This standard specifies the brand, model, specification, technical requirements, test methods, inspection rules, marking, packaging, transportation and storage of tungsten boats for semiconductor devices. This standard applies to tungsten boats and tooling boats of various shapes made of high-temperature resistant, high-purity, high-density tungsten plates (sheets). SJ/T 10535-1994 Tungsten Boats for Semiconductor Devices SJ/T10535-1994 Standard download decompression password: www.bzxz.net
This standard specifies the brand, model, specification, technical requirements, test methods, inspection rules, marking, packaging, transportation and storage of tungsten boats for semiconductor devices. This standard applies to tungsten boats and tooling boats of various shapes made of high-temperature resistant, high-purity, high-density tungsten plates (sheets).

Electronic Industry Standard of the People's Republic of China
SJ/T 10535 94
Tungsten boat for semiconductor devices
Tungsten boat for semiconductor devices1994-08-08Published
1994-12-01Implemented
Ministry of Electronics Industry of the People's Republic of China
Electronic Industry Standard of the People's Republic of China
Tungsten boat for semiconductor devices
Tungsten boat tar semicanductur 1 Subject content and scope of application
SJ/T1053594
1.1 This standard specifies the brand, model, specification, technical requirements, test methods, inspection rules, marking, packaging, pre-transportation storage, and other requirements for semiconductor devices.
1.2 This standard is applicable to various shapes of parts and tooling made of high temperature resistant, pure and dense chain plates (sheets). 2 Reference standards
CH3875
GE4181
GB4196
Determination of density of strips 3.1 Brand of tungsten boat, named with double letters WZ of \calcium\\boat\ and \calcium\boat\ 3.2 Model of tungsten boat: tungsten boat type is represented by \V\, "U\", and different types under each model are represented by 1,,.., such as V-1 represents V-type with pressure edge, V-1 represents without pressure edge (see Table 1), 3.3 Specification of tungsten boat is represented by whole word, such as -3-15. Among them, 03 represents the thickness of body wall, \15 represents the width of disk, 3.4 Model, type and specification example of tungsten boat brand, Wzo -Y*TX-Y
Ministry of Electronics Industry of the People's Republic of ChinabZxz.net
(w70-v-[-03-[5)
Disc width (mm)
Board wall thickness (mm)
Calcium boat type
Duck disease plastic number
1994 08 0 white approval
1994·1201 implementation
S.1/T 1053594
The indicated brand number is W20, the model has no edges, the disc thickness is 0.3n1m, and the width is 15mm. 3.5 Book boat brand, model and use are shown in Table 1 ,!
Model
V-bottomless
u-1, medical type
UN medical forget
4 Technical requirements
4.1 Comparison of components
Members and industrial metal, real Beijing reputation lithium, electronic test receiver key, metal material high ancestor fire, burning about, the United States filler, academic standard, grade family surface layer, real platform material with chemical composition B4181 in w, brand special. 4.2 Specification size
Specification size connection table 2 shrimp have special requirements can be negotiated) table 2
investment trap
wv +
W20-7--5-26
W2O.V. -36-3
wZ0-V-[-03-15
WA()-V-1 -03-U5
W20.V.1-03-
wz0-1--1-03-16
w2-U-33-2
W2()-U- ±-24-16
WZ 0-l:- Ru-25
W20-LN-03-29
w20-11- N-24-24
1.3 The density
of gold is 15.g/cm
4.4 The melting point is 3390°C.
4.6 The surface quality
50-119
2. 5 -- 3
SJ/T10535-94
4.F1 The tungsten boat is clean and has a light-bearing property. The surface of the boat is allowed to have a slight oxidation color but no dark spots or black spots. The electrolytic disc is allowed to have an area of ​​less than 211m* before the end of the light spot. 4.62 The surface of the boat should not have cracks, delamination, cracks, missing edges and corners, and there should be no hair on various parts. 4.7 The physical properties of the board selected by the contractor shall meet the requirements of 3BT5. 5 Test method 5.1 The test results of 4.1 are analyzed according to the relevant standards in 342.1-. 52 The standard dimensions of the side plates 4.2 The following dimensions shall be measured with a ruler of 0.02mm and 0.0mm and a ruler of 0.53 The dimensions shall be measured according to 4196. 5.4 The weight of other plates shall be weighed with a human scale (1.2g). 5.5 The special measurement of the plate can be omitted if the chemical composition of the plate is qualified. 5.6 The surface quality of the plate shall be inspected at regular intervals. 6 Inspection regulations 6.1 Inspection batches must be composed of products of the same tax category and of the same components, three parts and continuous production from different countries. 6.2 Receipt inspection 6.2.1 The products shall be inspected and certified by the Chinese inspection department in accordance with the safety requirements of the vehicle standards. The product must meet the requirements of this standard. 6.2.2 The product must be inspected and accepted within two months after receipt. If the inspection result does not meet the requirements of this standard, the supply and demand parties shall negotiate to resolve the issue.
6.3 Decision-making strategies and judgment rules
63.1 Inspection of chemical composition: Randomly select one sample from a batch of materials for chemical composition analysis. If it does not meet the requirements, additional samples shall be taken for analysis and the average value shall be taken. If it still does not meet the requirements, the batch of materials shall be unqualified. 6.3.2 The specifications of tungsten boats shall be inspected before further inspection. 63.3 Inspection of the quality of each boat: Select one sample from each batch for chemical measurement. If the result is not satisfactory, double the sample shall be taken for measurement. If two of the samples are unqualified, the batch of materials shall be rejected. 63.4 The unqualified and qualified samples will be randomly selected from 100 samples for determination. If there are 3 unqualified samples among the 10 samples, the samples will be deemed unqualified. 6.3.5 For the general purpose, 100% control shall be carried out, including packaging, marking, transportation and storage. 7.1 Packaging. The qualified samples shall be packed in kraft paper and then packed into plastic bags. Each bag shall be packed with 21 bags, and each box shall be packed with 4 bags. The inner packaging shall be filled with shockproof paper. 7.2 Steel label. 7.2.1 The inner packaging shall have a label or product certificate and shall indicate: Sample name. Production site number; |tt||Specification:
Validity stamp:
Stamp of the inspection department
Production date, date of shipment:
Manufacturer name.
SJ/T10535-94
The outer packaging box of the product shall be labeled and marked: Manufacturing! -Name:
Product name and specification:
Product batch number:
Product number:
Manufacturer date.
7.3 Transportation and storage
7.3.1 Transportation
This product can be transported by any means of transportation. During production, it shall be handled with care, prevent from rain, cold, and be placed in a well-ventilated place.
7. 3.2 Storage
The storage period before shipment should not exceed 20. The tungsten boat should be placed in a cargo channel with 7 coal and wind, the indoor temperature should not be lower than 35°C, the relative humidity should not be higher than 65, and there should be no acid and harmful gas. Additional remarks:
This standard was drafted by the Standardization Institute of the Ministry of Industry of China. This standard was drafted by the No. 45 Factory of the Ministry of Industry of China, and the main drafters were Wu Man, Guo Yanfen, Qi Shiqiu,
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