the surface of the instrument and the fracture is caused by impact. If the fracture is not bounded, the impact fracture effect under vacuum conditions may be a crystal fracture: 8.2.3 Sample preparation
8.2.3.1 Geometric fracture position
The impact fracture equipment has certain geometric requirements for the fractured product. A notch is made on the workpiece to control the fracture position. The tensile fracture also requires specific requirements for the sample. 8.2.3.2 Non-ideal shape
For products with non-ideal shape, the company attaches a fixed length to the product to make it close to the ideal shape, or uses a special sample installation in the fracture equipment to fracture. If the sample shape is not suitable for the quality control mechanism or detailed product summary in the fracture package, the sample can be fixed at the end with a mold or steel box: it will break prematurely or break at an inappropriate position. 8.2.3.3 Many metal samples can be filled with hydrogen to increase the probability of product failure. The time and degree of hydrogenation depend on the sample. The sample filled with oxygen will lose hydrogen when stored in the room for a long time. Therefore, it can be transported and stored in ice in the test. In this way, there will be no more hydrogen.
8.2.3.4 Removal of layer on the continuous body
The sample to be cracked is the continuous body. During the analysis, it will retreat to the value. Before the cracking, the outer surface of the conductive material can be smoothed to reduce the charging effect. B.3 Scratching
In-situ scratching can remove the main body material. You can use a needle to scratch the surface of the sample. You should also pay attention to the contamination caused by this method. The scratch should be measured by the damage tester to interfere with the analysis. 9 Fixation of samples
9.1 Method of small-scale electrochemical treatment
9. 1.1 General
For products with very different electrical properties, the problem of sufficient charging of the products is very serious. For large samples, the value of the energy spectrum is large. Please compare the energy consumption of the sample with the light source to obtain the required results. 9.1.2 All conductive masks, coatings, and coatings on the sample surface should be pressed up and in close contact with the surface as possible. In many cases, it is better not to analyze the source area, because the gaps in some parts are large enough to cause the incident beam to be directed or deflected from the sample, thereby disturbing the analysis. When the conductive mask, conductive mesh, or conductive coating is used with a high-pressure beam, it is important to ensure that the conductive mask, conductive coating, etc. are not radiated to the sample surface. Although the conductive mask and conductive coating can conduct the current to the ground near the deflection point, the venting of the coating should be avoided. It is also possible to apply a thin layer of coating on the sample surface and then remove it by radiating. This method can be used for deep investigation. The conductive mask, conductive coating, etc. can be used together with the conductive coating. 9.1.3 Electrons and electrons can be emitted by the sample and the charging effect can be reduced. 5.1.1 Adding a space above the sample (not with the sample) and placing a positive and negative beam on the sample can reduce the sample. 9.1.5 Incident electron beam 9.1.5.1 The incident electron emission coefficient and the beam current are functions of the primary beam. The incident energy in the primary increases the cumulative emission of the secondary electrons, thereby reducing the cumulative effect. 9.1.5.2 Energy The secondary electrons also emit a certain amount of energy, which is the effect of the incident electron beam energy. The amount of electrons emitted by the electron beam can make the secondary electrons charge at a factor of 1. For multi-layer products, the energy of the emitted electrons can be shared by the insulating layer and the conductive layer below it. The conductive layer should also be well grounded, so that the electrons can be conducted to the conductive layer through the insulating layer, thereby reducing the heat of the sample.
9.1.5.3 Current intensity
The sample charge can be reduced by reducing the incident electron beam intensity. The ways to reduce the current include reducing the total cu
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