Some standard content:
Mechanical Industry Standard of the People's Republic of China
JB/T6922-93
Vacuum Evaporation Coating Equipment
Published on July 13, 1993
Ministry of Machinery Industry of the People's Republic of China
Implemented on July 1, 1994
Mechanical Industry Standard of the People's Republic of China
Vacuum Evaporation Coating Equipment
Subject Content and Scope of Application
JB/T6922-93
This standard specifies the type and basic parameters, technical requirements, test methods, inspection rules and marking, packaging, transportation, storage and other requirements of vacuum evaporation coating equipment.
This standard applies to vacuum evaporation coating equipment (hereinafter referred to as equipment) with an ultimate pressure range of 7×10-3 to 7×10-*Pa. 2
Reference standards
GB6070
GB/T13306
Packaging storage and transportation pictorial symbols
Vacuum flange
JB1090~1092
Type and size of rubber sealing ring for vacuum
ZBJ78019
Type and basic parameters
3.1 Structural form
Vacuum coating equipment model compilation method
The equipment is mainly composed of coating chamber, vacuum unit, protection device and electrical control device. 3.2 Basic parameters
The basic parameters of the equipment shall comply with the provisions of Table 1. Table 1
Ultimate pressure
Evacuation time
(from atmospheric pressure to Pa)
Pressure increase rate
Pa/min
Diameter of coating chamber
Workpiece baking device
Baking temperature adjustment range
Heating uniformity of effective heating area
Approved by the Ministry of Machinery Industry on July 13, 1993
≤7×104
(2×10-3)||tt| |≤7×10-3
(5×10*2)
≤5×10-2
320,400,500,630,800,1000,1250,1600,20000~200，0~300，0~350，0~400
1994-07-01Implementation
JB/T6922-93
3.3The model of the equipment shall comply with the provisions of ZBJ78019. 4 Technical requirements
4.1 Working environment conditions
Temperature: 10~30℃;
Relative humidity: not more than 80%;
Cooling water outlet temperature: not higher than 35℃; c.
Quality of cooling circulation water: Use city tap water or water of equivalent quality; Environment: The room should be clean and tidy, and the air should not contain dust or gas that may cause electrical short circuit and metal surface corrosion. e.
4.2 Structural requirements
The structure of the equipment should be reasonably laid out, beautiful in shape, easy to operate and maintain. The structural type and size of the static and dynamic seals in the equipment should comply with the provisions of GB6070 and JB1090~1092. 4.2.2
4.2.3 Vacuum gauges should be installed on low vacuum and high vacuum pipelines and coating chambers to measure the vacuum degree of each part respectively. If the equipment uses a diffusion pump as the main pump, a cold trap should be installed at the air inlet of the diffusion pump. 4.2.4
4.2.5 The coating room should be equipped with an observation window.
4.2.6 The workpiece baking device should have a temperature measuring electrode or a temperature measuring device. 4.2.7 The speed of the workpiece rack rotating mechanism should comply with the provisions of the product manual. 4.2.8 Equipment equipped with an ion bombardment device or a wide beam low-energy ion source device should be able to work normally and continuously for more than 30 minutes within the parameter range specified in the product manual.
4.2.9 The heater using tungsten wire as the heat source should be able to evaporate the evaporation material normally, and the change in the geometric shape of the heater should not affect the normal evaporation.
The evaporation source of the equipment should work stably and be easy to adjust and control. 4.2.11
When the equipment uses a low-voltage, high-current resistance evaporator, each evaporator heater should work normally under the voltage of 4~20V and the current of 50~130A.
4.3 Manufacturing requirements
4.3.1 The machining quality of the parts and components of the equipment and the quality of the welded parts and assembly quality shall comply with the provisions of the manufacturer's technical documents. 4.3.2 The roughness R of the inner surface of the equipment coating chamber and each sealing surface shall not be greater than 3.2um, and the surfaces in the vacuum state during operation shall be effectively vacuum cleaned and dried. The movements of the rotating parts, lifting mechanisms, etc. shall be flexible, and there shall be no jamming, stagnation, looseness, shaking and abnormal sounds. The dynamic seals that require grease shall be filled with vacuum grease. 4.3.3 The materials of the main parts and components of the equipment shall comply with the provisions of the corresponding material standards. 4.3.4 The quality of the electrical devices supporting the equipment shall comply with the provisions of the manufacturer's technical documents, and shall ensure the safety and reliability of the equipment during operation. The arrangement of the lines in the device shall be neat and clear to facilitate maintenance, and the insulation resistance of the electrical circuits in the equipment shall comply with the provisions of Table 2. Table 2
Voltage kv
Insulation resistance Ma
4.3.5 The appearance quality of the equipment should be free of sharp corners, edges, protrusions and rough surfaces that are not required for functionality. The edges of the joint surfaces of parts and components should be neat and symmetrical, and there should be no obvious misalignment. The coating of metal parts should be firm, without shedding and rusting, and all fasteners should have an anti-rust layer. The painted surface of the equipment should be smooth, beautiful, firm, without shedding, peeling and other phenomena. 4.4 Safety protection requirements
4.4.1 The water cooling system of key parts should have an alarm device for water failure or insufficient water pressure, and an interlocking protection mechanism should be provided with the parts related to the power supply, vacuum system, and transmission system, and the action of the protection mechanism should be sensitive and reliable. 4.4.2 For equipment equipped with electromagnetic or pneumatic valves, the coating chamber inflation valve and high vacuum valve and the high vacuum valve and pre-evacuation valve should be interlocked, and the valve should be able to close automatically in the event of a sudden power outage. 2
JB/T6922-93
4.4.3 The equipment and its attached electrical devices shall be equipped with grounding devices, and the grounding points shall be clearly marked. 4.4.4 Several sections of wires shall not be connected on the distribution board or in the wire pipe. The wire inlet and outlet and the metal wall through which the wires pass shall be protected by smooth insulating materials.
The electrical circuits and electrical components on the equipment shall be guaranteed not to be affected by coolants, lubricants and other harmful substances. 4.4.51
After a sudden power outage during the operation of the equipment, the electrical appliances shall be prevented from being automatically connected when the power supply is restored. 4.4.61
4.4.7 In the electrical circuits of the equipment, short-circuit protection and overcurrent protection devices shall be provided according to the load conditions. For equipment using high-voltage power supply, the opening of the coating chamber equipped with high-voltage electrodes and the connection of the high-voltage circuit shall be equipped with a safety interlock device. 4.4.8
Shielding devices shall be installed on the high-voltage, high-frequency and other parts of the equipment that may produce radiation that may harm the human body. 4.4.10
The hydraulic system shall be equipped with pressure indicating instruments and safety devices for regulating pressure. The equipment and its accessories shall be equipped with necessary signs or marks for operation and safety. The signs and marks shall be firm, and the text shall be accurate, clear, simple and easy to understand.
5 Test method
Limiting pressure of coating chamber
The coating chamber is empty (neither the plated objects are placed nor evaporation is carried out). Without removing the evaporation source that should be installed when the equipment is working normally, the coating chamber is evacuated with the vacuum system of the equipment (during the evacuation process, the heating or bombardment devices equipped with the equipment itself are allowed to degas the coating chamber). The pressure of the coating chamber is measured within 24 hours. When the change does not exceed 5% within 30 minutes (at this time, all dynamic sealing parts should be in a static state), the lowest value reached is taken as the limiting pressure. 5.2 Pressure rise rate
After the equipment is pumped to the ultimate pressure, continue to pump for 4 hours (allowing degassing), and then close all valves in the coating room that are connected to the vacuum unit. When the pressure in the coating room rises to p (1Pa), start timing, record the pressure pz after 30 minutes, and then calculate the pressure rise rate according to formula (1). R=
Where: R--pressure rise rate of the coating room, Pa/min; pi--pressure at which the pressure rise rate of the coating room is measured (1Pa); p2--pressure at which the pressure rise rate of the coating room is stopped, Pa. 5.3 Coating room exhaust time
After the equipment is pumped to the ultimate pressure, close all valves in the coating room that are connected to the vacuum unit, vent the coating room, and open the coating room to expose it to the atmosphere for 15 minutes, then close the coating room for exhaust. The time required from the start of exhaust to reaching the specified vacuum degree is the coating room exhaust time.
5.4 Power-on test of resistance evaporator
After cleaning the coating chamber, install the resistance evaporator and the evaporation material, then evacuate the coating chamber until the pressure is lower than the working pressure, turn on the evaporation power supply, gradually heat it, and make the evaporation current reach the requirements of Article 4.2.11 of this standard. At this time, the evaporator should reach the incandescent state. After the evaporation is completed, the evaporation material on the evaporator should be completely evaporated. 5.5 Measurement of heating uniformity of the effective heating area of the workpiece baking device in the coating chamber Start the vacuum system to evacuate to the working pressure, turn on the power supply of the baking device, when the temperature reaches the highest baking temperature and maintains for 10 minutes, use a thermocouple or other equivalent temperature sensor to measure the temperature of 3 to 5 points (which can reflect the maximum temperature difference) in the effective heating area between the plated workpiece and the baking device and 10 mm away from the workpiece surface. Each point should be measured at the same time (conversion switch is allowed). Then calculate the maximum relative deviation between the temperature of each measuring point and the average temperature as the heating uniformity, which is calculated according to formula (2). G = t2tal × 100
Where: G. Heating uniformity of effective heating zone at point i, %; t-temperature at point i, ℃;
tep—average temperature of n measuring points, ℃
6 Inspection rules
JB/T6922-93
6.1 Each equipment and its accessories must be inspected by the quality inspection department of the manufacturer in accordance with this standard and relevant technical documents. Only after passing the inspection and accompanied by a product certificate signed by the inspection department and the inspection personnel can it be shipped out of the factory. 6.2 Equipment inspection is divided into factory inspection and type inspection. 6.2.1 Factory inspection
Factory inspection should be carried out one by one, and its inspection content includes the items specified in Articles 3.2, 4.2.7, 4.2.8, 4.2.9, 4.2.10, and 4.2.3. In addition, no-load power-on test of the electrical device supporting the equipment and insulation resistance inspection of each power-consuming part should also be carried out. 6.2.2 Type inspection
Type inspection of equipment shall include all contents of the type, basic parameters and technical requirements of this standard. 6.2.2.1 For equipment that may generate radiation, the manufacturer shall entrust a professional unit recognized by the state to measure the radiation dose and confirm that it is within the permitted range.
6.2.2.2 When the equipment belongs to the following situations, type inspection shall be carried out: a. New products to be trial-produced;
b. When there are major changes in the design, process or materials of the equipment; c. When evaluating and grading similar products;
d. Regular inspection of batch products. It shall be carried out once every two years, and 5% of the batch (not less than 2 units) shall be inspected each time. If one item fails, the doubled number of products shall be re-sampled for re-inspection. If there are still unqualified products, each unit shall be inspected. 6.3 The test methods during inspection shall be in accordance with the provisions of Chapter 5 of this standard. 6.4 Various measuring tools used in the inspection shall have certificates of conformity, and those that require metrological verification shall have valid metrological verification certificates. 7 Marking, packaging, transportation, storage
7.1 MarkingbZxz.net
Each equipment and its accessories shall be equipped with a sign in a conspicuous position. The sign shall comply with the provisions of GB/T13306, and its content shall at least include the manufacturer's name, equipment name, equipment model, factory number, manufacturing date, etc. 7.2 Packaging
7.2.1 The packaging of the equipment shall take measures to prevent shock, moisture, rain and dust, so as to ensure that the equipment will not be damaged, rusted, or have reduced accuracy during loading and unloading, transportation, storage, etc. 7.2.2 Before the first use of each type of packaging box or when there is a major change in the packaging material, a water spray test, lifting test and shock test simulating the actual situation shall be carried out. After the test, the quality of the packaged equipment shall not be affected. 7.2.3 The packaging box of the equipment shall have a waterproof and non-falling shipping mark, and the packaging and transportation operation marks of the equipment shall comply with the provisions of GB191.
7.2.4 The equipment in the whole package should be evacuated to a vacuum state and all valves should be closed before packaging. Before packing, the residual water and waste in the equipment should be cleaned up, and the sealing surface should be ensured to be undamaged. The metal surface that has not been treated with surface anti-rust should be coated with anti-rust grease. 7.2.5 The accompanying documents should include the packing list, factory certificate, instruction manual, etc., and they should be packed in waterproof plastic bags. 7.3 Transportation
The transportation of equipment must ensure that the equipment and its packaging will not be damaged. Parts and components that may loosen during transportation should be prevented from loosening. During transportation, they should be protected from sunlight, rain and severe vibration. 7.4 Storage
The equipment should be stored in a well-ventilated place with a relative humidity not exceeding 90%. The place must be free of acid, alkali vapor and gas that can cause corrosion. The vacuum of the equipment in the whole package must not be broken during storage. 4
Additional Notes:
JB/T6922-93
This standard is proposed by the National Vacuum Technology Standardization Technical Committee. This standard is under the jurisdiction of the Shenyang Vacuum Technology Research Institute of the Ministry of Machinery Industry. This standard was drafted by the Shenyang Vacuum Technology Research Institute. The main drafters of this standard are Zhang Shufan and Zheng Entao. 55 Random documents should include packing list, factory certificate, instruction manual, etc., and they should be packed in waterproof plastic bags. 7.3 Transportation
The transportation of equipment must ensure that the equipment and its packaging are not damaged. Parts and components that may come loose during transportation should be prevented from loosening. The equipment should be protected from sunlight, rain and severe vibration during transportation. 7.4 Storage
The equipment should be stored in a well-ventilated place with a relative humidity not exceeding 90%. The place must be free of acid, alkali vapor and gas that may cause corrosion. The vacuum of the whole packaged equipment must not be destroyed during storage. 4
Additional notes:
JB/T6922-93
This standard was proposed by the National Technical Committee for Vacuum Technology Standardization. This standard is under the jurisdiction of the Shenyang Vacuum Technology Research Institute of the Ministry of Machinery Industry. This standard was drafted by the Shenyang Vacuum Technology Research Institute. The main drafters of this standard are Zhang Shufan and Zheng Entao. 55 Random documents should include packing list, factory certificate, instruction manual, etc., and they should be packed in waterproof plastic bags. 7.3 Transportation
The transportation of equipment must ensure that the equipment and its packaging are not damaged. Parts and components that may come loose during transportation should be prevented from loosening. The equipment should be protected from sunlight, rain and severe vibration during transportation. 7.4 Storage
The equipment should be stored in a well-ventilated place with a relative humidity not exceeding 90%. The place must be free of acid, alkali vapor and gas that may cause corrosion. The vacuum of the whole packaged equipment must not be destroyed during storage. 4
Additional notes:
JB/T6922-93
This standard was proposed by the National Technical Committee for Vacuum Technology Standardization. This standard is under the jurisdiction of the Shenyang Vacuum Technology Research Institute of the Ministry of Machinery Industry. This standard was drafted by the Shenyang Vacuum Technology Research Institute. The main drafters of this standard are Zhang Shufan and Zheng Entao. 5
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